Inventor · disambiguated record
Harmen Klaas Van Der Schoot
Also filed as: VAN DER SCHOOT HARMEN K · VAN DER SCHOOT HARMEN KLAAS
43 granted patents·3 pending applications·2,826 citations·filing 1997–2018
98Inventor score
Files withASML NETHERLANDS BV36ASM LITHOGRAPHY BV3BUTLER HANS1DE JAGER PIETER WILLEM HERMAN1JACOBS HERNES1
Top patents by PatentIndex Score
46 records- 0198US7483120B2Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·121 cites·23 claims
- 0298US6262796B1Positioning device having two object holdersASM LITHOGRAPHY BV·Filed 1998·Granted Jul 17, 2001·634 cites·11 claims
- 0396US5969441ATwo-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning deviceASM LITHOGRAPHY BV·Filed 1997·Granted Oct 19, 1999·1.6k cites·14 claims
- 0494US9482960B2Pellicle for reticle and multilayer mirrorASML NETHERLANDS BV·Filed 2014·Granted Nov 1, 2016·14 cites·13 claims
- 0592US9395630B2Lithographic apparatus and methodYAKUNIN ANDREI MIKHAILOVICH·Filed 2011·Granted Jul 19, 2016·13 cites·16 claims
- 0692US7310132B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Dec 18, 2007·25 cites·38 claims
- 0792US6337484B1Positioning device and lithographic projection apparatus comprising such a deviceASM LITHOGRAPHY BV·Filed 1999·Granted Jan 8, 2002·91 cites·13 claims
- 0891US7760324B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 20, 2010·19 cites·15 claims
- 0990US9989844B2Pellicle for reticle and multilayer mirrorASML NETHERLANDS BV·Filed 2016·Granted Jun 5, 2018·5 cites·13 claims
- 1090US7292317B2Lithographic apparatus and device manufacturing method utilizing substrate stage compensatingASML NETHERLANDS BV·Filed 2005·Granted Nov 6, 2007·13 cites·11 claims
- 1189US10747127B2Lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 18, 2020·5 cites·26 claims
- 1289USRE40043EPositioning device having two object holdersASML NETHERLANDS BV·Filed 1998·Granted Feb 5, 2008·96 cites·15 claims
- 1387US10481510B2Graphene spectral purity filterASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·3 cites·27 claims
- 1485US7595496B2Optimized correction of wafer thermal deformations in a lithographic processASML NETHERLANDS BV·Filed 2007·Granted Sep 29, 2009·7 cites·15 claims
- 1584US7538857B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerASML NETHERLANDS BV·Filed 2005·Granted May 26, 2009·7 cites·16 claims
- 1682US7250237B2Optimized correction of wafer thermal deformations in a lithographic processASML NETHERLANDS BV·Filed 2003·Granted Jul 31, 2007·19 cites·24 claims
- 1780US7359032B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 15, 2008·17 cites·18 claims
- 1879US7667822B2Lithographic apparatus and stage apparatusASML NETHERLANDS BV·Filed 2006·Granted Feb 23, 2010·6 cites·20 claims
- 1972US7440081B2Lithographic apparatus, device manufacturing method, and substrate tableASML NETHERLANDS BV·Filed 2004·Granted Oct 21, 2008·11 cites·46 claims
- 2072US7012264B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 14, 2006·9 cites·22 claims
- 2172US6943464B2Lithographic apparatus and motor for use in the apparatusASML NETHERLANDS BV·Filed 2003·Granted Sep 13, 2005·10 cites·20 claims
- 2271US7256866B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 14, 2007·11 cites·18 claims
- 2370US7656506B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerASML NETHERLANDS BV·Filed 2005·Granted Feb 2, 2010·2 cites·16 claims
- 2469US7245047B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 17, 2007·14 cites·21 claims
- 2569US6879377B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted Apr 12, 2005·16 cites·11 claims
- 2669US6717296B2Lithographic apparatus and motor for use in the apparatusASML NETHERLANDS BV·Filed 2002·Granted Apr 6, 2004·23 cites·21 claims
- 2768US7576835B2Substrate handler, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 18, 2009·2 cites·19 claims
- 2867US7408617B2Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration methodASML NETHERLANDS BV·Filed 2005·Granted Aug 5, 2008·2 cites·28 claims
- 2961US7064808B1Substrate carrier and method for making a substrate carrierASML NETHERLANDS BV·Filed 2004·Granted Jun 20, 2006·10 cites·24 claims
- 3060US9494869B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Nov 15, 2016·1 cites·20 claims
- 3160US7352438B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Apr 1, 2008·1 cites·19 claims
- 3257US8411252B2Lithographic apparatus and device manufacturing method utilizing a substrate handlerJACOBS HERNES·Filed 2009·Granted Apr 2, 2013·0 cites·5 claims
- 3357US2010165319A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 3456US10007197B2Sensor system, substrate handling system and lithographic apparatusASML NETHERLANDS BV·Filed 2015·Granted Jun 26, 2018·1 cites·20 claims
- 3555US6815699B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2002·Granted Nov 9, 2004·5 cites·18 claims
- 3654US7679720B2Apparatus configured to position a workpieceASML NETHERLANDS BV·Filed 2008·Granted Mar 16, 2010·0 cites·15 claims
- 3751US7230254B2Movable carriage for a lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Jun 12, 2007·0 cites·19 claims
- 3851US2014160452A1Lithographic apparatus, programmable patterning device and lithographic methodDE JAGER PIETER WILLEM HERMAN·Filed 2012·Application pending·0 cites
- 3950US8174680B2Substrate handler, lithographic apparatus and device manufacturing methodVAN DER SCHOOT HARMEN KLAAS·Filed 2009·Granted May 8, 2012·0 cites·21 claims
- 4050US7492440B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Feb 17, 2009·2 cites·22 claims
- 4146US7088428B2Lithographic actuator mechanism, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 8, 2006·2 cites·21 claims
- 4243US8264670B2Lithographic apparatus and device manufacturing method for clamping a patterning deviceLOOPSTRA ERIK ROELOF·Filed 2006·Granted Sep 11, 2012·0 cites·31 claims
- 4342US8781775B2Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatusBUTLER HANS·Filed 2011·Granted Jul 15, 2014·0 cites·16 claims
- 4441US7256867B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 14, 2007·0 cites·56 claims
- 4541US2014192337A1Lithographic apparatus, method of setting up a lithographic apparatus and device manufacturing methodJAN BLEEKER ARNO·Filed 2012·Application pending·0 cites
- 4634US6970230B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Nov 29, 2005·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →