Inventor · disambiguated record
Diane Mccafferty
Also filed as: MCCAFFERTY DIANE · MCCAFFERTY DIANE C · MCCAFFERTY DIANE CZOP
7 granted patents·1 pending application·18 citations·filing 2006–2011
79Inventor score
Top patents by PatentIndex Score
8 records- 0179US8629970B2Immersion lithographic apparatus with immersion fluid re-circulating systemSEWELL HARRY·Filed 2009·Granted Jan 14, 2014·5 cites·28 claims
- 0278US7751030B2Interferometric lithographic projection apparatusASML HOLDING NV·Filed 2006·Granted Jul 6, 2010·5 cites·25 claims
- 0373US7684014B2Lithographic apparatus and device manufacturing methodASML HOLDING B V·Filed 2006·Granted Mar 23, 2010·5 cites·20 claims
- 0471US9632425B2Lithographic apparatus, a dryer and a method of removing liquid from a surfaceLEENDERS MARTINUS HENDRIKUS ANTONIUS·Filed 2007·Granted Apr 25, 2017·2 cites·37 claims
- 0563US7995185B2Systems and methods for thermally-induced aberration correction in immersion lithographyASML HOLDING NV·Filed 2006·Granted Aug 9, 2011·1 cites·19 claims
- 0652US8736807B2Systems and methods for thermally-induced aberration correction in immersion lithographySEWELL HARRY·Filed 2011·Granted May 27, 2014·0 cites·15 claims
- 0752US8451422B2Re-flow and buffer system for immersion lithographySEWELL HARRY·Filed 2009·Granted May 28, 2013·0 cites·29 claims
- 0838US2010214544A1Fluid handling device, an immersion lithographic apparatus and a device manufacturing methodASML HOLDING NV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →