Inventor · disambiguated record
Gwo-Chuan Tzu
Also filed as: TZU GWO · TZU GWO-CHUAN
23 granted patents·5 pending applications·1,643 citations·filing 1997–2018
96Inventor score
Top patents by PatentIndex Score
28 records- 0199US6878206B2Lid assembly for a processing system to facilitate sequential deposition techniquesAPPLIED MATERIALS INC·Filed 2001·Granted Apr 12, 2005·715 cites·23 claims
- 0298US6589352B1Self aligning non contact shadow ring process kitAPPLIED MATERIALS INC·Filed 1999·Granted Jul 8, 2003·566 cites·26 claims
- 0397US6866746B2Clamshell and small volume chamber with fixed substrate supportAPPLIED MATERIALS INC·Filed 2002·Granted Mar 15, 2005·130 cites·27 claims
- 0494US10280509B2Lid assembly for a processing system to facilitate sequential deposition techniquesAPPLIED MATERIALS INC·Filed 2017·Granted May 7, 2019·6 cites·18 claims
- 0592US8342119B2Self aligning non contact shadow ring process kitAPPLIED MATERIALS INC·Filed 2007·Granted Jan 1, 2013·11 cites·2 claims
- 0691US9490150B2Substrate support for substrate backside contamination controlTZU GWO-CHUAN·Filed 2012·Granted Nov 8, 2016·17 cites·18 claims
- 0789US9633889B2Substrate support with integrated vacuum and edge purge conduitsAPPLIED MATERIALS INC·Filed 2013·Granted Apr 25, 2017·10 cites·20 claims
- 0888US8618446B2Substrate support with substrate heater and symmetric RF returnCHANG YU·Filed 2011·Granted Dec 31, 2013·12 cites·22 claims
- 0988US7905959B2Lid assembly for a processing system to facilitate sequential deposition techniquesAPPLIED MATERIALS INC·Filed 2004·Granted Mar 15, 2011·27 cites·20 claims
- 1085US10793951B2Apparatus to improve substrate temperature uniformityAPPLIED MATERIALS INC·Filed 2018·Granted Oct 6, 2020·3 cites·8 claims
- 1185US8920564B2Methods and apparatus for thermal based substrate processing with variable temperature capabilityTZU GWO-CHUAN·Filed 2011·Granted Dec 30, 2014·4 cites·12 claims
- 1284US6050446APivoting lid assembly for a chamberAPPLIED MATERIALS INC·Filed 1997·Granted Apr 18, 2000·69 cites·16 claims
- 1383US6220091B1Liquid level pressure sensor and methodAPPLIED MATERIALS INC·Filed 1997·Granted Apr 24, 2001·53 cites·20 claims
- 1481US9957615B2Apparatus to improve substrate temperature uniformityAPPLIED MATERIALS INC·Filed 2014·Granted May 1, 2018·4 cites·5 claims
- 1576US9543186B2Substrate support with controlled sealing gapAPPLIED MATERIALS INC·Filed 2013·Granted Jan 10, 2017·3 cites·19 claims
- 1675US10857655B2Substrate support plate with improved lift pin sealingAPPLIED MATERIALS INC·Filed 2013·Granted Dec 8, 2020·3 cites·19 claims
- 1775US9783889B2Apparatus for variable substrate temperature controlTZU GWO-CHUAN·Filed 2012·Granted Oct 10, 2017·1 cites·20 claims
- 1871US9587310B2Lid assembly for a processing system to facilitate sequential deposition techniquesAPPLIED MATERIALS INC·Filed 2014·Granted Mar 7, 2017·1 cites·20 claims
- 1970US8821637B2Temperature controlled lid assembly for tungsten nitride depositionGELATOS AVGERINOS V·Filed 2008·Granted Sep 2, 2014·3 cites·14 claims
- 2069US9916994B2Substrate support with multi-piece sealing surfaceAPPLIED MATERIALS INC·Filed 2013·Granted Mar 13, 2018·2 cites·17 claims
- 2151US2011114020A1Lid assembly for a processing system to facilitate sequential deposition techniquesTZU GWO-CHUAN·Filed 2011·Application pending·0 cites
- 2248US2005139160A1Clamshell and small volume chamber with fixed substrate supportAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 2346US9478447B2Substrate support with wire mesh plasma containmentAPPLIED MATERIALS INC·Filed 2012·Granted Oct 25, 2016·0 cites·16 claims
- 2445US11955362B2Substrate support for reduced damage substrate backsideAPPLIED MATERIALS INC·Filed 2017·Granted Apr 9, 2024·0 cites·19 claims
- 2545US6500263B2Semiconductor substrate processing chamber having interchangeable lids actuating plural gas interlock levelsAPPLIED MATERIALS INC·Filed 2001·Granted Dec 31, 2002·3 cites·29 claims
- 2645US2004003780A1Self aligning non contact shadow ring process kitAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 2741US2014251214A1Heated substrate support with flatness controlAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 2841US2006130971A1Apparatus for generating plasma by RF powerAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →