Inventor · disambiguated record
Umesh M. Kelkar
Also filed as: KELKAR UMESH · KELKAR UMESH M · KELKAR UMESH MADHAV
27 granted patents·16 pending applications·894 citations·filing 1999–2025
95Inventor score
Top patents by PatentIndex Score
43 records- 0196US6190037B1Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring systemAPPLIED MATERIALS INC·Filed 1999·Granted Feb 20, 2001·455 cites·27 claims
- 0295US6350320B1Heater for processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Feb 26, 2002·293 cites·28 claims
- 0393US7504006B2Self-ionized and capacitively-coupled plasma for sputtering and resputteringAPPLIED MATERIALS INC·Filed 2003·Granted Mar 17, 2009·49 cites·45 claims
- 0493US6406599B1Magnetron with a rotating center magnet for a vault shaped sputtering targetAPPLIED MATERIALS INC·Filed 2000·Granted Jun 18, 2002·45 cites·24 claims
- 0592US10626500B2Showerhead designAPPLIED MATERIALS INC·Filed 2019·Granted Apr 21, 2020·7 cites·20 claims
- 0688US9062372B2Self-ionized and capacitively-coupled plasma for sputtering and resputteringGOPALRAJA PRABURAM·Filed 2007·Granted Jun 23, 2015·13 cites·10 claims
- 0788US8404048B2Off-angled heating of the underside of a substrate using a lamp assemblyEWERT MAURICE E·Filed 2011·Granted Mar 26, 2013·12 cites·16 claims
- 0886US9123758B2Gas injection apparatus and substrate process chamber incorporating sameAPPLIED MATERIALS INC·Filed 2014·Granted Sep 1, 2015·7 cites·18 claims
- 0982US10221483B2Showerhead designAPPLIED MATERIALS INC·Filed 2015·Granted Mar 5, 2019·3 cites·11 claims
- 1080US11768984B2Parameter sensing and computer modeling for gas delivery health monitoringAPPLIED MATERIALS INC·Filed 2020·Granted Sep 26, 2023·1 cites·19 claims
- 1179US12443175B2Eco-efficiency (sustainability) dashboard for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2024·Granted Oct 14, 2025·0 cites·18 claims
- 1279US9818587B2Off-angled heating of the underside of a substrate using a lamp assemblyAPPLIED MATERIALS INC·Filed 2013·Granted Nov 14, 2017·3 cites·21 claims
- 1373US12326282B2Cooling flow in substrate processing according to predicted cooling parametersAPPLIED MATERIALS INC·Filed 2023·Granted Jun 10, 2025·0 cites·20 claims
- 1473US10508339B2Blocker plate for use in a substrate process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Dec 17, 2019·1 cites·11 claims
- 1570US2025354735A1Cooling flow in substrate processing according to predicted cooling parametersAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1666US12001197B2Eco-efficiency (sustainability) dashboard for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2021·Granted Jun 4, 2024·0 cites·14 claims
- 1766US9863038B2Off-angled heating of the underside of a substrate using a lamp assemblyAPPLIED MATERIALS INC·Filed 2013·Granted Jan 9, 2018·1 cites·17 claims
- 1866US2025210319A1Electrode configurations and magnet configurations for processing chambers, and related methods and apparatus, for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1966US2025226186A1Heaters and plasma generators for gas activation, and related chamber and for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2066US2025155883A1Process modeling platform for substrate manufacturing systemsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2165US8647484B2Target for sputtering chamberRITCHIE ALAN ALEXANDER·Filed 2006·Granted Feb 11, 2014·2 cites·24 claims
- 2261US11421322B2Blocker plate for use in a substrate process chamberAPPLIED MATERIALS INC·Filed 2019·Granted Aug 23, 2022·0 cites·16 claims
- 2360US12228905B2Eco-efficiency monitoring and exploration platform for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2021·Granted Feb 18, 2025·0 cites·20 claims
- 2460US2023167543A1Method for fabricating chamber partsAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2560US2025086356A1Substrate manufacturing equipment comprehensive digital twin fleetAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2659US11569069B23D printed chamber components configured for lower film stress and lower operating temperatureAPPLIED MATERIALS INC·Filed 2020·Granted Jan 31, 2023·0 cites·14 claims
- 2759US2009308732A1Apparatus and method for uniform depositionAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 2858US2025201594A1Modular processing chambers and related heating configurations, methods, apparatus, and modules for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2957US2025189946A1Eco-efficiency monitoring and exploration platform for semiconductor manufacturingAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 3057US2015345019A1Method and apparatus for improving gas flow in a substrate processing chamberAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 3156US11591689B2Method for fabricating chamber partsAPPLIED MATERIALS INC·Filed 2020·Granted Feb 28, 2023·0 cites·9 claims
- 3256US2024210916A1Machine and deep learning techniques for predicting ecological efficiency in substrate processingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 3355US11239058B2Protective layers for processing chamber componentsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 1, 2022·0 cites·20 claims
- 3455US6790326B2Magnetron for a vault shaped sputtering target having two opposed sidewall magnetsAPPLIED MATERIALS INC·Filed 2002·Granted Sep 14, 2004·2 cites·20 claims
- 3555US2025085699A1Substrate manufacturing equipment comprehensive digital twin fleetAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3651US10777391B23D printed chamber components configured for lower film stress and lower operating temperatureAPPLIED MATERIALS INC·Filed 2016·Granted Sep 15, 2020·0 cites·21 claims
- 3751US2025086357A1Substrate manufacturing equipment comprehensive digital twin fleetAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3850US11830706B2Heated pedestal design for improved heat transfer and temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Nov 28, 2023·0 cites·19 claims
- 3947US11810766B2Protection of aluminum process chamber componentsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 7, 2023·0 cites·20 claims
- 4046US9520267B2Bias voltage frequency controlled angular ion distribution in plasma processingGODET LUDOVIC·Filed 2014·Granted Dec 13, 2016·0 cites·17 claims
- 4144US2022245307A1Hybrid physics/machine learning modeling of processesAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 4243US2016068958A1Lamp Heater For Atomic Layer DepositionKELKAR UMESH M·Filed 2014·Application pending·0 cites
- 4338US2004222082A1Oblique ion milling of via metallizationAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
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