Inventor · disambiguated record
Andrew J. Hazelton
Also filed as: HAZELTON ANDREW · HAZELTON ANDREW J
101 granted patents·42 pending applications·2,900 citations·filing 1995–2025
99Inventor score
Top patents by PatentIndex Score
143 records- 0199US7522259B2Cleanup method for optics in immersion lithographyNIKON CORP·Filed 2005·Granted Apr 21, 2009·71 cites·38 claims
- 0299US7456930B2Environmental system including vacuum scavenge for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Nov 25, 2008·51 cites·54 claims
- 0399US7321415B2Environmental system including vacuum scavenge for an immersion lithography apparatusNIKON CORP·Filed 2005·Granted Jan 22, 2008·63 cites·85 claims
- 0499US7251017B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2005·Granted Jul 31, 2007·65 cites·37 claims
- 0599US6437463B1Wafer positioner with planar motor and mag-lev fine stageNIKON CORP·Filed 2000·Granted Aug 20, 2002·135 cites·89 claims
- 0698US7486380B2Wafer table for immersion lithographyNIKON CORP·Filed 2006·Granted Feb 3, 2009·46 cites·48 claims
- 0798US7339650B2Immersion lithography fluid control system that applies force to confine the immersion liquidNIKON CORP·Filed 2005·Granted Mar 4, 2008·46 cites·32 claims
- 0898US7301607B2Wafer table for immersion lithographyNIKON CORP·Filed 2005·Granted Nov 27, 2007·48 cites·76 claims
- 0998US6313551B1Magnet array for a shaft-type linear motorNIKON CORP·Filed 2000·Granted Nov 6, 2001·120 cites·85 claims
- 1097US7443482B2Liquid jet and recovery system for immersion lithographyNIKON CORP·Filed 2005·Granted Oct 28, 2008·27 cites·68 claims
- 1197US6570273B2Electric linear motorNIKON CORP·Filed 2001·Granted May 27, 2003·84 cites·39 claims
- 1297US6285097B1Planar electric motor and positioning device having transverse magnetsNIKON CORP·Filed 1999·Granted Sep 4, 2001·172 cites·42 claims
- 1396US12150819B2System and method for image detection during instrument grasping and staplingINTUITIVE SURGICAL OPERATIONS·Filed 2023·Granted Nov 26, 2024·3 cites·20 claims
- 1496US7368838B2High efficiency voice coil motorNIKON CORP·Filed 2005·Granted May 6, 2008·30 cites·8 claims
- 1596US6104108AWedge magnet array for linear motorNIKON CORP·Filed 1998·Granted Aug 15, 2000·137 cites·36 claims
- 1695US8089610B2Environmental system including vacuum scavenge for an immersion lithography apparatusHAZELTON ANDREW J·Filed 2007·Granted Jan 3, 2012·13 cites·40 claims
- 1795US7345742B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Mar 18, 2008·43 cites·24 claims
- 1895US6304320B1Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing sameNIKON CORP·Filed 2000·Granted Oct 16, 2001·65 cites·65 claims
- 1994US8456610B2Environmental system including vacuum scavenge for an immersion lithography apparatusHAZELTON ANDREW J·Filed 2009·Granted Jun 4, 2013·11 cites·45 claims
- 2094US7932989B2Liquid jet and recovery system for immersion lithographyNIKON CORP·Filed 2007·Granted Apr 26, 2011·11 cites·30 claims
- 2194US7929111B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Apr 19, 2011·10 cites·22 claims
- 2294US6885430B2System and method for resetting a reaction mass assembly of a stage assemblyNIKON CORP·Filed 2003·Granted Apr 26, 2005·43 cites·36 claims
- 2394US6097114ACompact planar motor having multiple degrees of freedomNIKON CORP·Filed 1998·Granted Aug 1, 2000·118 cites·106 claims
- 2493US6788385B2Stage device, exposure apparatus and methodNIKON CORP·Filed 2002·Granted Sep 7, 2004·82 cites·62 claims
- 2593US6373153B1Stage device, and exposure apparatus with linear motor having polygonal shaped coil unitsNIKON CORP·Filed 2000·Granted Apr 16, 2002·45 cites·15 claims
- 2693US6271606B1Driving motors attached to a stage that are magnetically coupled through a chamberNIKON CORP·Filed 1999·Granted Aug 7, 2001·96 cites·44 claims
- 2792US7929110B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Apr 19, 2011·7 cites·26 claims
- 2891US6208045B1Electric motors and positioning devices having moving magnet arrays and six degrees of freedomNIKON CORP·Filed 1998·Granted Mar 27, 2001·118 cites·74 claims
- 2991US6114781ACooling system for a linear or planar motorNIKON CORP·Filed 1999·Granted Sep 5, 2000·96 cites·42 claims
- 3090US11648081B2System and method for image detection during instrument grasping and staplingINTUITIVE SURGICAL OPERATIONS·Filed 2020·Granted May 16, 2023·2 cites·20 claims
- 3190US11478138B2Imaging systems and methods of useINTUITIVE SURGICAL OPERATIONS·Filed 2018·Granted Oct 25, 2022·11 cites·19 claims
- 3289US8497973B2Immersion lithography fluid control system regulating gas velocity based on contact angleCOON DEREK·Filed 2007·Granted Jul 30, 2013·7 cites·16 claims
- 3389US7969552B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Jun 28, 2011·5 cites·24 claims
- 3489US7283210B2Image shift optic for optical systemNIKON CORP·Filed 2005·Granted Oct 16, 2007·11 cites·24 claims
- 3589US6313550B1Coil mounting and cooling system for an electric motorNIKON CORP·Filed 2000·Granted Nov 6, 2001·40 cites·32 claims
- 3689US6252234B1Reaction force isolation system for a planar motorNIKON CORP·Filed 1998·Granted Jun 26, 2001·55 cites·28 claims
- 3788US9244362B2Environmental system including vacuum scavenge for an immersion lithography apparatusNIKON CORP·Filed 2014·Granted Jan 26, 2016·2 cites·59 claims
- 3888US9244363B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2014·Granted Jan 26, 2016·2 cites·27 claims
- 3988US6880942B2Adaptive optic with discrete actuators for continuous deformation of a deformable mirror systemNIKON CORP·Filed 2003·Granted Apr 19, 2005·28 cites·16 claims
- 4088US6188147B1Wedge and transverse magnet arraysNIKON CORP·Filed 1998·Granted Feb 13, 2001·86 cites·32 claims
- 4188US6163091ALinear motor with commutation coilNIKON CORP·Filed 1999·Granted Dec 19, 2000·66 cites·58 claims
- 4287US6750625B2Wafer stage with magnetic bearingsNIKON CORP·Filed 2001·Granted Jun 15, 2004·38 cites·116 claims
- 4387US6486941B1Guideless stageNIKON CORP·Filed 2000·Granted Nov 26, 2002·28 cites·79 claims
- 4487US6323567B1Circulating system for shaft-type linear motorsNIKON CORP·Filed 1999·Granted Nov 27, 2001·63 cites·75 claims
- 4587US6140734AArmature with regular windings and having a high conductor densityNIKON CORP OF JAPAN·Filed 1998·Granted Oct 31, 2000·67 cites·20 claims
- 4686US8836914B2Environmental system including vacuum scavenge for an immersion lithography apparatusHAZELTON ANDREW J·Filed 2012·Granted Sep 16, 2014·2 cites·43 claims
- 4785US6927838B2Multiple stage, stage assembly having independent stage basesNIKON CORP·Filed 2001·Granted Aug 9, 2005·25 cites·53 claims
- 4884US7965376B2Environmental system including a transport region for an immersion lithography apparatusNIKON CORP·Filed 2007·Granted Jun 21, 2011·3 cites·23 claims
- 4984US6144119APlanar electric motor with dual coil and magnet arraysNIKON CORP·Filed 1999·Granted Nov 7, 2000·71 cites·46 claims
- 5083US8508718B2Wafer table having sensor for immersion lithographyHAZELTON ANDREW J·Filed 2008·Granted Aug 13, 2013·4 cites·29 claims
Showing the top 50 of 143 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →