Inventor · disambiguated record
Ayuta Suzuki
Also filed as: SUZUKI AYUTA
10 granted patents·4 pending applications·5 citations·filing 2011–2025
79Inventor score
Top patents by PatentIndex Score
14 records- 0180US2025118542A1Measurement system, measurement method, and plasma processing deviceTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0269US12211676B2Measurement system, measurement method, and plasma processing deviceTOKYO ELECTRON LTD·Filed 2021·Granted Jan 28, 2025·0 cites·9 claims
- 0367US10643839B2Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2017·Granted May 5, 2020·1 cites·20 claims
- 0466US9202731B2Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded thereinKASAI SHIGERU·Filed 2011·Granted Dec 1, 2015·2 cites·9 claims
- 0565US12027344B2Film forming apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Jul 2, 2024·0 cites·9 claims
- 0664US8945413B2Etching method, etching apparatus, and ring memberSUZUKI AYUTA·Filed 2012·Granted Feb 3, 2015·2 cites·14 claims
- 0758US11664198B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 30, 2023·0 cites·17 claims
- 0852US2019385815A1Film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 0951US2025191907A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 1048US2018155830A1Gas supply and exhaust structureTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 1144US9441292B2Etching method, etching apparatus, and ring memberTOKYO ELECTRON LTD·Filed 2015·Granted Sep 13, 2016·0 cites·1 claims
- 1243US10847348B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Nov 24, 2020·0 cites·17 claims
- 1343US10734221B2Method of manufacturing semiconductor device and method of forming metal oxide filmTOKYO ELECTRON LTD·Filed 2018·Granted Aug 4, 2020·0 cites·15 claims
- 1440US10121680B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Nov 6, 2018·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →