Inventor · disambiguated record
Akella V. S. Satya
Also filed as: SATYA AKELLA V · SATYA AKELLA V S
20 granted patents·2,160 citations·filing 2000–2007
97Inventor score
Top patents by PatentIndex Score
20 records- 0198US7656170B2Multiple directional scans of test structures on semiconductor integrated circuitsKLA TENCOR TECH CORP·Filed 2007·Granted Feb 2, 2010·96 cites·12 claims
- 0298US6771806B1Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devicesKLA TENCOR·Filed 2000·Granted Aug 3, 2004·258 cites·27 claims
- 0397US7655482B2Chemical mechanical polishing test structures and methods for inspecting the sameKLA TENCOR·Filed 2007·Granted Feb 2, 2010·91 cites·10 claims
- 0497US6751519B1Methods and systems for predicting IC chip yieldKLA TENCOR TECH CORP·Filed 2002·Granted Jun 15, 2004·222 cites·33 claims
- 0596US6636064B1Dual probe test structures for semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Oct 21, 2003·127 cites·22 claims
- 0696US6633174B1Stepper type test structures and methods for inspection of semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Oct 14, 2003·195 cites·14 claims
- 0796US6433561B1Methods and apparatus for optimizing semiconductor inspection toolsKLA TENCOR CORP·Filed 2000·Granted Aug 13, 2002·159 cites·18 claims
- 0895US6524873B1Continuous movement scans of test structures on semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Feb 25, 2003·102 cites·23 claims
- 0995US6509197B1Inspectable buried test structures and methods for inspecting the sameKLA TENCOR CORP·Filed 2000·Granted Jan 21, 2003·146 cites·24 claims
- 1095US6445199B1Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structuresKLA TENCOR CORP·Filed 2000·Granted Sep 3, 2002·106 cites·20 claims
- 1194US7012439B2Multiple directional scans of test structures on semiconductor integrated circuitsKLA TENCOR TECH CORP·Filed 2005·Granted Mar 14, 2006·21 cites·9 claims
- 1294US6576923B2Inspectable buried test structures and methods for inspecting the sameKLA TENCOR CORP·Filed 2002·Granted Jun 10, 2003·117 cites·13 claims
- 1393US6813572B2Apparatus and methods for managing reliability of semiconductor devicesKLA TENCOR TECH CORP·Filed 2002·Granted Nov 2, 2004·69 cites·16 claims
- 1492US6921672B2Test structures and methods for inspection of semiconductor integrated circuitsKLA TENCOR TECH CORP·Filed 2003·Granted Jul 26, 2005·59 cites·12 claims
- 1592US6566885B1Multiple directional scans of test structures on semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted May 20, 2003·57 cites·24 claims
- 1692US6528818B1Test structures and methods for inspection of semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Mar 4, 2003·60 cites·19 claims
- 1791US7179661B1Chemical mechanical polishing test structures and methods for inspecting the sameKLA TENCOR·Filed 2000·Granted Feb 20, 2007·68 cites·14 claims
- 1890US6948141B1Apparatus and methods for determining critical area of semiconductor design dataKLA TENCOR TECH CORP·Filed 2002·Granted Sep 20, 2005·112 cites·18 claims
- 1988US6918101B1Apparatus and methods for determining critical area of semiconductor design dataKLA TENCOR TECH CORP·Filed 2002·Granted Jul 12, 2005·67 cites·8 claims
- 2085US6867606B2Multiple directional scans of test structures on semiconductor integrated circuitsKLA TENCOR TECHNOLOGIES INC·Filed 2003·Granted Mar 15, 2005·28 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →