Inventor · disambiguated record
Erik Roelof Loopstra
Also filed as: LOOPSTRA ERIK · LOOPSTRA ERIK R · LOOPSTRA ERIK ROELOF · MARKOYA LOUIS JOHN
328 granted patents·27 pending applications·11,647 citations·filing 1997–2022
99Inventor score
Files withASML NETHERLANDS BV222LOOPSTRA ERIK ROELOF21LOF JOERI12ASM LITHOGRAPHY BV7ASML HOLDING NV7
Top patents by PatentIndex Score
355 records- 0199US9740107B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·10 cites·20 claims
- 0299US9366972B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 14, 2016·14 cites·20 claims
- 0399US9360765B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 7, 2016·13 cites·20 claims
- 0499US8482845B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jul 9, 2013·32 cites·16 claims
- 0599US7593092B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 22, 2009·60 cites·15 claims
- 0699US7593093B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 22, 2009·67 cites·9 claims
- 0799US7388648B2Lithographic projection apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 17, 2008·136 cites·20 claims
- 0899US7362446B2Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unitASML NETHERLANDS BV·Filed 2005·Granted Apr 22, 2008·164 cites·19 claims
- 0999US7352434B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 1, 2008·178 cites·43 claims
- 1099US7213963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 8, 2007·196 cites·28 claims
- 1199US7199858B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 3, 2007·409 cites·29 claims
- 1299US7193232B2Lithographic apparatus and device manufacturing method with substrate measurement not through liquidASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·216 cites·33 claims
- 1399US7161659B2Dual stage lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jan 9, 2007·271 cites·14 claims
- 1499US7075616B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 11, 2006·366 cites·33 claims
- 1599US6952253B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 4, 2005·1.8k cites·45 claims
- 1698US7936444B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted May 3, 2011·35 cites·35 claims
- 1798US7880901B2Lithographic apparatus and method for calibrating the sameASML NETHERLANDS BV·Filed 2010·Granted Feb 1, 2011·63 cites·10 claims
- 1898US7859686B2Lithographic apparatus and method for calibrating the sameASML NETHERLANDS BV·Filed 2009·Granted Dec 28, 2010·61 cites·15 claims
- 1998US7733459B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jun 8, 2010·66 cites·50 claims
- 2098US7710540B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted May 4, 2010·94 cites·24 claims
- 2198US7636165B2Displacement measurement systems lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Dec 22, 2009·104 cites·43 claims
- 2298US7528965B2Lithographic apparatus and method for calibrating the sameASML NETHERLANDS BV·Filed 2007·Granted May 5, 2009·69 cites·14 claims
- 2398US7483120B2Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·121 cites·23 claims
- 2498US7482611B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·65 cites·38 claims
- 2598US7408655B2Lithographic apparatus and method for calibrating the sameASML NETHERLANDS BV·Filed 2007·Granted Aug 5, 2008·72 cites·16 claims
- 2698US7372541B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·74 cites·32 claims
- 2798US7292312B2Lithographic apparatus and method for calibrating the sameASML NETHERLANDS BV·Filed 2005·Granted Nov 6, 2007·139 cites·16 claims
- 2898US7256871B2Lithographic apparatus and method for calibrating the sameASML NETHERLANDS BV·Filed 2004·Granted Aug 14, 2007·146 cites·16 claims
- 2998US7224436B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted May 29, 2007·110 cites·21 claims
- 3098US7119874B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 10, 2006·143 cites·48 claims
- 3198US7110081B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Sep 19, 2006·128 cites·26 claims
- 3298US6262796B1Positioning device having two object holdersASM LITHOGRAPHY BV·Filed 1998·Granted Jul 17, 2001·634 cites·11 claims
- 3398US6208407B1Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurementASM LITHOGRAPHY BV·Filed 1998·Granted Mar 27, 2001·1k cites·19 claims
- 3498US6020964AInterferometer system and lithograph apparatus including an interferometer systemASM LITHOGRAPHY BV·Filed 1998·Granted Feb 1, 2000·478 cites·40 claims
- 3597US10527955B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jan 7, 2020·4 cites·20 claims
- 3697US9952515B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Apr 24, 2018·6 cites·20 claims
- 3797US9097987B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Aug 4, 2015·14 cites·19 claims
- 3897US7932999B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 26, 2011·22 cites·17 claims
- 3997US7515281B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Apr 7, 2009·35 cites·23 claims
- 4096US9798246B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Oct 24, 2017·5 cites·22 claims
- 4196US9482966B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2012·Granted Nov 1, 2016·12 cites·74 claims
- 4296US9134623B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Sep 15, 2015·8 cites·21 claims
- 4396US9134622B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Sep 15, 2015·9 cites·29 claims
- 4496US8634056B2Lithographic apparatus and device manufacturing methodSTREEFKERK BOB·Filed 2011·Granted Jan 21, 2014·10 cites·21 claims
- 4596US8154708B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2006·Granted Apr 10, 2012·23 cites·20 claims
- 4696US7804575B2Lithographic apparatus and device manufacturing method having liquid evaporation controlASML NETHERLANDS BV·Filed 2005·Granted Sep 28, 2010·23 cites·44 claims
- 4796US7795603B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Sep 14, 2010·15 cites·18 claims
- 4896US7619207B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Nov 17, 2009·88 cites·19 claims
- 4996US7528929B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 5, 2009·46 cites·35 claims
- 5096US7525640B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 28, 2009·37 cites·23 claims
Showing the top 50 of 355 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →