Inventor · disambiguated record
Koichi Kazama
Also filed as: KAZAMA KOICHI
8 granted patents·8 pending applications·359 citations·filing 1993–2025
89Inventor score
Top patents by PatentIndex Score
16 records- 0191US5376213APlasma processing apparatusTOKYO ELECTRON LTD·Filed 1993·Granted Dec 27, 1994·181 cites·21 claims
- 0289US9466468B2Shower head, plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted Oct 11, 2016·8 cites·7 claims
- 0389US6383333B1Protective member for inner surface of chamber and plasma processing apparatusTOKAI CARBON KK·Filed 1999·Granted May 7, 2002·96 cites·5 claims
- 0489US6334983B1Processing systemTOKYO ELECTRON LTD·Filed 1998·Granted Jan 1, 2002·52 cites·9 claims
- 0556US2025015039A1Bonding device and bonding methodTORAY ENG CO LTD·Filed 2024·Application pending·0 cites
- 0656US2025014936A1Transfer device and transfer methodTORAY ENG CO LTD·Filed 2024·Application pending·0 cites
- 0756US2023360936A1Transfer device and transfer substrateTORAY ENG CO LTD·Filed 2023·Application pending·0 cites
- 0855US2025308955A1Transfer deviceTORAY ENG CO LTD·Filed 2025·Application pending·0 cites
- 0952US11257662B2Annular member, plasma processing apparatus and plasma etching methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 22, 2022·0 cites·8 claims
- 1052US2008156441A1Plasma processing apparatus and electrode plate, electrode supporting body, and shield ring thereofTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 1146USRE40046EProcessing systemTOKYO ELECTRON LTD·Filed 1998·Granted Feb 12, 2008·8 cites·29 claims
- 1243USRE39969EProcessing systemTOKYO ELECTRON LTD·Filed 1998·Granted Jan 1, 2008·7 cites·23 claims
- 1343USRE39939EProcessing systemTOKYO ELECTRON LTD·Filed 1998·Granted Dec 18, 2007·7 cites·17 claims
- 1443US2020267826A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
- 1540US2003155078A1Plasma processing apparatus, and electrode plate, electrode supporting body, and shield ring thereofTOKYO ELECTRON LTD·Filed 2003·Application pending·0 cites
- 1635US2003015287A1Inner wall protection member for chamber and plasma procressing apparatusTOKAI CARBON KK·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →