Inventor · disambiguated record
Feng Chen
Also filed as: CHEN FENG · Chen feng-zhi
12 granted patents·2 pending applications·494 citations·filing 2006–2016
94Inventor score
Top patents by PatentIndex Score
14 records- 0197US9236297B2Low tempature tungsten film deposition for small critical dimension contacts and interconnectsNOVELLUS SYSTEMS INC·Filed 2013·Granted Jan 12, 2016·38 cites·17 claims
- 0297US8975184B2Methods of improving tungsten contact resistance in small critical dimension featuresCHEN FENG·Filed 2012·Granted Mar 10, 2015·38 cites·19 claims
- 0397US8623733B2Methods for depositing ultra thin low resistivity tungsten film for small critical dimension contacts and interconnectsCHEN FENG·Filed 2010·Granted Jan 7, 2014·36 cites·19 claims
- 0497US7772114B2Method for improving uniformity and adhesion of low resistivity tungsten filmNOVELLUS SYSTEMS INC·Filed 2007·Granted Aug 10, 2010·89 cites·15 claims
- 0596US9673146B2Low temperature tungsten film deposition for small critical dimension contacts and interconnectsNOVELLUS SYSTEMS INC·Filed 2016·Granted Jun 6, 2017·12 cites·15 claims
- 0696US8409987B2Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristicsCHANDRASHEKAR ANAND·Filed 2011·Granted Apr 2, 2013·34 cites·19 claims
- 0796US8058170B2Method for depositing thin tungsten film with low resistivity and robust micro-adhesion characteristicsCHANDRASHEKAR ANAND·Filed 2009·Granted Nov 15, 2011·83 cites·21 claims
- 0895US9034760B2Methods of forming tensile tungsten films and compressive tungsten filmsNOVELLUS SYSTEMS INC·Filed 2013·Granted May 19, 2015·25 cites·21 claims
- 0995US8551885B2Method for reducing tungsten roughness and improving reflectivityCHEN FENG·Filed 2008·Granted Oct 8, 2013·68 cites·21 claims
- 1095US8329576B2Method for improving uniformity and adhesion of low resistivity tungsten filmCHAN LANA HIULUI·Filed 2010·Granted Dec 11, 2012·33 cites·21 claims
- 1192US8853080B2Method for depositing tungsten film with low roughness and low resistivityGUAN YAN·Filed 2012·Granted Oct 7, 2014·38 cites·19 claims
- 1242US2017002463A1Showerhead and a thin-film deposition apparatus containing the sameEPISTAR CORP·Filed 2016·Application pending·0 cites
- 1340US7611969B2Generation and applications of negative dielectric constant materialsUNIV HOUSTON·Filed 2006·Granted Nov 3, 2009·0 cites·1 claims
- 1437US2012199887A1Methods of controlling tungsten film propertiesCHAN LANA·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →