Inventor · disambiguated record
Chih-Hong Hwang
Also filed as: HWANG CHIH-HONG
16 granted patents·3 pending applications·2 citations·filing 2011–2025
86Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD9HWANG CHIH-HONG4CHANG CHUN-LIN2CHENG NAI-HAN2TAIWAN SEMICONDUCTOR MFG2
Top patents by PatentIndex Score
19 records- 0179US2025359174A1Semiconductor Structure with Treated Gate Dielectric Layer and Method for Manufacturing the SameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0275US9006676B2Apparatus for monitoring ion implantationTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Apr 14, 2015·2 cites·20 claims
- 0372US11837663B2Via structure with low resistivity and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 5, 2023·0 cites·20 claims
- 0469US11081585B2Via structure with low resistivity and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 3, 2021·0 cites·20 claims
- 0564US2024204073A1Semiconductor structure with treated gate dielectric layer and method for manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0658US10693004B2Via structure with low resistivity and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 23, 2020·0 cites·20 claims
- 0755US9449889B2Method for monitoring ion implantationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 20, 2016·0 cites·20 claims
- 0854US9865429B2Ion implantation with charge and direction controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jan 9, 2018·0 cites·20 claims
- 0953US2024222377A1Gate stack of forksheet structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1052US8581204B2Apparatus for monitoring ion implantationCHANG CHUN-LIN·Filed 2011·Granted Nov 12, 2013·0 cites·20 claims
- 1150US9805913B2Ion beam dimension control for ion implantation process and apparatus, and advanced process controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 31, 2017·0 cites·19 claims
- 1249US9070534B2Ion beam dimension control for ion implantation process and apparatus, and advanced process controlHWANG CHIH-HONG·Filed 2012·Granted Jun 30, 2015·0 cites·19 claims
- 1347US9053907B2System and method of ion neutralization with multiple-zoned plasma flood gunCHANG CHUN-LIN·Filed 2012·Granted Jun 9, 2015·0 cites·18 claims
- 1447US8766207B2Beam monitoring device, method, and systemHWANG CHIH-HONG·Filed 2011·Granted Jul 1, 2014·0 cites·20 claims
- 1547US8664622B2System and method of ion beam source for semiconductor ion implantationHWANG CHIH-HONG·Filed 2012·Granted Mar 4, 2014·0 cites·20 claims
- 1646US8592785B2Multi-ion beam implantation apparatus and methodCHENG NAI-HAN·Filed 2011·Granted Nov 26, 2013·0 cites·20 claims
- 1744US9031684B2Multi-factor advanced process control method and system for integrated circuit fabricationCHENG NAI-HAN·Filed 2011·Granted May 12, 2015·0 cites·16 claims
- 1843US8922122B2Ion implantation with charge and direction controlHWANG CHIH-HONG·Filed 2011·Granted Dec 30, 2014·0 cites·19 claims
- 1942US9330901B2Nitrogen-containing oxide film and method of forming the sameTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted May 3, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →