Inventor
SAEGUSA HIDEHITO
JP5 patents
Patents
5 patentsUS6733620B1May 11, 2004
Process apparatus
TOKYO ELECTRON LTD134 citations97
US6334983B1Jan 1, 2002
Processing system
TOKYO ELECTRON LTD52 citations95
USRE40046EFeb 12, 2008
Processing system
TOKYO ELECTRON LTD8 citations73
USRE39969EJan 1, 2008
Processing system
TOKYO ELECTRON LTD7 citations73
USRE39939EDec 18, 2007
Processing system
TOKYO ELECTRON LTD7 citations73