Inventor · disambiguated record
Andrew V. Hill
Also filed as: HILL ANDREW · HILL ANDREW V
71 granted patents·10 pending applications·460 citations·filing 1994–2024
99Inventor score
Top patents by PatentIndex Score
81 records- 0198US11526086B2Multi-field scanning overlay metrologyKLA CORP·Filed 2021·Granted Dec 13, 2022·10 cites·36 claims
- 0298US11428642B2Scanning scatterometry overlay measurementKLA CORP·Filed 2021·Granted Aug 30, 2022·12 cites·29 claims
- 0398US11300405B2Grey-mode scanning scatterometry overlay metrologyKLA CORP·Filed 2021·Granted Apr 12, 2022·7 cites·24 claims
- 0497US11346657B2Measurement modes for overlayKLA CORP·Filed 2020·Granted May 31, 2022·7 cites·35 claims
- 0597US8441639B2Metrology systems and methodsKANDEL DANIEL·Filed 2010·Granted May 14, 2013·35 cites·22 claims
- 0696US11531275B1Parallel scatterometry overlay metrologyKLA CORP·Filed 2021·Granted Dec 20, 2022·9 cites·31 claims
- 0796US11300524B1Pupil-plane beam scanning for metrologyKLA CORP·Filed 2021·Granted Apr 12, 2022·12 cites·27 claims
- 0896US11073768B2Metrology target for scanning metrologyKLA CORP·Filed 2019·Granted Jul 27, 2021·19 cites·21 claims
- 0996US10401738B2Overlay metrology using multiple parameter configurationsKLA TENCOR CORP·Filed 2017·Granted Sep 3, 2019·14 cites·49 claims
- 1096US10048132B2Simultaneous capturing of overlay signals from multiple targetsKLA TENCOR CORP·Filed 2016·Granted Aug 14, 2018·10 cites·17 claims
- 1196US9080971B2Metrology systems and methodsKLA TENCOR CORP·Filed 2014·Granted Jul 14, 2015·21 cites·12 claims
- 1295US10401228B2Simultaneous capturing of overlay signals from multiple targetsKLA TENCOR CORP·Filed 2018·Granted Sep 3, 2019·6 cites·23 claims
- 1395US7345754B1Fourier filters and wafer inspection systemsKLA TENCOR TECH CORP·Filed 2005·Granted Mar 18, 2008·40 cites·24 claims
- 1494US12032300B2Imaging overlay with mutually coherent oblique illuminationKLA CORP·Filed 2022·Granted Jul 9, 2024·2 cites·23 claims
- 1594US11841621B2Moiré scatterometry overlayKLA CORP·Filed 2021·Granted Dec 12, 2023·2 cites·39 claims
- 1694US8873054B2Metrology systems and methodsKLA TENCOR CORP·Filed 2013·Granted Oct 28, 2014·14 cites·26 claims
- 1793US11899375B2Massive overlay metrology sampling with multiple measurement columnsKLA CORP·Filed 2021·Granted Feb 13, 2024·2 cites·56 claims
- 1893US11800212B1Multi-directional overlay metrology using multiple illumination parameters and isolated imagingKLA CORP·Filed 2022·Granted Oct 24, 2023·5 cites·31 claims
- 1993US10422508B2System and method for spectral tuning of broadband light sourcesKLA TENCOR CORP·Filed 2016·Granted Sep 24, 2019·8 cites·56 claims
- 2093US8896832B2Discrete polarization scatterometryHILL ANDREW V·Filed 2011·Granted Nov 25, 2014·25 cites·35 claims
- 2192US12001148B2Enhancing performance of overlay metrologyKLA CORP·Filed 2023·Granted Jun 4, 2024·2 cites·26 claims
- 2292US11118903B2Efficient illumination shaping for scatterometry overlayKLA TENCOR CORP·Filed 2019·Granted Sep 14, 2021·9 cites·36 claims
- 2392US10371626B2System and method for generating multi-channel tunable illumination from a broadband sourceKLA TENCOR CORP·Filed 2016·Granted Aug 6, 2019·5 cites·50 claims
- 2492US9958385B2Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrologyKLA TENCOR CORP·Filed 2014·Granted May 1, 2018·9 cites·36 claims
- 2592US8947521B1Method for reducing aliasing in TDI based imagingHILL ANDREW V·Filed 2012·Granted Feb 3, 2015·15 cites·23 claims
- 2691US12066322B2Single grab overlay measurement of tall targetsKLA CORP·Filed 2022·Granted Aug 20, 2024·2 cites·40 claims
- 2791US10203247B2Systems for providing illumination in optical metrologyKLA TENCOR CORP·Filed 2016·Granted Feb 12, 2019·10 cites·21 claims
- 2890US10209183B2Scatterometry system and method for generating non-overlapping and non-truncated diffraction imagesKLA TENCOR CORP·Filed 2017·Granted Feb 19, 2019·4 cites·24 claims
- 2989US12235588B2Scanning overlay metrology with high signal to noise ratioKLA CORP·Filed 2023·Granted Feb 25, 2025·1 cites·21 claims
- 3089US10533940B2Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrologyKLA TENCOR CORP·Filed 2018·Granted Jan 14, 2020·2 cites·20 claims
- 3189US9784987B2Apodization for pupil imaging scatterometryKLA TENCOR CORP·Filed 2015·Granted Oct 10, 2017·5 cites·26 claims
- 3289US8073240B2Computer-implemented methods, computer-readable media, and systems for identifying one or more optical modes of an inspection system as candidates for use in inspection of a layer of a waferFISCHER VERLYN·Filed 2008·Granted Dec 6, 2011·28 cites·19 claims
- 3389US7304731B2Systems and methods for providing illumination of a specimen for inspectionKLA TENCOR TECH CORP·Filed 2005·Granted Dec 4, 2007·15 cites·28 claims
- 3488US7782452B2Systems and method for simultaneously inspecting a specimen with two distinct channelsKLA TENCOR TECH CORP·Filed 2007·Granted Aug 24, 2010·20 cites·30 claims
- 3587US10018560B2System and method for hyperspectral imaging metrologyKLA TENCOR CORP·Filed 2016·Granted Jul 10, 2018·4 cites·33 claims
- 3686US9091650B2Apodization for pupil imaging scatterometryKLA TENCOR CORP·Filed 2013·Granted Jul 28, 2015·5 cites·30 claims
- 3785US10663281B2Systems and methods for optimizing focus for imaging-based overlay metrologyKLA TENCOR CORP·Filed 2017·Granted May 26, 2020·3 cites·16 claims
- 3884US10677588B2Localized telecentricity and focus optimization for overlay metrologyKLA TENCOR CORP·Filed 2018·Granted Jun 9, 2020·5 cites·44 claims
- 3984US10444161B2Systems and methods for metrology with layer-specific illumination spectraKLA TENCOR CORP·Filed 2017·Granted Oct 15, 2019·2 cites·57 claims
- 4083US11592755B2Enhancing performance of overlay metrologyKLA CORP·Filed 2021·Granted Feb 28, 2023·1 cites·30 claims
- 4182US9297769B1Method for reducing aliasing in TDI based imagingKLA TENCOR CORP·Filed 2015·Granted Mar 29, 2016·3 cites·22 claims
- 4281US7940384B2Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimenKLA TENCOR CORP·Filed 2007·Granted May 10, 2011·7 cites·28 claims
- 4381US7397557B2Serrated Fourier filters and inspection systemsKLA TENCOR TECH CORP·Filed 2005·Granted Jul 8, 2008·7 cites·21 claims
- 4480US12379669B2Massive overlay metrology sampling with multiple measurement columnsKLA CORP·Filed 2023·Granted Aug 5, 2025·0 cites·33 claims
- 4579US10684563B2On the fly target acquisitionKLA TENCOR CORP·Filed 2018·Granted Jun 16, 2020·3 cites·19 claims
- 4677US11156846B2High-brightness illumination source for optical metrologyKLA TENCOR CORP·Filed 2019·Granted Oct 26, 2021·2 cites·50 claims
- 4776US9719920B2Scatterometry system and method for generating non-overlapping and non-truncated diffraction imagesKLA TENCOR CORP·Filed 2014·Granted Aug 1, 2017·2 cites·36 claims
- 4875US11852590B1Systems and methods for metrology with layer-specific illumination spectraKLA TENCOR CORP·Filed 2019·Granted Dec 26, 2023·1 cites·34 claims
- 4975US11662562B2Broadband illumination tuningKLA CORP·Filed 2020·Granted May 30, 2023·1 cites·32 claims
- 5075US10976249B1Reflective pupil relay systemKLA TENCOR CORP·Filed 2014·Granted Apr 13, 2021·3 cites·23 claims
Showing the top 50 of 81 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →