Inventor · disambiguated record
Daniel L. Cavan
Also filed as: CAVAN DANIEL L
10 granted patents·266 citations·filing 1985–2014
90Inventor score
Top patents by PatentIndex Score
10 records- 0192US4806774AInspection system for array of microcircuit dies having redundant circuit patternsINSYSTEMS INC·Filed 1987·Granted Feb 21, 1989·140 cites·39 claims
- 0282US7227984B2Method and apparatus for identifying defects in a substrate surface by using dithering to reconstruct under-sampled imagesKLA TENCOR TECH CORP·Filed 2003·Granted Jun 5, 2007·37 cites·5 claims
- 0377US9703207B1System and method for reducing dynamic range in images of patterned regions of semiconductor wafersCAVAN DANIEL L·Filed 2012·Granted Jul 11, 2017·5 cites·26 claims
- 0475US4788431ASpecimen distance measuring systemPERKIN ELMER CORP·Filed 1987·Granted Nov 29, 1988·21 cites·18 claims
- 0573US9128064B2Super resolution inspection systemKLA TENCOR CORP·Filed 2013·Granted Sep 8, 2015·2 cites·20 claims
- 0673US8643835B2Active planar autofocusYOUNG SCOTT A·Filed 2010·Granted Feb 4, 2014·4 cites·6 claims
- 0771US4811409AMethod and apparatus for detecting defect information in a holographic image patternINSYSTEMS INC·Filed 1986·Granted Mar 7, 1989·32 cites·15 claims
- 0867US10429319B2Inspection system including parallel imaging paths with multiple and selectable spectral bandsKLA TENCOR CORP·Filed 2014·Granted Oct 1, 2019·1 cites·32 claims
- 0967US6316164B1Proximity effect correction method through uniform removal of fraction of interior pixelsFiled 2000·Granted Nov 13, 2001·7 cites·5 claims
- 1054US4659172ARotatable and translatable mounting mechanism for a specimen pattern in optical processing apparatusINSYSTEMS INC·Filed 1985·Granted Apr 21, 1987·17 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →