Inventor · disambiguated record
Henricus Jozef Castelijns
Also filed as: CASTELIJNS HENRICUS JOZEF
10 granted patents·3 pending applications·15 citations·filing 2009–2017
83Inventor score
Files withASML NETHERLANDS BV7CORTIE ROGIER HENDRIKUS MAGDALENA1DZIOMKINA NINA VLADIMIROVNA1GOSEN JEROEN GERARD1LAFARRE RAYMOND WILHELMUS LOUIS1
Top patents by PatentIndex Score
13 records- 0190US9983489B2Method for compensating for an exposure error, a device manufacturing method, a substrate table, a lithographic apparatus, a control system, a method for measuring reflectivity and a method for measuring a dose of EUV radiationASML NETHERLANDS BV·Filed 2015·Granted May 29, 2018·5 cites·21 claims
- 0285US9588437B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 7, 2017·2 cites·20 claims
- 0383US9235138B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodCORTIE ROGIER HENDRIKUS MAGDALENA·Filed 2012·Granted Jan 12, 2016·3 cites·16 claims
- 0471US8755026B2Lithographic apparatus and a device manufacturing methodGOSEN JEROEN GERARD·Filed 2010·Granted Jun 17, 2014·2 cites·21 claims
- 0565US9753383B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·2 cites·14 claims
- 0662US10394141B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 27, 2019·1 cites·20 claims
- 0760US9971255B2Fluid handling structure, a lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted May 15, 2018·0 cites·20 claims
- 0853US8891053B2Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing methodDZIOMKINA NINA VLADIMIROVNA·Filed 2009·Granted Nov 18, 2014·0 cites·16 claims
- 0945US8553206B2Lithographic apparatus, coverplate and device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2010·Granted Oct 8, 2013·0 cites·17 claims
- 1045US2009296068A1Substrate table, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1140US2011069289A1Lithographic apparatus, coverplate and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 1237US2014014138A1Gas-liquid phase transition method and apparatus for cleaning of surfaces in semiconductor manufacturingSPIEGELMAN JEFFREY J·Filed 2011·Application pending·0 cites
- 1333US8405819B2Immersion lithographic apparatus and device manufacturing methodVAN BOKHOVEN LAURENTIUS JOHANNES ADRIANUS·Filed 2010·Granted Mar 26, 2013·0 cites·22 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →