Inventor · disambiguated record
Akimitsu Ebihara
Also filed as: EBIHARA AKIMITSU
53 granted patents·11 pending applications·1,900 citations·filing 1994–2023
99Inventor score
Top patents by PatentIndex Score
64 records- 0199US7486385B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Granted Feb 3, 2009·96 cites·26 claims
- 0299US7321419B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2005·Granted Jan 22, 2008·112 cites·7 claims
- 0399US6437463B1Wafer positioner with planar motor and mag-lev fine stageNIKON CORP·Filed 2000·Granted Aug 20, 2002·135 cites·89 claims
- 0498US8027027B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2007·Granted Sep 27, 2011·48 cites·11 claims
- 0598US5623853APrecision motion stage with single guide beam and follower stageNIKON PRECISION INC·Filed 1994·Granted Apr 29, 1997·798 cites·32 claims
- 0697US9274437B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2015·Granted Mar 1, 2016·6 cites·63 claims
- 0795US9810995B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2017·Granted Nov 7, 2017·3 cites·45 claims
- 0895US6255796B1Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2000·Granted Jul 3, 2001·44 cites·71 claims
- 0995US6246204B1Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 1999·Granted Jun 12, 2001·94 cites·80 claims
- 1094US9551943B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2016·Granted Jan 24, 2017·3 cites·64 claims
- 1194US6252370B1Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2000·Granted Jun 26, 2001·38 cites·58 claims
- 1293US8767172B2Projection optical device and exposure apparatusEBIHARA AKIMITSU·Filed 2010·Granted Jul 1, 2014·8 cites·39 claims
- 1392US8018575B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Granted Sep 13, 2011·11 cites·17 claims
- 1492US6391503B2Scanning exposure methodsNIKON CORP·Filed 2001·Granted May 21, 2002·37 cites·101 claims
- 1592US6329780B1Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2000·Granted Dec 11, 2001·28 cites·27 claims
- 1692US6323935B1Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2000·Granted Nov 27, 2001·65 cites·95 claims
- 1791US8436979B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2010·Granted May 7, 2013·7 cites·48 claims
- 1890US10191388B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2018·Granted Jan 29, 2019·1 cites·27 claims
- 1990US10007188B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2017·Granted Jun 26, 2018·1 cites·23 claims
- 2090US6255795B1Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2000·Granted Jul 3, 2001·23 cites·83 claims
- 2189US6134981APrecision scanning apparatus and method with fixed and movable guide membersNIPPON KOGAKU KK·Filed 1999·Granted Oct 24, 2000·67 cites·8 claims
- 2288US5996437APrecision motion stage with single guide beam and follower stageNIKON CORP·Filed 1997·Granted Dec 7, 1999·62 cites·4 claims
- 2387US7573225B2Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2005·Granted Aug 11, 2009·4 cites·39 claims
- 2486US6363809B1Precision scanning apparatus and method with fixed and movable guide membersNIKON CORP JAPAN·Filed 2000·Granted Apr 2, 2002·32 cites·9 claims
- 2583US6969966B2Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2004·Granted Nov 29, 2005·11 cites·60 claims
- 2681US6693402B2Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2001·Granted Feb 17, 2004·24 cites·62 claims
- 2779US8681314B2Stage device and coordinate correction method for the same, exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2006·Granted Mar 25, 2014·5 cites·26 claims
- 2878US7812925B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2006·Granted Oct 12, 2010·3 cites·32 claims
- 2975US6396589B1Apparatus and method for measuring three-dimensional shape of objectMINOLTA CO LTD·Filed 2000·Granted May 28, 2002·19 cites·22 claims
- 3074USRE41232EWafer positioner with planar motor and mag-lev fine stageNIPPON KOGAKU KK·Filed 2004·Granted Apr 20, 2010·15 cites·18 claims
- 3173US9001307B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2014·Granted Apr 7, 2015·0 cites·43 claims
- 3272US5806193ATilt and movement apparatus using flexure and air cylinderNIKON CORP·Filed 1995·Granted Sep 15, 1998·41 cites·18 claims
- 3370US7012398B2Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2004·Granted Mar 14, 2006·5 cites·42 claims
- 3469US8830445B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2012·Granted Sep 9, 2014·0 cites·23 claims
- 3565US9025129B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2014·Granted May 5, 2015·0 cites·61 claims
- 3665US9019473B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2014·Granted Apr 28, 2015·0 cites·61 claims
- 3765US5726542AStage apparatusNIKON CORP·Filed 1995·Granted Mar 10, 1998·26 cites·11 claims
- 3863US8724085B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted May 13, 2014·0 cites·98 claims
- 3963US8717537B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted May 6, 2014·0 cites·46 claims
- 4063US8692976B2Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2013·Granted Apr 8, 2014·0 cites·132 claims
- 4163US6844695B2Electromagnetic alignment and scanning apparatusNIKON CORP·Filed 2003·Granted Jan 18, 2005·3 cites·56 claims
- 4260US8767177B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2011·Granted Jul 1, 2014·0 cites·18 claims
- 4359US8319941B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2009·Granted Nov 27, 2012·0 cites·13 claims
- 4459US6677691B2Stage apparatus and method of using the sameMINOLTA CO LTD·Filed 2002·Granted Jan 13, 2004·7 cites·8 claims
- 4558US8705001B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2010·Granted Apr 22, 2014·0 cites·48 claims
- 4656US8436978B2Exposure apparatus, and device manufacturing methodEBIHARA AKIMITSU·Filed 2007·Granted May 7, 2013·0 cites·23 claims
- 4756US6281643B1Stage apparatusNIKON CORP·Filed 1997·Granted Aug 28, 2001·17 cites·58 claims
- 4853US2025223773A1Piling MachineJAPAN DEV & CONSTRUCTION·Filed 2023·Application pending·0 cites
- 4951US8436981B2Exposing method, exposure apparatus, and device fabricating methodEBIHARA AKIMITSU·Filed 2009·Granted May 7, 2013·0 cites·27 claims
- 5051US2024309605A1Construction MachineJAPAN DEV & CONSTRUCTION·Filed 2022·Application pending·0 cites
Showing the top 50 of 64 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Akimitsu Ebihara files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →