Inventor · disambiguated record
George R. Koch
Also filed as: KOCH GEORGE R
9 granted patents·823 citations·filing 1974–2007
91Inventor score
Top patents by PatentIndex Score
9 records- 0197US4340462AAdjustable electrode plasma processing chamberLAM RES CORP·Filed 1981·Granted Jul 20, 1982·401 cites·12 claims
- 0295US4698775ASelf-contained mobile reprogrammable automation deviceFLEXIBLE MFG SYSTEMS·Filed 1985·Granted Oct 6, 1987·176 cites·8 claims
- 0392US6710354B1Scanning electron microscope architecture and related material handling systemKLA TENCOR CORP·Filed 2002·Granted Mar 23, 2004·49 cites·16 claims
- 0490US4433951AModular loadlockLAM RES CORP·Filed 1981·Granted Feb 28, 1984·98 cites·10 claims
- 0584US4354111AScreen lens array systemVEECO INSTR INC·Filed 1981·Granted Oct 12, 1982·26 cites·19 claims
- 0680US3958124AMethod and apparatus for sem specimen coating and transferETEC CORP·Filed 1974·Granted May 18, 1976·19 cites·6 claims
- 0778US4483654AWorkpiece transfer mechanismLAM RES CORP·Filed 1983·Granted Nov 20, 1984·48 cites·4 claims
- 0867US7288774B1Transverse magnetic field voltage isolatorKLA TENCOR TECH CORP·Filed 2004·Granted Oct 30, 2007·6 cites·9 claims
- 0952US7550744B1Chamberless substrate handlingKLA TENCOR CORP·Filed 2007·Granted Jun 23, 2009·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →