Inventor · disambiguated record
Arthur Keigler
Also filed as: KEIGLER ARTHUR
37 granted patents·8 pending applications·489 citations·filing 1999–2024
97Inventor score
Top patents by PatentIndex Score
45 records- 0196US6251250B1Method of and apparatus for controlling fluid flow and electric fields involved in the electroplating of substantially flat workpieces and the like and more generally controlling fluid flow in the processing of other work piece surfaces as wellFiled 1999·Granted Jun 26, 2001·132 cites·51 claims
- 0293US9421617B2Substrate holderGOODMAN DANIEL·Filed 2012·Granted Aug 23, 2016·20 cites·6 claims
- 0392US6540899B2Method of and apparatus for fluid sealing, while electrically contacting, wet-processed workpiecesALL WET TECHNOLOGIES INC·Filed 2001·Granted Apr 1, 2003·92 cites·11 claims
- 0489US7727366B2Balancing pressure to improve a fluid sealNEXX SYSTEMS INC·Filed 2005·Granted Jun 1, 2010·15 cites·22 claims
- 0589US7445697B2Method and apparatus for fluid processing a workpieceNEXX SYSTEMS INC·Filed 2004·Granted Nov 4, 2008·39 cites·33 claims
- 0688US8038856B2Method and apparatus for fluid processing a workpieceNEXX SYSTEMS INC·Filed 2010·Granted Oct 18, 2011·7 cites·32 claims
- 0788US7100954B2Ultra-thin wafer handling systemNEXX SYSTEMS INC·Filed 2003·Granted Sep 5, 2006·51 cites·37 claims
- 0887US9017528B2Electro chemical deposition and replenishment apparatusPAPAPANAYIOTOU DEMETRIUS·Filed 2012·Granted Apr 28, 2015·8 cites·44 claims
- 0987US8425687B2Wetting a workpiece surface in a fluid-processing systemKEIGLER ARTHUR·Filed 2010·Granted Apr 23, 2013·8 cites·20 claims
- 1085US8967935B2Substrate loader and unloaderGOODMAN DANIEL·Filed 2011·Granted Mar 3, 2015·6 cites·22 claims
- 1184US8613474B2Substrate loader and unloader having a Bernoulli supportGOODMAN DANIEL·Filed 2011·Granted Dec 24, 2013·5 cites·30 claims
- 1283US9257319B2Parallel single substrate processing system with alignment features on a process section frameKEIGLER ARTHUR·Filed 2012·Granted Feb 9, 2016·4 cites·20 claims
- 1382US9988735B2Electrochemical deposition apparatus and methods for controlling the chemistry thereinTEL NEXX INC·Filed 2014·Granted Jun 5, 2018·2 cites·9 claims
- 1482US9637836B2Electrochemical deposition apparatus and methods for controlling the chemistry thereinTEL NEXX INC·Filed 2014·Granted May 2, 2017·2 cites·14 claims
- 1581US6174011B1Method of and apparatus for handling thin and flat workpieces and the likeFiled 1999·Granted Jan 16, 2001·65 cites·25 claims
- 1678US8420981B2Apparatus for thermal processing with micro-environmentGOODMAN DANIEL·Filed 2009·Granted Apr 16, 2013·8 cites·44 claims
- 1777US9117856B2Substrate loader and unloader having an air bearing supportGOODMAN DANIEL·Filed 2011·Granted Aug 25, 2015·3 cites·10 claims
- 1875US8168057B2Balancing pressure to improve a fluid sealKEIGLER ARTHUR·Filed 2010·Granted May 1, 2012·3 cites·12 claims
- 1974US9508582B2Parallel single substrate marangoni moduleKEIGLER ARTHUR·Filed 2012·Granted Nov 29, 2016·2 cites·19 claims
- 2074US9005409B2Electro chemical deposition and replenishment apparatusGUARNACCIA DAVID·Filed 2012·Granted Apr 14, 2015·2 cites·30 claims
- 2172US9303329B2Electrochemical deposition apparatus with remote catholyte fluid managementTEL NEXX INC·Filed 2013·Granted Apr 5, 2016·3 cites·20 claims
- 2269US8277624B2Method and apparatus for fluid processing a workpieceKEIGLER ARTHUR·Filed 2011·Granted Oct 2, 2012·1 cites·10 claims
- 2367US7722747B2Method and apparatus for fluid processing a workpieceNEXX SYSTEMS INC·Filed 2004·Granted May 25, 2010·7 cites·32 claims
- 2466US11887874B2Adaptive focusing and transport system for electroplatingASMPT NEXX INC·Filed 2023·Granted Jan 30, 2024·0 cites·7 claims
- 2564US7067045B2Method and apparatus for sealing electrical contacts during an electrochemical deposition processAPPLIED MATERIALS INC·Filed 2002·Granted Jun 27, 2006·3 cites·23 claims
- 2662US11942341B2Adaptive focusing and transport system for electroplatingASMPT NEXX INC·Filed 2022·Granted Mar 26, 2024·0 cites·8 claims
- 2761US10283396B2Workpiece holder for a wet processing systemASM NEXX INC·Filed 2016·Granted May 7, 2019·1 cites·18 claims
- 2858US2025343063A1Clean workpiece loader and edge protection holder for wet chemical semiconductor processingASMPT NEXX INC·Filed 2024·Application pending·0 cites
- 2956US9453290B2Apparatus for fluid processing a workpieceTEL NEXX INC·Filed 2013·Granted Sep 27, 2016·0 cites·8 claims
- 3054US9449862B2Parallel single substrate processing systemKEIGLER ARTHUR·Filed 2012·Granted Sep 20, 2016·0 cites·20 claims
- 3153US9293356B2Parallel single substrate processing systemKEIGLER ARTHUR·Filed 2012·Granted Mar 22, 2016·0 cites·20 claims
- 3251US8512543B2Method for fluid processing a workpieceKEIGLER ARTHUR·Filed 2010·Granted Aug 20, 2013·0 cites·20 claims
- 3350US9147588B2Substrate processing pallet with coolingGOODMAN DANIEL·Filed 2007·Granted Sep 29, 2015·0 cites·27 claims
- 3445US2011024964A1Substrate processing pallet with coolingNEXX SYSTEMS INC·Filed 2010·Application pending·0 cites
- 3540US2017370017A1Wet processing system and method of operatingTEL NEXX INC·Filed 2016·Application pending·0 cites
- 3640US2012305404A1Method and apparatus for fluid processing a workpieceKEIGLER ARTHUR·Filed 2012·Application pending·0 cites
- 3739US2005283993A1Method and apparatus for fluid processing and drying a workpieceWU QUNWEI·Filed 2005·Application pending·0 cites
- 3838US8858755B2Edge bevel removal apparatus and methodGOODMAN DANIEL·Filed 2012·Granted Oct 14, 2014·0 cites·25 claims
- 3937US11174544B2Batch processing system with vacuum isolationASM NEXX INC·Filed 2019·Granted Nov 16, 2021·0 cites·12 claims
- 4037US10074554B2Workpiece loader for a wet processing systemTEL NEXX INC·Filed 2016·Granted Sep 11, 2018·0 cites·20 claims
- 4136US9714474B2Seed layer deposition in microscale featuresKEIGLER ARTHUR·Filed 2010·Granted Jul 25, 2017·0 cites·5 claims
- 4235US2015047674A1Method and apparatus for removal of photoresist using improved chemistryTEL NEXX INC·Filed 2013·Application pending·0 cites
- 4330US11608563B2Electrochemical deposition systemsASMPT NEXX INC·Filed 2019·Granted Mar 21, 2023·0 cites·17 claims
- 4430US2012325671A2Electroplated lead-free bump depositionKEIGLER ARTHUR·Filed 2010·Application pending·0 cites
- 4529US2016365317A1Method and apparatus for forming emi shielding layers on semiconductor packagesTEL NEXX INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →