Inventor · disambiguated record
Christian Wolters
Also filed as: WOLTERS CHRISTIAN · WOLTERS CHRISTIAN H
40 granted patents·1 pending application·477 citations·filing 1996–2025
97Inventor score
Top patents by PatentIndex Score
41 records- 0197US7607647B2Stabilizing a substrate using a vacuum preload air bearing chuckKLA TENCOR TECH CORP·Filed 2007·Granted Oct 27, 2009·96 cites·41 claims
- 0296US9891177B2TDI sensor in a darkfield systemKLA TENCOR CORP·Filed 2014·Granted Feb 13, 2018·56 cites·41 claims
- 0396US7304310B1Methods and systems for inspecting a specimen using light scattered in different wavelength rangesKLA TENCOR TECH CORP·Filed 2003·Granted Dec 4, 2007·89 cites·25 claims
- 0493US7773212B1Contemporaneous surface and edge inspectionKLA TENCOR CORP·Filed 2008·Granted Aug 10, 2010·24 cites·9 claims
- 0592US8582094B1Systems and methods for inspecting specimens including specimens that have a substantially rough uppermost layerSHORTT DAVID·Filed 2005·Granted Nov 12, 2013·28 cites·23 claims
- 0691US8755044B2Large particle detection for multi-spot surface scanning inspection systemsREICH JUERGEN·Filed 2012·Granted Jun 17, 2014·22 cites·20 claims
- 0791US8294887B1Fast laser power control with improved reliability for surface inspectionBIELLAK STEPHEN·Filed 2010·Granted Oct 23, 2012·11 cites·19 claims
- 0891US7436508B2Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection systemKLA TENCOR TECH CORP·Filed 2005·Granted Oct 14, 2008·16 cites·19 claims
- 0990US7787114B2Systems and methods for inspecting a specimen with light at varying power levelsKLA TENCOR TECH CORP·Filed 2007·Granted Aug 31, 2010·17 cites·15 claims
- 1087US10324045B2Surface defect inspection with large particle monitoring and laser power controlKLA TENCOR CORP·Filed 2016·Granted Jun 18, 2019·4 cites·20 claims
- 1183US8817250B2Air bearing for substrate inspection deviceDOYLE PAUL·Filed 2011·Granted Aug 26, 2014·6 cites·19 claims
- 1283US7414715B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturationKLA TENCOR TECH CORP·Filed 2005·Granted Aug 19, 2008·8 cites·10 claims
- 1383US7027146B1Methods for forming a calibration standard and calibration standards for inspection systemsKLA TENCOR TECH CORP·Filed 2002·Granted Apr 11, 2006·33 cites·26 claims
- 1482US7548308B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2005·Granted Jun 16, 2009·8 cites·6 claims
- 1581US9841512B2System and method for reducing radiation-induced false counts in an inspection systemKLA TENCOR CORP·Filed 2015·Granted Dec 12, 2017·2 cites·32 claims
- 1681US7697129B2Systems and methods for inspecting a wafer with increased sensitivityKLA TENCOR TECH CORP·Filed 2006·Granted Apr 13, 2010·6 cites·20 claims
- 1781US7671982B2Systems, circuits and methods for reducing thermal damage and extending the detection range of an inspection systemKLA TENCOR TECH CORP·Filed 2008·Granted Mar 2, 2010·6 cites·14 claims
- 1881US7372559B2Systems and methods for inspecting a wafer with increased sensitivityKLA TENCOR TECH CORP·Filed 2005·Granted May 13, 2008·6 cites·26 claims
- 1980US8885158B2Surface scanning inspection system with adjustable scan pitchWOLTERS CHRISTIAN·Filed 2012·Granted Nov 11, 2014·3 cites·20 claims
- 2079US10215712B2Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection systemWOLTERS CHRISTIAN·Filed 2014·Granted Feb 26, 2019·3 cites·9 claims
- 2179US7777875B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding detector saturationKLA TENCOR TECH CORP·Filed 2008·Granted Aug 17, 2010·4 cites·9 claims
- 2278US9116132B2Surface scanning inspection system with independently adjustable scan pitchKLA TENCOR CORP·Filed 2014·Granted Aug 25, 2015·2 cites·19 claims
- 2377US8134698B1Dynamic range extension in surface inspection systemsWOLTERS CHRISTIAN·Filed 2008·Granted Mar 13, 2012·6 cites·26 claims
- 2475US9255891B2Inspection beam shaping for improved detection sensitivityKLA TENCOR CORP·Filed 2013·Granted Feb 9, 2016·2 cites·18 claims
- 2570US9068952B2Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection systemPETRENKO ALEKSEY·Filed 2009·Granted Jun 30, 2015·4 cites·9 claims
- 2670US7511816B2Methods and systems for determining drift in a position of a light beam with respect to a chuckKLA TENCOR TECH CORP·Filed 2005·Granted Mar 31, 2009·4 cites·29 claims
- 2767US9182358B2Multi-spot defect inspection systemKLA TENCOR CORP·Filed 2013·Granted Nov 10, 2015·1 cites·31 claims
- 2864US7423250B2Systems, circuits and methods for extending the detection range of an inspection system by avoiding circuit saturationKLA TENCOR TECH CORP·Filed 2005·Granted Sep 9, 2008·1 cites·26 claims
- 2962US9194812B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2014·Granted Nov 24, 2015·0 cites·26 claims
- 3061US8042254B1Method for improving edge handling chuck aerodynamicsKLA TENCOR CORP·Filed 2007·Granted Oct 25, 2011·1 cites·19 claims
- 3159US10241217B2System and method for reducing radiation-induced false counts in an inspection systemKLA TENCOR CORP·Filed 2017·Granted Mar 26, 2019·0 cites·21 claims
- 3256US8786850B2Illumination energy management in surface inspectionKLA TENCOR CORP·Filed 2012·Granted Jul 22, 2014·0 cites·28 claims
- 3354US2025264415A1Dynamic range extension of optical systems with multiple low intensity beamsKLA CORP·Filed 2025·Application pending·0 cites
- 3453US10308PRosemary plant named `Silver Spires`Filed 1996·Granted Mar 31, 1998·1 cites·1 claims
- 3552US11703460B2Methods and systems for optical surface defect material characterizationKLA CORP·Filed 2020·Granted Jul 18, 2023·0 cites·20 claims
- 3652US7605915B2System and method to create haze standardKLA TENCOR CORP·Filed 2007·Granted Oct 20, 2009·1 cites·14 claims
- 3751US9678350B2Laser with integrated multi line or scanning beam capabilityKLA TENCOR CORP·Filed 2013·Granted Jun 13, 2017·0 cites·20 claims
- 3848US7746462B2Inspection systems and methods for extending the detection range of an inspection system by forcing the photodetector into the non-linear rangeKLA TENCOR TECH CORP·Filed 2007·Granted Jun 29, 2010·0 cites·25 claims
- 3943US8934091B2Monitoring incident beam position in a wafer inspection systemKLA TENCOR CORP·Filed 2013·Granted Jan 13, 2015·0 cites·22 claims
- 4038US10088345B1Haze and defect distribution and aperture configuration in surface metrology inspectorsKLA TENCOR CORP·Filed 2012·Granted Oct 2, 2018·0 cites·16 claims
- 4137US5858926AProcess for preparing mercury-barium-calcium-copper-oxide-based superconductor materialsUNIV FLORIDA STATE·Filed 1996·Granted Jan 12, 1999·6 cites·47 claims
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