Inventor
ZHONG LANLAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “ZHONG LANLAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUSD859333SSep 10, 2019
Collimator for a physical vapor deposition chamber
APPLIED MATERIALS INC14 citations85
USD858468SSep 3, 2019
Collimator for a physical vapor deposition chamber
APPLIED MATERIALS INC14 citations85
USD998575SSep 12, 2023
Collimator for use in a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC10 citations84
USD997111SAug 29, 2023
Collimator for use in a physical vapor deposition (PVD) chamber
APPLIED MATERIALS INC9 citations84
US11222816B2Jan 11, 2022
Methods and apparatus for semi-dynamic bottom up reflow
APPLIED MATERIALS INC0 citations60
US11492699B2Nov 8, 2022
Substrate temperature non-uniformity reduction over target life using spacing compensation
APPLIED MATERIALS INC0 citations59
US11289329B2Mar 29, 2022
Methods and apparatus for filling a feature disposed in a substrate
APPLIED MATERIALS INC0 citations58
US11527437B2Dec 13, 2022
Methods and apparatus for intermixing layer for enhanced metal reflow
APPLIED MATERIALS INC0 citations52
US11315771B2Apr 26, 2022
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations46