Inventor · disambiguated record
Boris Golovanevsky
Also filed as: GOLOVANEVSKY BORIS
14 granted patents·238 citations·filing 2003–2019
93Inventor score
Top patents by PatentIndex Score
14 records- 0196US7298481B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 20, 2007·46 cites·11 claims
- 0295US7933016B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Apr 26, 2011·15 cites·20 claims
- 0395US7663753B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Feb 16, 2010·19 cites·45 claims
- 0495US7277172B2Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signalsKLA TENCOR TECH CORP·Filed 2006·Granted Oct 2, 2007·34 cites·27 claims
- 0593US8908175B1Flexible scatterometry metrology system and methodKANDEL DANIEL·Filed 2006·Granted Dec 9, 2014·26 cites·36 claims
- 0693US7616313B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2006·Granted Nov 10, 2009·17 cites·36 claims
- 0792US7804994B2Overlay metrology and control methodKLA TENCOR TECH CORP·Filed 2003·Granted Sep 28, 2010·54 cites·16 claims
- 0890US9581430B2Phase characterization of targetsKLA TENCOR CORP·Filed 2013·Granted Feb 28, 2017·15 cites·12 claims
- 0976US10897566B2Direct focusing with image binning in metrology toolsKLA TENCOR CORP·Filed 2017·Granted Jan 19, 2021·3 cites·16 claims
- 1076US8804111B2Multichip CCD camera inspection systemGOLOVANEVSKY BORIS·Filed 2008·Granted Aug 12, 2014·7 cites·8 claims
- 1167US9546946B2Metrology target indentification, design and verificationKLA TENCOR CORP·Filed 2014·Granted Jan 17, 2017·2 cites·16 claims
- 1264US10755016B2Hot spot and process window monitoringKLA TENCOR CORP·Filed 2019·Granted Aug 25, 2020·0 cites·20 claims
- 1355US10354035B2Hot spot and process window monitoringKLA TENCOR CORP·Filed 2017·Granted Jul 16, 2019·0 cites·20 claims
- 1448US9970886B2Metrology tool stage configurations and operation methodsKLA TENCOR CORP·Filed 2014·Granted May 15, 2018·0 cites·37 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →