Inventor · disambiguated record
Andrew M. Hawryluk
Also filed as: HAWRYLUK ANDREW · HAWRYLUK ANDREW M
66 granted patents·20 pending applications·2,487 citations·filing 1987–2020
99Inventor score
Top patents by PatentIndex Score
86 records- 0198US9929011B2Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocationsULTRATECH INC·Filed 2017·Granted Mar 27, 2018·463 cites·10 claims
- 0298US6635588B1Method for laser thermal processing using thermally induced reflectivity switchULTRATECH STEPPER INC·Filed 2002·Granted Oct 21, 2003·287 cites·30 claims
- 0398US6531681B1Apparatus having line source of radiant energy for exposing a substrateULTRATECH STEPPER INC·Filed 2000·Granted Mar 11, 2003·241 cites·27 claims
- 0498US6479821B1Thermally induced phase switch for laser thermal processingULTRATECH STEPPER INC·Filed 2000·Granted Nov 12, 2002·289 cites·48 claims
- 0596US7514305B1Apparatus and methods for improving the intensity profile of a beam image used to process a substrateULTRATECH INC·Filed 2006·Granted Apr 7, 2009·37 cites·22 claims
- 0695US8309474B1Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabricationWANG YUN·Filed 2011·Granted Nov 13, 2012·25 cites·27 claims
- 0794US6366308B1Laser thermal processing apparatus and methodULTRATECH STEPPER INC·Filed 2000·Granted Apr 2, 2002·119 cites·31 claims
- 0894US6002553AGiant magnetoresistive sensorUS ENERGY·Filed 1994·Granted Dec 14, 1999·118 cites·19 claims
- 0993US6383956B2Method of forming thermally induced reflectivity switch for laser thermal processingULTRATECH STEPPER INC·Filed 2001·Granted May 7, 2002·61 cites·17 claims
- 1093US6303476B1Thermally induced reflectivity switch for laser thermal processingULTRATECH STEPPER INC·Filed 2000·Granted Oct 16, 2001·62 cites·12 claims
- 1193US5003567ASoft x-ray reduction camera for submicron lithographyHAWRYLUK ANDREW M·Filed 1989·Granted Mar 26, 1991·102 cites·33 claims
- 1292US6671235B1Method of and apparatus for defining disk tracks in magnetic recording mediaULTRATECH STEPPER INC·Filed 2000·Granted Dec 30, 2003·37 cites·31 claims
- 1392US5257132ABroadband diffractive lens or imaging elementUS ARMY·Filed 1991·Granted Oct 26, 1993·116 cites·43 claims
- 1490US7466161B2Direct detect sensor for flat panel displaysPHOTON DYNAMICS INC·Filed 2006·Granted Dec 16, 2008·14 cites·6 claims
- 1590US5071207ABroadband diffractive lens or imaging elementUS ENERGY·Filed 1990·Granted Dec 10, 1991·94 cites·26 claims
- 1689US6495390B2Thermally induced reflectivity switch for laser thermal processingULTRATECH STEPPER INC·Filed 2001·Granted Dec 17, 2002·38 cites·40 claims
- 1788US9666432B2Method and apparatus for forming device quality gallium nitride layers on silicon substratesULTRATECH INC·Filed 2014·Granted May 30, 2017·6 cites·27 claims
- 1888US6570656B1Illumination fluence regulation system and method for use in thermal processing employed in the fabrication of reduced-dimension integrated circuitsULTRATECH STEPPER INC·Filed 2000·Granted May 27, 2003·48 cites·17 claims
- 1987US10083843B2Laser annealing systems and methods with ultra-short dwell timesULTRATECH INC·Filed 2015·Granted Sep 25, 2018·4 cites·11 claims
- 2087US8865603B2Laser annealing systems and methods with ultra-short dwell timesULTRATECH INC·Filed 2013·Granted Oct 21, 2014·7 cites·20 claims
- 2187US8153930B1Apparatus and methods for improving the intensity profile of a beam image used to process a substrateHAWRYLUK ANDREW M·Filed 2009·Granted Apr 10, 2012·8 cites·19 claims
- 2287US6825101B1Methods for annealing a substrate and article produced by such methodsULTRATECH INC·Filed 2000·Granted Nov 30, 2004·36 cites·65 claims
- 2386US10090153B2Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocationsULTRATECH INC·Filed 2017·Granted Oct 2, 2018·3 cites·8 claims
- 2485US8986562B2Methods of laser processing photoresist in a gaseous environmentULTRATECH INC·Filed 2013·Granted Mar 24, 2015·6 cites·33 claims
- 2585US6347176B1Acousto-optical light tunnel apparatus and methodULTRATECH STEPPER INC·Filed 2000·Granted Feb 12, 2002·32 cites·25 claims
- 2684US6554464B1Apparatus for and method of reducing or eliminating interference effects in a light tunnel illuminatorULTRATECH STEPPER INC·Filed 2000·Granted Apr 29, 2003·31 cites·17 claims
- 2783US9613815B2High-efficiency line-forming optical systems and methods for defect annealing and dopant activationULTRATECH INC·Filed 2015·Granted Apr 4, 2017·3 cites·13 claims
- 2881US10847381B2Laser annealing systems and methods with ultra-short dwell timesVEECO INSTR INC·Filed 2018·Granted Nov 24, 2020·2 cites·14 claims
- 2981US9490128B2Non-melt thin-wafer laser thermal annealing methodsWANG YUN·Filed 2012·Granted Nov 8, 2016·6 cites·11 claims
- 3081US9302348B2Ultrafast laser annealing with reduced pattern density effects in integrated circuit fabricationWANG YUN·Filed 2012·Granted Apr 5, 2016·5 cites·17 claims
- 3180US8742286B1Apparatus and method for improving the intensity profile of a beam image used to process a substrateHAWRYLUK ANDREW M·Filed 2012·Granted Jun 3, 2014·3 cites·3 claims
- 3279US8872408B2Betavoltaic power sources for mobile device applicationsULTRATECH INC·Filed 2013·Granted Oct 28, 2014·4 cites·15 claims
- 3378US8067305B2Electrically conductive structure on a semiconductor substrate formed from printingZAFIROPOULO ARTHUR W·Filed 2008·Granted Nov 29, 2011·36 cites·34 claims
- 3478US4870648AX-ray beamsplitterUS ENERGY·Filed 1987·Granted Sep 26, 1989·35 cites·25 claims
- 3577US10665504B2Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturingVEECO INSTR INC·Filed 2018·Granted May 26, 2020·2 cites·25 claims
- 3676US8823921B2Programmable illuminator for a photolithography systemZLATANOV BORISLAV·Filed 2011·Granted Sep 2, 2014·5 cites·20 claims
- 3776US8299446B2Sub-field enhanced global alignmentHAWRYLUK ANDREW M·Filed 2010·Granted Oct 30, 2012·6 cites·20 claims
- 3875US8460959B2Fast thermal annealing of GaN LEDsWANG YUN·Filed 2011·Granted Jun 11, 2013·2 cites·19 claims
- 3974US9559023B2Systems and methods for reducing beam instability in laser annealingULTRATECH INC·Filed 2014·Granted Jan 31, 2017·5 cites·23 claims
- 4073US7960993B2Method for capacitive testing of flat panel displaysPHOTON DYNAMICS INC·Filed 2009·Granted Jun 14, 2011·3 cites·10 claims
- 4171US9960036B2Method and apparatus for forming device quality gallium nitride layers on silicon substratesULTRATECH INC·Filed 2017·Granted May 1, 2018·1 cites·16 claims
- 4271US9266437B2Betavoltaic power sources for transportation applicationsULTRATECH INC·Filed 2013·Granted Feb 23, 2016·2 cites·19 claims
- 4369US9558973B2Laser annealing systems and methods with ultra-short dwell timesULTRATECH INC·Filed 2014·Granted Jan 31, 2017·3 cites·22 claims
- 4467US8765493B2Methods of characterizing semiconductor light-emitting devices based on product wafer characteristicsHAWRYLUK ANDREW M·Filed 2012·Granted Jul 1, 2014·1 cites·22 claims
- 4566US9436103B2Wynne-Dyson projection lens with reduced susceptibility to UV damageULTRATECH INC·Filed 2014·Granted Sep 6, 2016·1 cites·13 claims
- 4666US6326219B2Methods for determining wavelength and pulse length of radiant energy used for annealingULTRATECH STEPPER INC·Filed 1999·Granted Dec 4, 2001·29 cites·85 claims
- 4765US8781213B2Optical alignment systems for forming LEDs having a rough surfaceHSIEH ROBERT L·Filed 2011·Granted Jul 15, 2014·1 cites·20 claims
- 4864US8796151B2Systems for and methods of laser-enhanced plasma processing of semiconductor materialsHAWRYLUK ANDREW M·Filed 2012·Granted Aug 5, 2014·1 cites·18 claims
- 4964US8796053B2Photolithographic LED fabrication using phase-shift maskHAWRYLUK ANDREW M·Filed 2010·Granted Aug 5, 2014·1 cites·19 claims
- 5062US8088633B2Optical alignment methods for forming LEDs having a rough surfaceHSIEH ROBERT L·Filed 2009·Granted Jan 3, 2012·2 cites·19 claims
Showing the top 50 of 86 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →