Inventor · disambiguated record
Art Yu
Also filed as: YU ART
5 granted patents·3 pending applications·21 citations·filing 2001–2007
77Inventor score
Files withUNITED MICROELECTRONICS CORP6
Top patents by PatentIndex Score
8 records- 0167US7544305B2Chemical mechanical polishing process for forming shallow trench isolation structureUNITED MICROELECTRONICS CORP·Filed 2007·Granted Jun 9, 2009·2 cites·5 claims
- 0259US7294575B2Chemical mechanical polishing process for forming shallow trench isolation structureUNITED MICROELECTRONICS CORP·Filed 2004·Granted Nov 13, 2007·7 cites·6 claims
- 0355US6797190B2Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the sameUNITED MICROELECTRONICS CORP·Filed 2003·Granted Sep 28, 2004·5 cites·3 claims
- 0455US6638391B1Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the sameUNITED MICROELECTRONICS CORP·Filed 2002·Granted Oct 28, 2003·5 cites·14 claims
- 0548US2006258158A1Polish method for semiconductor device planarizationUNITED MICROELECTRONICS CORP·Filed 2006·Application pending·0 cites
- 0644US7172970B2Polish method for semiconductor device planarizationUNITED MICROELECTRONICS CORP·Filed 2003·Granted Feb 6, 2007·2 cites·42 claims
- 0734US2002192941A1Method for reducing dishing in copper chemical mechanical polishing processFiled 2001·Application pending·0 cites
- 0828US2005101233A1Polishing elementFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →