Inventor · disambiguated record
Donald W. Berrian
Also filed as: BERRIAN DONALD · BERRIAN DONALD W · BERRIAN DONALD WAYNE
26 granted patents·3 pending applications·1,423 citations·filing 1981–2016
97Inventor score
Files withAXCELIS TECH INC7ADVANCED ION BEAM TECH INC3VARIAN ASSOCIATES3APPLIED MATERIALS INC2NOVELLUS SYSTEMS INC2
Top patents by PatentIndex Score
29 records- 0198US5806980AMethods and apparatus for measuring temperatures at high potentialNOVELLUS SYSTEMS INC·Filed 1996·Granted Sep 15, 1998·503 cites·29 claims
- 0298US4980562AMethod and apparatus for high efficiency scanning in an ion implanterVARIAN ASSOCIATES·Filed 1989·Granted Dec 25, 1990·123 cites·18 claims
- 0398US4922106AIon beam scanning method and apparatusVARIAN ASSOCIATES·Filed 1987·Granted May 1, 1990·162 cites·10 claims
- 0496US7135691B2Reciprocating drive for scanning a workpiece through an ion beamAXCELIS TECH INC·Filed 2005·Granted Nov 14, 2006·36 cites·63 claims
- 0595US4433384APattern data handling system for an electron beam exposure systemVARIAN ASSOCIATES·Filed 1981·Granted Feb 21, 1984·52 cites·14 claims
- 0694US5565036AApparatus and method for igniting plasma in a process moduleTEL AMERICA INC·Filed 1994·Granted Oct 15, 1996·115 cites·34 claims
- 0792US6580083B2High efficiency scanning in ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Jun 17, 2003·41 cites·18 claims
- 0891US5313848ADisposable electronic monitor deviceSENSITECH INC·Filed 1991·Granted May 24, 1994·72 cites·12 claims
- 0989US7323695B2Reciprocating drive for scanning a workpieceAXCELIS TECH INC·Filed 2005·Granted Jan 29, 2008·11 cites·25 claims
- 1089US7141809B2Method for reciprocating a workpiece through an ion beamAXCELIS TECH INC·Filed 2005·Granted Nov 28, 2006·12 cites·20 claims
- 1187US6677599B2System and method for uniformly implanting a wafer with an ion beamAPPLIED MATERIALS INC·Filed 2001·Granted Jan 13, 2004·34 cites·24 claims
- 1286US5996528AMethod and apparatus for flowing gases into a manifold at high potentialNOVELLUS SYSTEMS INC·Filed 1996·Granted Dec 7, 1999·72 cites·5 claims
- 1386US5789867AApparatus and method for igniting plasma in a process moduleTEL AMERICA INC·Filed 1996·Granted Aug 4, 1998·54 cites·12 claims
- 1485US6661016B2Ion implantation uniformity correction using beam current controlPROTEROS LLC·Filed 2001·Granted Dec 9, 2003·25 cites·17 claims
- 1583US6777687B2Substrate positioning systemAXCELIS TECH INC·Filed 2002·Granted Aug 17, 2004·23 cites·27 claims
- 1682US7381977B2Ion beam profilerAXCELIS TECH INC·Filed 2005·Granted Jun 3, 2008·6 cites·25 claims
- 1778USRE36200EDisposable electronic monitor deviceBERRIAN DONALD W·Filed 1996·Granted Apr 27, 1999·42 cites·13 claims
- 1877US9340870B2Magnetic field fluctuation for beam smoothingADVANCED ION BEAM TECH INC·Filed 2013·Granted May 17, 2016·3 cites·23 claims
- 1977US9057129B2Implant method and implanter by using a variable apertureADVANCED ION BEAM TECH INC·Filed 2014·Granted Jun 16, 2015·3 cites·19 claims
- 2075US7547898B2Particulate prevention in ion implantationAXCELIS TECH INC·Filed 2006·Granted Jun 16, 2009·2 cites·22 claims
- 2172US7772571B2Implant beam utilization in an ion implanterADVANCED ION BEAM TECHNOLOGY I·Filed 2007·Granted Aug 10, 2010·4 cites·14 claims
- 2272US6833552B2System and method for implanting a wafer with an ion beamAPPLIED MATERIALS INC·Filed 2003·Granted Dec 21, 2004·12 cites·10 claims
- 2372US6765219B2Hybrid scanning system and methods for ion implantationVARIAH SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Jul 20, 2004·12 cites·7 claims
- 2454US7247863B2System and method for rapidly controlling the output of an ion source for ion implantationAXCELLIS TECHNOLOGIES INC·Filed 2001·Granted Jul 24, 2007·3 cites·26 claims
- 2553US10361059B2Magnetic field fluctuation for beam smoothingADVANCED ION BEAM TECH INC·Filed 2016·Granted Jul 23, 2019·0 cites·18 claims
- 2649US6921907B2Substrate positioning systemAXCELIS TECH INC·Filed 2004·Granted Jul 26, 2005·1 cites·16 claims
- 2741US2002125446A1Substrate positioning systemFiled 2002·Application pending·0 cites
- 2837US2003001110A1System and method for amplifying an angle of divergence of a scanned ion beamFiled 2002·Application pending·0 cites
- 2937US2002050569A1Magnetic scanning system with a nonzero fieldFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →