Inventor
WEI JUNQI
CN16 patents
Patents
16 patentsUSD913979SMar 23, 2021
Inner shield for a substrate processing chamber
APPLIED MATERIALS INC27 citations93
USD931241SSep 21, 2021
Lower shield for a substrate processing chamber
APPLIED MATERIALS INC5 citations83
USD973609SDec 27, 2022
Upper shield with showerhead for a process chamber
APPLIED MATERIALS INC5 citations71
US11328929B2May 10, 2022
Methods, apparatuses and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC2 citations71
US12148629B2Nov 19, 2024
Shutter disk
APPLIED MATERIALS INC0 citations62
US11913107B2Feb 27, 2024
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC0 citations62
US11862480B2Jan 2, 2024
Shutter disk
APPLIED MATERIALS INC0 citations62
USD971167SNov 29, 2022
Lower shield for a substrate processing chamber
APPLIED MATERIALS INC0 citations62
US11670513B2Jun 6, 2023
Apparatus and systems for substrate processing for lowering contact resistance
APPLIED MATERIALS INC0 citations60
US11171017B2Nov 9, 2021
Shutter disk
APPLIED MATERIALS INC0 citations59
US11114288B2Sep 7, 2021
Physical vapor deposition apparatus
APPLIED MATERIALS INC0 citations59
US11881385B2Jan 23, 2024
Methods and apparatus for reducing defects in preclean chambers
APPLIED MATERIALS INC0 citations58
US12100577B2Sep 24, 2024
High conductance inner shield for process chamber
APPLIED MATERIALS INC0 citations51
US10115573B2Oct 30, 2018
Apparatus for high compressive stress film deposition to improve kit life
APPLIED MATERIALS INC0 citations51
US9960023B2May 1, 2018
Methods and apparatus for nodule control in a titanium-tungsten target
APPLIED MATERIALS INC0 citations51
US12080522B2Sep 3, 2024
Preclean chamber upper shield with showerhead
APPLIED MATERIALS INC0 citations50