Inventor
KAZAMA KOICHI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “KAZAMA KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS5376213ADec 27, 1994
Plasma processing apparatus
TOKYO ELECTRON LTD181 citations98
US6334983B1Jan 1, 2002
Processing system
TOKYO ELECTRON LTD52 citations95
US9466468B2Oct 11, 2016
Shower head, plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD8 citations80
USRE40046EFeb 12, 2008
Processing system
TOKYO ELECTRON LTD8 citations73
USRE39969EJan 1, 2008
Processing system
TOKYO ELECTRON LTD7 citations73
USRE39939EDec 18, 2007
Processing system
TOKYO ELECTRON LTD7 citations73
US11257662B2Feb 22, 2022
Annular member, plasma processing apparatus and plasma etching method
TOKYO ELECTRON LTD0 citations61
US12562344B2Feb 24, 2026
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations44