Inventor
NAKAZAWA SEIICHI
JP4 patents
Patents
4 patentsUSD759603SJun 21, 2016
Chamber of charged particle beam drawing apparatus
NUFLARE TECHNOLOGY INC9 citations82
USD722298SFeb 10, 2015
Chamber of charged particle beam drawing apparatus
NUFLARE TECHNOLOGY INC12 citations82
USD576647SSep 9, 2008
Nozzle for vapor-phase epitaxial equipment
NUFLARE TECHNOLOGY INC5 citations57
US9196458B2Nov 24, 2015
Charged particle beam drawing apparatus and drawing chamber
NUFLARE TECHNOLOGY INC0 citations50