Inventor · disambiguated record
Dale R. Dubois
Also filed as: DUBOIS DALE · DUBOIS DALE R · DUBOIS DALE ROBERT
25 granted patents·6 pending applications·2,109 citations·filing 1983–2018
97Inventor score
Top patents by PatentIndex Score
31 records- 0198US4694778AChemical vapor deposition wafer boatANICON INC·Filed 1986·Granted Sep 22, 1987·311 cites·11 claims
- 0297US6494959B1Process and apparatus for cleaning a silicon surfaceAPPLIED MATERIALS INC·Filed 2000·Granted Dec 17, 2002·260 cites·41 claims
- 0397US5888304AHeater with shadow ring and purge above wafer surfaceAPPLIED MATERIALS INC·Filed 1996·Granted Mar 30, 1999·374 cites·28 claims
- 0497US5855687ASubstrate support shield in wafer processing reactorsAPPLIED MATERIALS INC·Filed 1994·Granted Jan 5, 1999·360 cites·11 claims
- 0594US10236197B2Processing system containing an isolation region separating a deposition chamber from a treatment chamberAPPLIED MATERIALS INC·Filed 2015·Granted Mar 19, 2019·11 cites·20 claims
- 0694US8197636B2Systems for plasma enhanced chemical vapor deposition and bevel edge etchingSHAH ASHISH·Filed 2008·Granted Jun 12, 2012·30 cites·11 claims
- 0794US5688331AResistance heated stem mounted aluminum susceptor assemblyAPPLIED MATERISLS INC·Filed 1996·Granted Nov 18, 1997·411 cites·9 claims
- 0892US9725806B2Multi-zone pedestal for plasma processingAPPLIED MATERIALS INC·Filed 2015·Granted Aug 8, 2017·7 cites·17 claims
- 0991US8444926B2Processing chamber with heated chamber linerFODOR MARK A·Filed 2007·Granted May 21, 2013·25 cites·16 claims
- 1090US6455814B1Backside heating chamber for emissivity independent thermal processesAPPLIED MATERIALS INC·Filed 2001·Granted Sep 24, 2002·51 cites·17 claims
- 1188US10711347B2Micro-volume deposition chamberAPPLIED MATERIALS INC·Filed 2017·Granted Jul 14, 2020·2 cites·19 claims
- 1285US4539933AChemical vapor deposition apparatusANICON INC·Filed 1983·Granted Sep 10, 1985·50 cites·19 claims
- 1384US7699935B2Method and system for supplying a cleaning gas into a process chamberAPPLIED MATERIALS INC·Filed 2008·Granted Apr 20, 2010·3 cites·6 claims
- 1480US7777197B2Vacuum reaction chamber with x-lamp heaterAPPLIED MATERIALS INC·Filed 2006·Granted Aug 17, 2010·7 cites·20 claims
- 1579US10113231B2Process kit including flow isolator ringAPPLIED MATERIALS INC·Filed 2016·Granted Oct 30, 2018·1 cites·18 claims
- 1676US5522937AWelded susceptor assemblyAPPLIED MATERIALS INC·Filed 1994·Granted Jun 4, 1996·58 cites·40 claims
- 1775US10090187B2Multi-zone pedestal for plasma processingAPPLIED MATERIALS INC·Filed 2017·Granted Oct 2, 2018·1 cites·20 claims
- 1875US5332443ALift fingers for substrate processing apparatusAPPLIED MATERIALS INC·Filed 1993·Granted Jul 26, 1994·62 cites·20 claims
- 1971US2010012273A1Method and System for Supplying a Cleaning Gas Into a Process ChamberAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 2068US6155198AApparatus for constructing an oxidized film on a semiconductor waferAPPLIED MATERIALS INC·Filed 1996·Granted Dec 5, 2000·29 cites·15 claims
- 2165US4524719ASubstrate loading means for a chemical vapor deposition apparatusANICON INC·Filed 1983·Granted Jun 25, 1985·18 cites·11 claims
- 2263US10971389B2Multi-zone pedestal for plasma processingAPPLIED MATERIALS INC·Filed 2018·Granted Apr 6, 2021·0 cites·22 claims
- 2357US6368567B2Point-of-use exhaust by-product reactorAPPLIED MATERIALS INC·Filed 1998·Granted Apr 9, 2002·19 cites·18 claims
- 2448US2012211164A1Systems for plasma enhanced chemical vapor deposition and bevel edge etchingSHAH ASHISH·Filed 2012·Application pending·0 cites
- 2547US6699530B2Method for constructing a film on a semiconductor waferAPPLIED MATERIALS INC·Filed 1997·Granted Mar 2, 2004·11 cites·10 claims
- 2645US2006289795A1Vacuum reaction chamber with x-lamp heaterDUBOIS DALE R·Filed 2006·Application pending·0 cites
- 2743US4582020AChemical vapor deposition wafer boatANICON INC·Filed 1984·Granted Apr 15, 1986·7 cites·12 claims
- 2842US2004099215A1Chamber for constructing a film on a semiconductor waferAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 2939US2002166256A1Process and apparatus for cleaning a silicon surfaceFiled 2002·Application pending·0 cites
- 3036US2012097330A1Dual delivery chamber designIYENGAR PRAHALLAD·Filed 2010·Application pending·0 cites
- 3130US4641604AChemical vapor deposition wafer boatANICON INC·Filed 1985·Granted Feb 10, 1987·1 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →