Inventor · disambiguated record
Hans Butler
Also filed as: BUTLER HANS
152 granted patents·16 pending applications·1,398 citations·filing 1999–2024
99Inventor score
Top patents by PatentIndex Score
168 records- 0199US9740107B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·10 cites·20 claims
- 0299US9366972B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 14, 2016·14 cites·20 claims
- 0399US8482845B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jul 9, 2013·32 cites·16 claims
- 0499US7593092B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 22, 2009·60 cites·15 claims
- 0599US7593093B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 22, 2009·67 cites·9 claims
- 0699US7213963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 8, 2007·196 cites·28 claims
- 0799US7199858B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 3, 2007·409 cites·29 claims
- 0896US8154708B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2006·Granted Apr 10, 2012·23 cites·20 claims
- 0995US8472002B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jun 25, 2013·7 cites·28 claims
- 1094US10466599B2Lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Nov 5, 2019·4 cites·20 claims
- 1194US8705004B2Lithographic method and apparatusBUTLER HANS·Filed 2010·Granted Apr 22, 2014·20 cites·10 claims
- 1294US8319940B2Position measurement system and lithographic apparatusBUTLER HANS·Filed 2008·Granted Nov 27, 2012·18 cites·22 claims
- 1393US11262661B2Metrology apparatusASML NETHERLANDS BV·Filed 2019·Granted Mar 1, 2022·4 cites·18 claims
- 1493US6741331B2Lithographic apparatus with improved exposure area focus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted May 25, 2004·72 cites·20 claims
- 1592US7348752B1Stage apparatus and lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Mar 25, 2008·14 cites·18 claims
- 1691US7760324B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 20, 2010·19 cites·15 claims
- 1791US7468782B2Lithographic apparatus, position quantity controller and control method with feedforward signalASML NETHERLANDS BV·Filed 2005·Granted Dec 23, 2008·14 cites·18 claims
- 1889US11940739B2Metrology apparatusASML NETHERLANDS BV·Filed 2021·Granted Mar 26, 2024·1 cites·19 claims
- 1988US8730451B2Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping methodBUTLER HANS·Filed 2011·Granted May 20, 2014·6 cites·17 claims
- 2088US8558989B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Oct 15, 2013·3 cites·33 claims
- 2188US8164737B2Lithographic apparatus having an active damping subassemblyBUTLER HANS·Filed 2008·Granted Apr 24, 2012·11 cites·17 claims
- 2288US7382439B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 3, 2008·10 cites·34 claims
- 2388US7352149B2Method for controlling the position of a movable object, a positioning system, and a lithographic apparatusASML NETHERLANDS BV·Filed 2006·Granted Apr 1, 2008·12 cites·18 claims
- 2488US7113256B2Lithographic apparatus and device manufacturing method with feed-forward focus controlASML NETHERLANDS BV·Filed 2004·Granted Sep 26, 2006·35 cites·19 claims
- 2587US10503084B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 10, 2019·2 cites·20 claims
- 2687US10209634B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 19, 2019·3 cites·20 claims
- 2787US9304404B2Arrangement for actuating an element in a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2013·Granted Apr 5, 2016·5 cites·53 claims
- 2887US9229339B2Positioning system, a lithographic apparatus and a method for positional controlBUTLER HANS·Filed 2011·Granted Jan 5, 2016·4 cites·9 claims
- 2986US11029612B2Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffnessASML NETHERLANDS BV·Filed 2018·Granted Jun 8, 2021·5 cites·18 claims
- 3086US8044373B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Oct 25, 2011·8 cites·19 claims
- 3186US7538273B2Cable connection to decrease the passing on of vibrations from a first object to a second objectASML NETHERLANDS BV·Filed 2006·Granted May 26, 2009·8 cites·10 claims
- 3285US11914308B2Lithographic apparatusASML NETHERLANDS BV·Filed 2023·Granted Feb 27, 2024·0 cites·20 claims
- 3384US11880144B2Object table, a stage apparatus and a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Jan 23, 2024·2 cites·20 claims
- 3484US11150560B2Projection system and mirror and radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Oct 19, 2021·1 cites·7 claims
- 3584US8554510B2Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program productSTAALS FRANK·Filed 2010·Granted Oct 8, 2013·5 cites·14 claims
- 3683US10976675B2Lithographic apparatusASML NETHERLANDS BV·Filed 2020·Granted Apr 13, 2021·1 cites·21 claims
- 3783US7330238B2Lithographic apparatus, immersion projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Feb 12, 2008·6 cites·19 claims
- 3882US9715171B2Imprint lithographic apparatus and imprint lithographic methodBUTLER HANS·Filed 2010·Granted Jul 25, 2017·4 cites·11 claims
- 3982US7649613B2Lithographic apparatus, method of controlling a component of a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 19, 2010·6 cites·18 claims
- 4081US10732511B2Projection system and mirror and radiation source for a lithographic apparatusASML NETHERLANDS BV·Filed 2019·Granted Aug 4, 2020·1 cites·19 claims
- 4181US9696630B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jul 4, 2017·2 cites·20 claims
- 4281US8144310B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2009·Granted Mar 27, 2012·5 cites·17 claims
- 4381US2025028259A1Imprint Apparatus with Movable StagesASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 4480US9110387B2Lithographic apparatus comprising a substrate table and a surface substrate actuatorBUTLER HANS·Filed 2012·Granted Aug 18, 2015·3 cites·15 claims
- 4580US8553199B2Lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2008·Granted Oct 8, 2013·6 cites·22 claims
- 4680US2025123574A1Actuator assemblies comprising piezo actuators or electrostrictive actuatorsASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 4779US8243258B2Lithographic apparatus having acoustic resonatorBUTLER HANS·Filed 2008·Granted Aug 14, 2012·5 cites·25 claims
- 4879US7936443B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted May 3, 2011·5 cites·9 claims
- 4979US7630059B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Dec 8, 2009·5 cites·16 claims
- 5078US9134632B2Lithographic apparatus and device manufacturing methodVAN DER WIJST MARC WILHELMUS MARIA·Filed 2011·Granted Sep 15, 2015·3 cites·19 claims
Showing the top 50 of 168 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Hans Butler files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →