Inventor · disambiguated record
Christopher T. Lane
Also filed as: LANE CHRISTOPHER · LANE CHRISTOPHER T
18 granted patents·10 pending applications·2,431 citations·filing 1995–2016
96Inventor score
Top patents by PatentIndex Score
28 records- 0198US6418874B1Toroidal plasma source for plasma processingAPPLIED MATERIALS INC·Filed 2000·Granted Jul 16, 2002·272 cites·19 claims
- 0298US5855681AUltra high throughput wafer vacuum processing systemAPPLIED MATERIALS INC·Filed 1996·Granted Jan 5, 1999·1.1k cites·50 claims
- 0395US7901539B2Apparatus and methods for transporting and processing substratesINTEVAC INC·Filed 2006·Granted Mar 8, 2011·28 cites·11 claims
- 0495US7585686B2Method and apparatus for processing a waferAPPLIED MATERIALS INC·Filed 2007·Granted Sep 8, 2009·33 cites·18 claims
- 0595US7159599B2Method and apparatus for processing a waferAPPLIED MATERIALS INC·Filed 2002·Granted Jan 9, 2007·96 cites·41 claims
- 0694US6486444B1Load-lock with external staging areaAPPLIED MATERIALS INC·Filed 2000·Granted Nov 26, 2002·101 cites·38 claims
- 0792US8303764B2Apparatus and methods for transporting and processing substratesBLUCK TERRY·Filed 2011·Granted Nov 6, 2012·13 cites·20 claims
- 0892US8293066B2Apparatus and methods for transporting and processing substratesBLUCK TERRY·Filed 2008·Granted Oct 23, 2012·23 cites·17 claims
- 0991US6082950AFront end wafer staging with wafer cassette turntables and on-the-fly wafer center findingAPPLIED MATERIALS INC·Filed 1996·Granted Jul 4, 2000·154 cites·17 claims
- 1089US5909994AVertical dual loadlock chamberAPPLIED MATERIALS INC·Filed 1996·Granted Jun 8, 1999·130 cites·19 claims
- 1189US5838121ADual blade robotAPPLIED MATERIALS INC·Filed 1996·Granted Nov 17, 1998·112 cites·20 claims
- 1288US5902088ASingle loadlock chamber with wafer cooling functionAPPLIED MATERIALS INC·Filed 1996·Granted May 11, 1999·115 cites·20 claims
- 1384US5633073ACeramic susceptor with embedded metal electrode and eutectic connectionAPPLIED MATERIALS INC·Filed 1995·Granted May 27, 1997·81 cites·5 claims
- 1481US6712020B2Toroidal plasma source for plasma processingAPPLIED MATERIALS INC·Filed 2002·Granted Mar 30, 2004·15 cites·9 claims
- 1580US5817406ACeramic susceptor with embedded metal electrode and brazing material connectionAPPLIED MATERIALS INC·Filed 1996·Granted Oct 6, 1998·61 cites·22 claims
- 1676US5905302ALoadlock cassette with wafer support railsAPPLIED MATERIALS INC·Filed 1996·Granted May 18, 1999·48 cites·11 claims
- 1774US9524896B2Apparatus and methods for transporting and processing substratesBLUCK TERRY·Filed 2009·Granted Dec 20, 2016·4 cites·20 claims
- 1867US9022715B2Load lock chamber designs for high-throughput processing systemAPPLIED MATERIALS INC·Filed 2013·Granted May 5, 2015·2 cites·12 claims
- 1953US2008286697A1Method and apparatus for processing a waferVERHAVERBEKE STEVEN·Filed 2007·Application pending·0 cites
- 2049US2007093071A1Method and apparatus for processing a waferVERHAVERBEKE STEVEN·Filed 2006·Application pending·0 cites
- 2140US2003045098A1Method and apparatus for processing a waferAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 2239US2006102078A1Wafer fabINTEVAC INC·Filed 2004·Application pending·0 cites
- 2338US2013171757A1Advanced platform for passivating crystalline silicon solar cellsPONNEKANTI HARI K·Filed 2013·Application pending·0 cites
- 2435US2007051471A1Methods and apparatus for strippingAPPLIED MATERIALS INC·Filed 2002·Application pending·0 cites
- 2533US2017292992A1Semiconductor tests using interposers, and associated systems and methodsTRANSLARITY INC·Filed 2016·Application pending·0 cites
- 2633US2017016954A1Systems and methods for generating and preserving vacuum between semiconductor wafer and wafer translatorTRANSLARITY INC·Filed 2016·Application pending·0 cites
- 2732US2017023642A1Lost motion gasket for semiconductor test, and associated systems and methodsTRANSLARITY INC·Filed 2016·Application pending·0 cites
- 2828US2017023617A1Shaping of contact structures for semiconductor test, and associated systems and methodsTRANSLARITY INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →