Inventor · disambiguated record
Andrei Mikhailovich Yakunin
Also filed as: YAKUNIN ANDREI · YAKUNIN ANDREI MIKHAILOVICH
35 granted patents·16 pending applications·130 citations·filing 2009–2023
96Inventor score
Files withASML NETHERLANDS BV24YAKUNIN ANDREI MIKHAILOVICH10BANINE VADIM YEVGENYEVICH2SOER WOUTER ANTHON2VAN SCHOOT JAN BERNARD PLECHELMUS2
Top patents by PatentIndex Score
51 records- 0197US10228615B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2015·Granted Mar 12, 2019·17 cites·28 claims
- 0297US9261784B2Lithographic patterning process and resists to use thereinWUISTER SANDER FREDERIK·Filed 2012·Granted Feb 16, 2016·23 cites·31 claims
- 0394US9482960B2Pellicle for reticle and multilayer mirrorASML NETHERLANDS BV·Filed 2014·Granted Nov 1, 2016·14 cites·13 claims
- 0492US9395630B2Lithographic apparatus and methodYAKUNIN ANDREI MIKHAILOVICH·Filed 2011·Granted Jul 19, 2016·13 cites·16 claims
- 0590US9989844B2Pellicle for reticle and multilayer mirrorASML NETHERLANDS BV·Filed 2016·Granted Jun 5, 2018·5 cites·13 claims
- 0689US9897930B2Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical elementSJMAENOK LEONID AIZIKOVITCH·Filed 2009·Granted Feb 20, 2018·14 cites·18 claims
- 0787US10481510B2Graphene spectral purity filterASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·3 cites·27 claims
- 0884US9606445B2Lithographic apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·5 cites·21 claims
- 0984US9442380B2Method and apparatus for generating radiationASML NETHERLANDS BV·Filed 2013·Granted Sep 13, 2016·4 cites·15 claims
- 1076US9411238B2Source-collector device, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 9, 2016·4 cites·8 claims
- 1176US9298110B2Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a deviceSTEINHOFF JENS ARNO·Filed 2011·Granted Mar 29, 2016·6 cites·19 claims
- 1275US9986628B2Method and apparatus for generating radiationASML NETHERLANDS BV·Filed 2013·Granted May 29, 2018·2 cites·15 claims
- 1375US8368040B2Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2010·Granted Feb 5, 2013·4 cites·12 claims
- 1469US9195152B2Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filterSOER WOUTER ANTHON·Filed 2009·Granted Nov 24, 2015·3 cites·6 claims
- 1569US8755032B2Radiation source and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2009·Granted Jun 17, 2014·2 cites·25 claims
- 1669US8345223B2Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2009·Granted Jan 1, 2013·4 cites·34 claims
- 1763US9448492B2Multilayer mirror, method of producing a multilayer mirror and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Sep 20, 2016·2 cites·12 claims
- 1863US9285690B2Mirror, lithographic apparatus and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2009·Granted Mar 15, 2016·1 cites·13 claims
- 1962US2025370358A1Contamination controlASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2061US9632419B2Radiation sourceVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Granted Apr 25, 2017·2 cites·23 claims
- 2159US9529283B2Radiation source, lithographic apparatus, and device manufacturing methodYAKUNIN ANDREI MIKHAILOVICH·Filed 2009·Granted Dec 27, 2016·2 cites·19 claims
- 2258US9195144B2Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing methodJAK MARTIN JACOBUS JOHAN·Filed 2009·Granted Nov 24, 2015·0 cites·17 claims
- 2358US2024310742A1A contamination reduction systemASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 2457US2025102902A1Assembly for a lithographic apparatusASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 2555US10001709B2Lithographic apparatus, spectral purity filter and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jun 19, 2018·0 cites·18 claims
- 2655US2024337956A1Apparatus and method for preparing and cleaning a componentASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2753US10031422B2Lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Jul 24, 2018·0 cites·23 claims
- 2852US9860966B2Radiation sourceASML NETHERLANDS BV·Filed 2013·Granted Jan 2, 2018·0 cites·18 claims
- 2951US12372888B2Patterning device conditioning system and methodASML NETHERLANDS BV·Filed 2020·Granted Jul 29, 2025·0 cites·20 claims
- 3050US9989863B2Lithographic systemASML NETHERLANDS BV·Filed 2015·Granted Jun 5, 2018·0 cites·27 claims
- 3148US9377695B2Grazing incidence reflectors, lithographic apparatus, methods for manufacturing a grazing incidence reflector and methods for manufacturing a deviceYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 28, 2016·0 cites·17 claims
- 3247US9594306B2Lithographic apparatus, spectral purity filter and device manufacturing methodBANINE VADIM YEVGENYEVICH·Filed 2011·Granted Mar 14, 2017·0 cites·17 claims
- 3346US9046780B2Multilayer mirror and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 2, 2015·0 cites·14 claims
- 3446US8454849B2Imprint lithographyWUISTER SANDER FREDERIK·Filed 2011·Granted Jun 4, 2013·0 cites·8 claims
- 3545US9726989B2Spectral purity filterSOER WOUTER ANTHON·Filed 2011·Granted Aug 8, 2017·0 cites·2 claims
- 3643US9465306B2Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a deviceVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS·Filed 2009·Granted Oct 11, 2016·0 cites·14 claims
- 3740US2013077073A1Methods to control euv exposure dose and euv lithographic methods and apparatus using such methodsVAN SCHOOT JAN BERNARD PLECHELMUS·Filed 2012·Application pending·0 cites
- 3840US2010328639A1Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filterASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 3939US9007565B2Spectral purity filterYAKUNIN ANDREI MIKHAILOVICH·Filed 2010·Granted Apr 14, 2015·0 cites·17 claims
- 4039US2012182537A1Spectral purity filter, lithographic apparatus, and device manufacturing methodYAKUNIN ANDREI MIKHAILOVICH·Filed 2010·Application pending·0 cites
- 4138US9366967B2Radiation sourceYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Jun 14, 2016·0 cites·13 claims
- 4238US2011043782A1Spectral purity filters for use in a lithographic apparatusASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 4337US2011170083A1Lithographic Apparatus and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 4437US2012147350A1Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filterYAKUNIN ANDREI·Filed 2010·Application pending·0 cites
- 4537US2013010275A1Lithographic apparatus and spectral purity filterASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 4636US9329503B2Multilayer mirrorTIMOSHKOV VADIM IOURIEVICH·Filed 2011·Granted May 3, 2016·0 cites·16 claims
- 4736US2013015373A1EUV Radiation Source and EUV Radiation Generation MethodASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 4835US2012327381A1Radiation Source, Lithographic Apparatus and Device Manufacturing MethodLABETSKI DZMITRY·Filed 2011·Application pending·0 cites
- 4931US2013070218A1System for removing contaminant particles, lithographic apparatus, method for removing contaminant particles and method for manufacturing a deviceIVANOV VLADIMIR VITALEVICH·Filed 2011·Application pending·0 cites
- 5029US2012229785A1Multilayer mirror, lithograpic apparatus, and methods for manufacturing a multilayer mirror and a productKRIVTSUN VLADIMIR MIHAILOVITCH·Filed 2010·Application pending·0 cites
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →