Inventor · disambiguated record
Chunguang Xia
Also filed as: XIA CHUNGUANG
19 granted patents·7 pending applications·80 citations·filing 2008–2024
93Inventor score
Files withASML NETHERLANDS BV8BMF MATERIAL TECH INC5LAM RES CORP4BMF NANO MATERIAL TECH CO LTD2NOVELLUS SYSTEMS INC2
Top patents by PatentIndex Score
26 records- 0195US10287683B2Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate regionLAM RES CORP·Filed 2016·Granted May 14, 2019·6 cites·14 claims
- 0294US10232413B2Controlled fluid flow for cleaning an optical elementASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·8 cites·20 claims
- 0394US9388494B2Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate regionNOVELLUS SYSTEMS INC·Filed 2012·Granted Jul 12, 2016·16 cites·16 claims
- 0493US9490149B2Chemical deposition apparatus having conductance controlLAM RES CORP·Filed 2013·Granted Nov 8, 2016·18 cites·31 claims
- 0592US11654619B2Immersion multi-material projection micro stereolithography with non-stick gas permeable transparent membraneBMF MATERIAL TECH INC·Filed 2021·Granted May 23, 2023·3 cites·17 claims
- 0691US11725282B2Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate regionNOVELLUS SYSTEMS INC·Filed 2021·Granted Aug 15, 2023·1 cites·12 claims
- 0790US11654617B2Immersion projection micro stereolithographyBMF MATERIAL TECH INC·Filed 2021·Granted May 23, 2023·4 cites·16 claims
- 0890US11347154B2Cleaning a structure surface in an EUV chamberASML NETHERLANDS BV·Filed 2019·Granted May 31, 2022·3 cites·21 claims
- 0989US11111581B2Suppression of parasitic deposition in a substrate processing system by suppressing precursor flow and plasma outside of substrate regionLAM RES CORP·Filed 2019·Granted Sep 7, 2021·3 cites·9 claims
- 1084US2025085643A1Cleaning a structure surface in an euv chamberASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 1181US9201511B1Optical navigation sensor and methodSPURLOCK BRETT ALAN·Filed 2011·Granted Dec 1, 2015·11 cites·18 claims
- 1278US11822252B2Guiding device and associated systemASML NETHERLANDS BV·Filed 2021·Granted Nov 21, 2023·1 cites·20 claims
- 1376US12189313B2Cleaning a structure surface in an EUV chamberASML NETHERLANDS BV·Filed 2022·Granted Jan 7, 2025·0 cites·16 claims
- 1474US8985152B2Point of use valve manifold for semiconductor fabrication equipmentCHANDRASEKHARAN RAMESH·Filed 2012·Granted Mar 24, 2015·5 cites·30 claims
- 1571US9776218B2Controlled fluid flow for cleaning an optical elementASML NETHERLANDS BV·Filed 2015·Granted Oct 3, 2017·1 cites·19 claims
- 1663US12389519B2Guiding device and associated systemASML NETHERLANDS BV·Filed 2023·Granted Aug 12, 2025·0 cites·20 claims
- 1759US12397500B2System and method of low-waste multi-material resin printingBMF NANO MATERIAL TECH CO LTD·Filed 2022·Granted Aug 26, 2025·0 cites·7 claims
- 1854US2025162241A1System and Method of Membrane Release in Resin 3D PrintingBMF NANO MATERIAL TECH CO LTD·Filed 2023·Application pending·0 cites
- 1953US2024198587A1Systems and Methods for Releasing a Membrane in Resin 3-D PrintingBMF MATERIAL TECH INC·Filed 2022·Application pending·0 cites
- 2052US10955749B2Guiding device and associated systemASML NETHERLANDS BV·Filed 2018·Granted Mar 23, 2021·0 cites·20 claims
- 2150US12420486B2Multi-scale system for projection micro stereolithographyBMF MATERIAL TECH INC·Filed 2021·Granted Sep 23, 2025·0 cites·18 claims
- 2250US2021299952A1Roller-membrane layering micro stereolithographyBMF MATERIAL TECH INC·Filed 2021·Application pending·0 cites
- 2348US12251879B2Methods of controlling dimensions in projection micro stereolithographyBMF PRECISION TECH WUXI INC·Filed 2019·Granted Mar 18, 2025·0 cites·10 claims
- 2447US2018320630A1Internal Combustion Engine Cylinder Head with Tubular Apparatus for Intake and ExhaustXIACAMERI·Filed 2018·Application pending·0 cites
- 2545US2017009348A1Chemical Deposition Apparatus Having Conductance ControlLAM RES CORP·Filed 2016·Application pending·0 cites
- 2644US2011033887A1Three-Dimensional Microfabricated Bioreactors with Embedded Capillary NetworkFANG NICHOLAS X·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →