Inventor · disambiguated record
Arnoldus Jan Storm
Also filed as: STORM ARNOLDUS J · STORM ARNOLDUS JAN
3 granted patents·4 pending applications·7 citations·filing 2004–2024
60Inventor score
Files withZEISS CARL SMT GMBH3ASML NETHERLANDS BV1EHM DIRK HEINRICH1SCHASFOORT GERARD FRANS JOZEF1STORM ARNOLDUS J1
Top patents by PatentIndex Score
7 records- 0172US8477285B2Particle cleaning of optical elements for microlithographyEHM DIRK HEINRICH·Filed 2010·Granted Jul 2, 2013·3 cites·25 claims
- 0265US7959310B2Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical elementZEISS CARL SMT GMBH·Filed 2007·Granted Jun 14, 2011·3 cites·28 claims
- 0365US2024319621A1Apparatus and method for avoiding a degradation of an optical used surface of a mirror module, projection system, illumination system and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0463US10690812B2Optical element and optical system for EUV lithography, and method for treating such an optical elementZEISS CARL SMT GMBH·Filed 2015·Granted Jun 23, 2020·1 cites·17 claims
- 0542US2008151201A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 0632US2006231774A1Method and apparatus for controlled manufacturing of nanometer-scale aperturesSTORM ARNOLDUS J·Filed 2004·Application pending·0 cites
- 0729US2012006258A1Hydrogen radical generatorSCHASFOORT GERARD FRANS JOZEF·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →