Inventor · disambiguated record
David Shafer
Also filed as: SHAFER DAVID · SHAFER DAVID R · SHAFER DAVID ROSS
132 granted patents·24 pending applications·4,152 citations·filing 1977–2023
99Inventor score
Files withZEISS CARL SMT AG34ZEISS CARL SMT GMBH16KLA TENCOR CORP14KLA TENCOR TECH CORP13PERKIN ELMER CORP12
Top patents by PatentIndex Score
156 records- 0199US5717518ABroad spectrum ultraviolet catadioptric imaging systemKLA INSTR CORP·Filed 1996·Granted Feb 10, 1998·243 cites·20 claims
- 0298US6636350B2Microlithographic reduction projection catadioptric objectiveZEISS STIFTUNG·Filed 2001·Granted Oct 21, 2003·123 cites·26 claims
- 0398US5999310AUltra-broadband UV microscope imaging system with wide range zoom capabilityFiled 1997·Granted Dec 7, 1999·224 cites·23 claims
- 0497US8004755B2Catoptric objectives and systems using catoptric objectivesZEISS CARL SMT GMBH·Filed 2010·Granted Aug 23, 2011·12 cites·17 claims
- 0597US7682031B2Catoptric objectives and systems using catoptric objectivesZEISS CARL SMT AG·Filed 2005·Granted Mar 23, 2010·48 cites·49 claims
- 0697US6873476B2Microlithographic reduction projection catadioptric objectiveZEISS STIFTUNG·Filed 2001·Granted Mar 29, 2005·87 cites·38 claims
- 0797US6842298B1Broad band DUV, VUV long-working distance catadioptric imaging systemKLA TENCOR TECH CORP·Filed 2001·Granted Jan 11, 2005·83 cites·38 claims
- 0897US6064517AHigh NA system for multiple mode imagingKLA TENCOR CORP·Filed 1998·Granted May 16, 2000·135 cites·65 claims
- 0997US5686728AProjection lithography system and method using all-reflective optical elementsLUCENT TECHNOLOGIES INC·Filed 1996·Granted Nov 11, 1997·201 cites·20 claims
- 1096US4747678AOptical relay system with magnificationPERKIN ELMER CORP·Filed 1986·Granted May 31, 1988·129 cites·20 claims
- 1196US4226501AFour mirror unobscurred anastigmatic telescope with all spherical surfacesPERKIN ELMER CORP·Filed 1978·Granted Oct 7, 1980·101 cites·8 claims
- 1295US7426082B2Catadioptric projection objective with geometric beam splittingZEISS CARL SMT AG·Filed 2005·Granted Sep 16, 2008·20 cites·22 claims
- 1395US7218445B2Microlithographic reduction projection catadioptric objectiveZEISS STIFTUNG·Filed 2003·Granted May 15, 2007·53 cites·9 claims
- 1495US6665126B2Projection exposure lens with aspheric elementsZEISS STIFTUNG·Filed 2000·Granted Dec 16, 2003·66 cites·78 claims
- 1595US6262836B1High numerical aperture ring field projection system for extreme ultraviolet lithographyFiled 2000·Granted Jul 17, 2001·61 cites·24 claims
- 1694US7385756B2Catadioptric projection objectiveZEISS CARL SMT AG·Filed 2005·Granted Jun 10, 2008·42 cites·109 claims
- 1794US6600608B1Catadioptric objective comprising two intermediate imagesZEISS STIFTUNG·Filed 1999·Granted Jul 29, 2003·129 cites·64 claims
- 1894US5031976ACatadioptric imaging systemKLA INSTR CORP·Filed 1990·Granted Jul 16, 1991·144 cites·25 claims
- 1993US7859748B2Microlithographic reduction projection catadioptric objectiveZEISS CARL SMT GMBH·Filed 2007·Granted Dec 28, 2010·21 cites·20 claims
- 2093US7463422B2Projection exposure apparatusZEISS CARL SMT AG·Filed 2007·Granted Dec 9, 2008·19 cites·23 claims
- 2193US6995930B2Catadioptric projection objective with geometric beam splittingZEISS CARL SMT AG·Filed 2003·Granted Feb 7, 2006·39 cites·52 claims
- 2293US6646718B2Projection objective having adjacently mounted aspheric lens surfacesZEISS CARL SEMICONDUCTOR MFG·Filed 2002·Granted Nov 11, 2003·49 cites·11 claims
- 2393US6392793B1High NA imaging systemKLA TENCOR CORP·Filed 2000·Granted May 21, 2002·39 cites·20 claims
- 2493US6142641AFour-mirror extreme ultraviolet (EUV) lithography projection systemULTRATECH STEPPER INC·Filed 1998·Granted Nov 7, 2000·131 cites·31 claims
- 2593US5353322ALens system for X-ray projection lithography cameraTROPEL CORP·Filed 1993·Granted Oct 4, 1994·103 cites·10 claims
- 2693US4469414ARestrictive off-axis field optical systemPERKIN ELMER CORP·Filed 1982·Granted Sep 4, 1984·81 cites·9 claims
- 2792US6560031B1Optical projection lens systemZEISS CARL·Filed 2000·Granted May 6, 2003·42 cites·10 claims
- 2892US6483638B1Ultra-broadband UV microscope imaging system with wide range zoom capabilityKLA TENCOR CORP·Filed 2000·Granted Nov 19, 2002·34 cites·18 claims
- 2991US8208199B2Catadioptric projection objectiveSHAFER DAVID·Filed 2009·Granted Jun 26, 2012·7 cites·20 claims
- 3091US7474461B2Broad band objective having improved lateral color performanceKLA TENCOR TECH CORP·Filed 2007·Granted Jan 6, 2009·14 cites·21 claims
- 3191US6188513B1High numerical aperture ring field projection system for extreme ultraviolet lithographyFiled 1999·Granted Feb 13, 2001·88 cites·18 claims
- 3291US6014252AReflective optical imaging systemUNIV CALIFORNIA·Filed 1998·Granted Jan 11, 2000·75 cites·15 claims
- 3390US8208198B2Catadioptric projection objectiveSHAFER DAVID·Filed 2007·Granted Jun 26, 2012·8 cites·4 claims
- 3490US7712905B2Imaging system with mirror groupZEISS CARL SMT AG·Filed 2005·Granted May 11, 2010·9 cites·31 claims
- 3590US7428105B2Objectives as a microlithography projection objective with at least one liquid lensZEISS CARL SMT AG·Filed 2007·Granted Sep 23, 2008·9 cites·26 claims
- 3690US6204961B1Day and night sighting systemLITTON SYSTEMS INC·Filed 1995·Granted Mar 20, 2001·126 cites·24 claims
- 3790US6133576ABroad spectrum ultraviolet inspection methods employing catadioptric imagingKLA INSTR CORP·Filed 1997·Granted Oct 17, 2000·66 cites·11 claims
- 3890US5220590AX-ray projection lithography cameraGEN SIGNAL CORP·Filed 1992·Granted Jun 15, 1993·78 cites·21 claims
- 3989US9804378B2Arrangement for light sheet microscopyZEISS CARL MICROSCOPY GMBH·Filed 2014·Granted Oct 31, 2017·11 cites·6 claims
- 4089US7136234B2Broad band DUV, VUV long-working distance catadioptric imaging systemKLA TENCOR TECH CORP·Filed 2005·Granted Nov 14, 2006·19 cites·20 claims
- 4189US6496306B1Catadioptric optical system and exposure apparatus having the sameZEISS STIFTUNG·Filed 1999·Granted Dec 17, 2002·64 cites·20 claims
- 4289US6313467B1Broad spectrum ultraviolet inspection methods employing catadioptric imagingKLA TENCOR INC·Filed 2000·Granted Nov 6, 2001·28 cites·36 claims
- 4389US5410434AReflective projection system comprising four spherical mirrorsULTRATECH STEPPER INC·Filed 1993·Granted Apr 25, 1995·93 cites·14 claims
- 4489US4711535ARing field projection systemPERKIN ELMER CORP·Filed 1985·Granted Dec 8, 1987·58 cites·8 claims
- 4589US4342503ACatadioptric telescopesPERKIN ELMER CORP·Filed 1979·Granted Aug 3, 1982·53 cites·9 claims
- 4688US7573655B2Unit magnification projection objectiveZEISS CARL SMT AG·Filed 2007·Granted Aug 11, 2009·10 cites·26 claims
- 4788US6912042B26-mirror projection objective with few lensesZEISS CARL SMT AG·Filed 2003·Granted Jun 28, 2005·37 cites·56 claims
- 4888US4331390AMonocentric optical systemsPERKIN ELMER CORP·Filed 1979·Granted May 25, 1982·49 cites·7 claims
- 4988US4205902ALaser beam expanderPERKIN ELMER CORP·Filed 1978·Granted Jun 3, 1980·51 cites·5 claims
- 5087US8317345B2Catoptric objectives and systems using catoptric objectivesMANN HANS-JUERGEN·Filed 2011·Granted Nov 27, 2012·5 cites·14 claims
Showing the top 50 of 156 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when David Shafer files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →