Inventor · disambiguated record
Dieter Mueller
Also filed as: MUELLER DIETER · MUELLER DIETER E
11 granted patents·2 pending applications·89 citations·filing 2000–2021
89Inventor score
Top patents by PatentIndex Score
13 records- 0191US11164768B2Process-induced displacement characterization during semiconductor productionKLA TENCOR CORP·Filed 2018·Granted Nov 2, 2021·6 cites·34 claims
- 0288US7173715B2Reduced coherence symmetric grazing incidence differential interferometerKLA TENCOR CORP·Filed 2005·Granted Feb 6, 2007·11 cites·20 claims
- 0387US11682570B2Process-induced displacement characterization during semiconductor productionKLA CORP·Filed 2021·Granted Jun 20, 2023·1 cites·27 claims
- 0487US7057741B1Reduced coherence symmetric grazing incidence differential interferometerKLA TENCOR CORP·Filed 2000·Granted Jun 6, 2006·31 cites·23 claims
- 0583US8068234B2Method and apparatus for measuring shape or thickness information of a substrateTANG SHOUHONG·Filed 2009·Granted Nov 29, 2011·15 cites·58 claims
- 0674US6806966B1Copper CMP flatness monitor using grazing incidence interferometryKLA TENCOR TECHOLOGIES CORP·Filed 2000·Granted Oct 19, 2004·14 cites·41 claims
- 0769US7505144B2Copper CMP flatness monitor using grazing incidence interferometryKLA TENCOR TECH CORP·Filed 2004·Granted Mar 17, 2009·5 cites·20 claims
- 0867US9273952B2Grazing and normal incidence interferometer having common reference surfaceKLA TENCOR CORP·Filed 2014·Granted Mar 1, 2016·1 cites·20 claims
- 0967US7433047B1Runout characterizationKLA TENCOR CORP·Filed 2007·Granted Oct 7, 2008·5 cites·41 claims
- 1054US2010235114A1Systems and methods for determining one or more characteristics of a specimen using radiation in the terahertz rangeKLA TENCOR CORP·Filed 2009·Application pending·0 cites
- 1153US11049720B2Removable opaque coating for accurate optical topography measurements on top surfaces of transparent filmsKLA CORP·Filed 2019·Granted Jun 29, 2021·0 cites·18 claims
- 1248US2012281275A1Systems and Methods for Determining One or More Characteristics of a Specimen Using Radiation in the Terahertz RangeLEVY ADY·Filed 2012·Application pending·0 cites
- 1344US11441893B2Multi-spot analysis system with multiple optical probesKLA TENCOR CORP·Filed 2018·Granted Sep 13, 2022·0 cites·47 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →