Inventor · disambiguated record
Eric Brian Catey
Also filed as: CATEY ERIC B · CATEY ERIC BRIAN
12 granted patents·3 pending applications·126 citations·filing 1999–2023
87Inventor score
Files withASML HOLDING NV4SMIRNOV STANISLAV Y3ASML NETHERLANDS BV2CATEY ERIC BRIAN1NELSON MICHAEL L1
Top patents by PatentIndex Score
15 records- 0187US6239863B1Removable cover for protecting a reticle, system including and method of using the sameSILICON VALLEY GROUP·Filed 1999·Granted May 29, 2001·103 cites·38 claims
- 0280US9041903B2Mask inspection with fourier filtering and image compareNELSON MICHAEL L·Filed 2010·Granted May 26, 2015·5 cites·20 claims
- 0375US8189203B2Reticle inspection systems and methodSHMAREV YEVGENIY KONSTANTINOVICH·Filed 2009·Granted May 29, 2012·7 cites·20 claims
- 0475US7525641B2System and method for uniformity correctionASML HOLDING NV·Filed 2005·Granted Apr 28, 2009·6 cites·11 claims
- 0573US9285687B2Inspection apparatus, lithographic apparatus, and device manufacturing methodSMIRNOV STANISLAV Y·Filed 2012·Granted Mar 15, 2016·2 cites·21 claims
- 0668US9046754B2EUV mask inspection systemSEWELL HARRY·Filed 2009·Granted Jun 2, 2015·2 cites·14 claims
- 0762US8064148B2High numerical aperture catadioptric objectives without obscuration and applications thereofSMIRNOV STANISLAV Y·Filed 2009·Granted Nov 22, 2011·1 cites·17 claims
- 0858US2024263941A1Intensity imbalance calibration on an overfilled bidirectional markASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0954US10481507B2Measurement method comprising in-situ printing of apparatus mark and corresponding apparatusASML HOLDING NV·Filed 2017·Granted Nov 19, 2019·0 cites·20 claims
- 1054US2025147438A1Inspection apparatus, motorized apertures, and method backgroundASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1153US8259398B2High numerical aperture catadioptric objectives without obscuration and applications thereofSMIRNOV STANISLAV Y·Filed 2011·Granted Sep 4, 2012·0 cites·21 claims
- 1243US10895813B2Lithographic cluster, lithographic apparatus, and device manufacturing methodASML HOLDING NV·Filed 2018·Granted Jan 19, 2021·0 cites·15 claims
- 1337US2012281197A1Holographic Mask Inspection System with Spatial FilterTHARALDSEN ROBERT ALBERT·Filed 2010·Application pending·0 cites
- 1434US8623576B2Time differential reticle inspectionCATEY ERIC BRIAN·Filed 2010·Granted Jan 7, 2014·0 cites·18 claims
- 1531US10928738B2Adaptive filter for in-line correctionASML HOLDING NV·Filed 2017·Granted Feb 23, 2021·0 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →