Inventor · disambiguated record
Guido De Boer
Also filed as: DE BOER GUIDO
38 granted patents·3 pending applications·89 citations·filing 2006–2019
96Inventor score
Files withMAPPER LITHOGRAPHY IP BV14DE BOER GUIDO12ASML NETHERLANDS BV3PEIJSTER JERRY3KUIPER VINCENT SYLVESTER2
Top patents by PatentIndex Score
41 records- 0190US9395635B2Position determination in a lithography system using a substrate having a partially reflective position markDE BOER GUIDO·Filed 2012·Granted Jul 19, 2016·7 cites·16 claims
- 0289US7709815B2Lithography system and projection methodMAPPER LITHOGRAPHY IP BV·Filed 2006·Granted May 4, 2010·19 cites·22 claims
- 0388US9665013B2Lithography system, method of clamping and wafer tableMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 30, 2017·4 cites·19 claims
- 0488US9575418B2Apparatus for transferring a substrate in a lithography systemMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Feb 21, 2017·4 cites·22 claims
- 0587US8570055B2Capacitive sensing systemDE BOER GUIDO·Filed 2010·Granted Oct 29, 2013·8 cites·20 claims
- 0685US8841920B2Capacitive sensing systemMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Sep 23, 2014·3 cites·29 claims
- 0784US10054863B2Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such methodMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Aug 21, 2018·3 cites·28 claims
- 0881US9069265B2Interferometer moduleDE BOER GUIDO·Filed 2012·Granted Jun 30, 2015·4 cites·25 claims
- 0981US8638109B2Capacitive sensing system with differential pairsDE BOER GUIDO·Filed 2010·Granted Jan 28, 2014·4 cites·24 claims
- 1080US9086912B2Network architecture and protocol for cluster of lithography machinesVAN KERVINCK MARCEL NICOLAAS JACOBUS·Filed 2012·Granted Jul 21, 2015·5 cites·21 claims
- 1179US9036962B2Arrangement of optical fibers, and a method of forming such arrangementDE BOER GUIDO·Filed 2012·Granted May 19, 2015·5 cites·13 claims
- 1278US9261800B2Alignment of an interferometer module for use in an exposure toolDE BOER GUIDO·Filed 2012·Granted Feb 16, 2016·2 cites·18 claims
- 1377US9457549B2Method for forming an optical fiber arrayMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Oct 4, 2016·2 cites·19 claims
- 1477US8242467B2Lithography system and projection methodJAGER REMCO·Filed 2010·Granted Aug 14, 2012·5 cites·20 claims
- 1571US9645511B2Lithography system, method of clamping and wafer tableMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted May 9, 2017·1 cites·14 claims
- 1671US9383662B2Lithography system for processing at least a part of a targetVERGEER NIELS·Filed 2012·Granted Jul 5, 2016·3 cites·31 claims
- 1771US8705010B2Lithography system, method of clamping and wafer tableDE BOER GUIDO·Filed 2008·Granted Apr 22, 2014·2 cites·30 claims
- 1871US8513959B2Integrated sensor systemDE BOER GUIDO·Filed 2010·Granted Aug 20, 2013·1 cites·22 claims
- 1969US8957395B2Charged particle beam lithography system and target positioning devicePEIJSTER JERRY·Filed 2014·Granted Feb 17, 2015·1 cites·11 claims
- 2068US9201315B2Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography systemDE BOER GUIDO·Filed 2012·Granted Dec 1, 2015·2 cites·29 claims
- 2165US9176397B2Apparatus for transferring a substrate in a lithography systemKUIPER VINCENT SYLVESTER·Filed 2012·Granted Nov 3, 2015·1 cites·21 claims
- 2263USRE48903EApparatus for transferring a substrate in a lithography systemASML NETHERLANDS BV·Filed 2019·Granted Jan 25, 2022·0 cites·22 claims
- 2361USRE48287EMethod for forming an optical fiber arrayASML NETHERLANDS BV·Filed 2018·Granted Oct 27, 2020·0 cites·19 claims
- 2461US9082584B2Charged particle beam lithography system and target positioning deviceMAPPER LITHOGRAPHY IP BV·Filed 2014·Granted Jul 14, 2015·0 cites·19 claims
- 2561US8796644B2Charged particle beam lithography system and target positioning devicePEIJSTER JERRY·Filed 2009·Granted Aug 5, 2014·0 cites·34 claims
- 2656US9507629B2Network architecture and protocol for cluster of lithography machinesMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Nov 29, 2016·0 cites·22 claims
- 2756US8690005B2Charged particle lithography apparatus and method of generating vacuum in a vacuum chamberBALTUSSEN SANDER·Filed 2010·Granted Apr 8, 2014·2 cites·51 claims
- 2856US2017277043A1Lithography system with differential interferometer moduleMAPPER LITHOGRAPHY IP BV·Filed 2017·Application pending·0 cites
- 2955US9678443B2Lithography system with differential interferometer moduleDE BOER GUIDO·Filed 2012·Granted Jun 13, 2017·0 cites·42 claims
- 3055US9362084B2Electro-optical element for multiple beam alignmentVAN DEN BROM ALRIK·Filed 2012·Granted Jun 7, 2016·1 cites·15 claims
- 3154US8779392B2Charged particle beam lithography system and target positioning devicePEIJSTER JERRY·Filed 2011·Granted Jul 15, 2014·0 cites·23 claims
- 3252US9690215B2Interferometer moduleMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Jun 27, 2017·0 cites·22 claims
- 3351US8936994B2Method of processing a substrate in a lithography systemKUIPER VINCENT SYLVESTER·Filed 2012·Granted Jan 20, 2015·0 cites·16 claims
- 3448US8895943B2Lithography system and method of processing substrates in such a lithography systemDE BOER GUIDO·Filed 2011·Granted Nov 25, 2014·0 cites·28 claims
- 3547US8905369B2Vibration isolation module and substrate processing systemPEIJSTER JERRY JOHANNES MARTINUS·Filed 2012·Granted Dec 9, 2014·0 cites·19 claims
- 3646USRE49488ELithography system, method of clamping and wafer tableASML NETHERLANDS BV·Filed 2019·Granted Apr 11, 2023·0 cites·24 claims
- 3746US9395636B2Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a waferDE BOER GUIDO·Filed 2012·Granted Jul 19, 2016·0 cites·12 claims
- 3835US9009631B2Lithography system and method for storing positional data of a targetLOOIJE ALEXIUS OTTO·Filed 2012·Granted Apr 14, 2015·0 cites·27 claims
- 3935US2011049393A1Lithography Machine and Substrate Handling ArrangementMAPPER LITHOGRAPHY IP BV·Filed 2010·Application pending·0 cites
- 4034US2011042579A1Charged particle lithography apparatus and method of generating vacuum in a vacuum chamberMAPPER LITHOGRAPHY IP BV·Filed 2010·Application pending·0 cites
- 4129US10144134B2Enclosure for a target processing machineMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Dec 4, 2018·0 cites·42 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →