Inventor · disambiguated record
Hannu Huotari
Also filed as: HUOTARI HANNU · HUOTARI HANNU A
46 granted patents·5 pending applications·3,861 citations·filing 2003–2024
98Inventor score
Top patents by PatentIndex Score
51 records- 0199US11389824B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2020·Granted Jul 19, 2022·11 cites·19 claims
- 0299US10695794B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2015·Granted Jun 30, 2020·53 cites·27 claims
- 0399US10600637B2Formation of SiOC thin filmsASM IP HOLDING BV·Filed 2017·Granted Mar 24, 2020·353 cites·19 claims
- 0499US10443123B2Dual selective depositionASM IP HOLDING BV·Filed 2018·Granted Oct 15, 2019·46 cites·21 claims
- 0599US10428419B2Combination CVD/ALD method, source and pulse profile modificationASM IP HOLDING BV·Filed 2017·Granted Oct 1, 2019·391 cites·20 claims
- 0699US10047435B2Dual selective depositionASM IP HOLDING BV·Filed 2015·Granted Aug 14, 2018·463 cites·52 claims
- 0799US9895715B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2015·Granted Feb 20, 2018·525 cites·27 claims
- 0899US7923382B2Method for forming roughened surfaceASM INT·Filed 2009·Granted Apr 12, 2011·347 cites·19 claims
- 0999US7563715B2Method of producing thin filmsASM INT·Filed 2005·Granted Jul 21, 2009·513 cites·20 claims
- 1098US11213853B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2019·Granted Jan 4, 2022·9 cites·20 claims
- 1198US10814349B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2019·Granted Oct 27, 2020·19 cites·22 claims
- 1298US10456808B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2018·Granted Oct 29, 2019·12 cites·20 claims
- 1398US10343186B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2016·Granted Jul 9, 2019·53 cites·22 claims
- 1498US6858524B2Method of depositing barrier layer for metal gatesASM INTERNATIONAL NV·Filed 2003·Granted Feb 22, 2005·627 cites·19 claims
- 1597US7045406B2Method of forming an electrode with adjusted work functionASM INT·Filed 2003·Granted May 16, 2006·155 cites·12 claims
- 1696US11654454B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2022·Granted May 23, 2023·1 cites·18 claims
- 1796US7666773B2Selective deposition of noble metal thin filmsASM INT·Filed 2006·Granted Feb 23, 2010·48 cites·18 claims
- 1896US7476618B2Selective formation of metal layers in an integrated circuitASM JAPAN·Filed 2005·Granted Jan 13, 2009·126 cites·45 claims
- 1994US8927403B2Selective deposition of noble metal thin filmsHUOTARI HANNU·Filed 2011·Granted Jan 6, 2015·26 cites·23 claims
- 2093US7491634B2Methods for forming roughened surfaces and applications thereofASM INT·Filed 2006·Granted Feb 17, 2009·17 cites·38 claims
- 2192US9790594B2Combination CVD/ALD method, source and pulse profile modificationASM IP HOLDING BV·Filed 2014·Granted Oct 17, 2017·3 cites·11 claims
- 2291US11217444B2Method for forming an ultraviolet radiation responsive metal oxide-containing filmASM IP HOLDING BV·Filed 2018·Granted Jan 4, 2022·2 cites·26 claims
- 2390US11047040B2Dual selective depositionASM IP HOLDING BV·Filed 2019·Granted Jun 29, 2021·3 cites·18 claims
- 2490US9941425B2Photoactive devices and materialsASM IP HOLDING BV·Filed 2015·Granted Apr 10, 2018·2 cites·19 claims
- 2589US11525184B2Dual selective depositionASM IP HOLDING BV·Filed 2021·Granted Dec 13, 2022·1 cites·22 claims
- 2687US11446699B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2020·Granted Sep 20, 2022·1 cites·29 claims
- 2787US9469899B2Selective deposition of noble metal thin filmsASM INT NV·Filed 2014·Granted Oct 18, 2016·6 cites·17 claims
- 2887US7985669B2Selective deposition of noble metal thin filmsASM INT·Filed 2009·Granted Jul 26, 2011·10 cites·22 claims
- 2985US2025025911A1Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3084US12241156B2Combination CVD/ALD method, source and pulse profile modificationASM IP HOLDING BV·Filed 2022·Granted Mar 4, 2025·0 cites·9 claims
- 3184US12134108B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2023·Granted Nov 5, 2024·0 cites·22 claims
- 3283US11562900B2Formation of SiOC thin filmsASM IP HOLDING BV·Filed 2020·Granted Jan 24, 2023·1 cites·19 claims
- 3382US11975357B2Selective deposition of metals, metal oxides, and dielectricsASM IP HOLDING BV·Filed 2021·Granted May 7, 2024·0 cites·19 claims
- 3481US12272546B2Formation of SiOC thin filmsASM IP HOLDING BV·Filed 2022·Granted Apr 8, 2025·0 cites·20 claims
- 3581US11365478B2Combination CVD/ALD method, source and pulse profile modificationASM IP HOLDING BV·Filed 2019·Granted Jun 21, 2022·0 cites·10 claims
- 3680US7122414B2Method to fabricate dual metal CMOS devicesASM INTERNATIONAL INC·Filed 2003·Granted Oct 17, 2006·32 cites·28 claims
- 3779US12138654B2Vapor phase deposition of organic filmsASM IP HOLDING BV·Filed 2022·Granted Nov 12, 2024·0 cites·19 claims
- 3878US11823976B2Fluorine-containing conductive filmsASM IP HOLDING BV·Filed 2022·Granted Nov 21, 2023·0 cites·20 claims
- 3974US12444599B2Method for forming an ultraviolet radiation responsive metal oxide-containing filmASM IP HOLDING BV·Filed 2021·Granted Oct 14, 2025·0 cites·19 claims
- 4074US8592294B2High temperature atomic layer deposition of dielectric oxidesHAUKKA SUVI·Filed 2010·Granted Nov 26, 2013·3 cites·17 claims
- 4173US11362222B2Photoactive devices and materialsASM IP HOLDING BV·Filed 2020·Granted Jun 14, 2022·0 cites·20 claims
- 4272US10643925B2Fluorine-containing conductive filmsASM IP HOLDING BV·Filed 2014·Granted May 5, 2020·0 cites·18 claims
- 4369US11450591B2Fluorine-containing conductive filmsASM IP HOLDING BV·Filed 2020·Granted Sep 20, 2022·0 cites·18 claims
- 4469US10861986B2Photoactive devices and materialsASM IP HOLDING BV·Filed 2018·Granted Dec 8, 2020·0 cites·19 claims
- 4567US12463094B2Multiple-layer method and system for forming material within a gapASM IP HOLDING BV·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
- 4667US8252703B2Methods for forming roughened surfaces and applications thereofHUOTARI HANNU·Filed 2011·Granted Aug 28, 2012·1 cites·22 claims
- 4767US2024141486A1Apparatus for providing a gas mixture to a reaction chamber and method of using sameASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4864US8545936B2Methods for forming carbon nanotubesHUOTARI HANNU A·Filed 2008·Granted Oct 1, 2013·1 cites·35 claims
- 4957US2021371978A1System and methods for direct liquid injection of vanadium precursorsASM IP HOLDING BV·Filed 2021·Application pending·0 cites
- 5054US2023091094A1Method of forming a photoresist absorber layer and structure including sameASM IP HOLDING BV·Filed 2022·Application pending·0 cites
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →