Inventor · disambiguated record
Herbert Terhorst
Also filed as: TERHORST HERBERT
30 granted patents·21 pending applications·1,806 citations·filing 2000–2025
97Inventor score
Top patents by PatentIndex Score
51 records- 0198US9574268B1Pulsed valve manifold for atomic layer depositionDUNN TODD·Filed 2011·Granted Feb 21, 2017·510 cites·40 claims
- 0297US10370761B2Pulsed valve manifold for atomic layer depositionASM INC·Filed 2017·Granted Aug 6, 2019·9 cites·20 claims
- 0397US9394608B2Semiconductor processing reactor and components thereofSHERO ERIC·Filed 2010·Granted Jul 19, 2016·506 cites·15 claims
- 0497US6759325B2Sealing porous structuresASM MICROCHEMISTRY OY·Filed 2002·Granted Jul 6, 2004·169 cites·29 claims
- 0596US6902395B2Multilevel pedestal for furnaceASM INT·Filed 2003·Granted Jun 7, 2005·368 cites·44 claims
- 0695US11404302B2Substrate susceptor using edge purgingASM IP HOLDING BV·Filed 2020·Granted Aug 2, 2022·4 cites·17 claims
- 0795US7410355B2Method for the heat treatment of substratesASM INT·Filed 2006·Granted Aug 12, 2008·60 cites·27 claims
- 0894US12077854B2Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gasASM IP HOLDING BV·Filed 2022·Granted Sep 3, 2024·1 cites·19 claims
- 0994US10844486B2Semiconductor processing reactor and components thereofASM IP HOLDING BV·Filed 2019·Granted Nov 24, 2020·8 cites·15 claims
- 1094US10468291B2Reaction system for growing a thin filmASM INC·Filed 2016·Granted Nov 5, 2019·11 cites·8 claims
- 1193US10844484B2Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methodsASM IP HOLDING BV·Filed 2018·Granted Nov 24, 2020·10 cites·11 claims
- 1293US8211230B2Reaction system for growing a thin filmVERGHESE MOHITH·Filed 2006·Granted Jul 3, 2012·31 cites·12 claims
- 1392US10480072B2Semiconductor processing reactor and components thereofASM IP HOLDING BV·Filed 2016·Granted Nov 19, 2019·7 cites·12 claims
- 1492US2025361611A1Manifolds for uniform vapor depositionASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 1591US9359672B2Reaction system for growing a thin filmVERGHESE MOHITH·Filed 2012·Granted Jun 7, 2016·14 cites·9 claims
- 1690US12406871B2Substrate susceptor using edge purgingASM IP HOLDING BV·Filed 2022·Granted Sep 2, 2025·1 cites·11 claims
- 1790US7976898B2Atomic layer deposition apparatusASM GENITECH KOREA LTD·Filed 2007·Granted Jul 12, 2011·16 cites·9 claims
- 1885US10683571B2Gas supply manifold and method of supplying gases to chamber using sameASM IP HOLDING BV·Filed 2014·Granted Jun 16, 2020·8 cites·20 claims
- 1985US6770851B2Method and apparatus for the treatment of substratesASM INT·Filed 2002·Granted Aug 3, 2004·37 cites·22 claims
- 2084US9238867B2Apparatus and method for high-throughput atomic layer depositionGRANNEMAN ERNST H A·Filed 2009·Granted Jan 19, 2016·11 cites·16 claims
- 2184US2024392435A1Chemical vapor deposition furnace with a cleaning gas system to provide a cleaning gasASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2283US2024209501A1Reactant vaporizer and related systems and methodsASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2382US8215264B2Atomic layer deposition apparatusHONG KYUNG IL·Filed 2011·Granted Jul 10, 2012·7 cites·11 claims
- 2480US12416081B2Manifolds for uniform vapor depositionASM IP HOLDING BV·Filed 2022·Granted Sep 16, 2025·0 cites·20 claims
- 2578US2025389485A1Apparatus for processing a plurality of substrates provided with an extractor chamberASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 2677US7128570B2Method and apparatus for purging seals in a thermal reactorASM INT·Filed 2005·Granted Oct 31, 2006·6 cites·29 claims
- 2775US10605530B2Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnaceASM IP HOLDING BV·Filed 2017·Granted Mar 31, 2020·2 cites·29 claims
- 2874US2024384411A1Substrate processing apparatus with an injectorASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 2970US2025327182A1Diffuser for uniform gas delivery in cross-flow reactorsASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 3070US2025092520A1Semiconductor manufacturing apparatus and processASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3169US12366410B2Apparatus for processing a plurality of substrates provided with an extractor chamberASM IP HOLDING BV·Filed 2022·Granted Jul 22, 2025·0 cites·17 claims
- 3268US12467140B2Showerhead assembly and componentsASM IP HOLDING BV·Filed 2021·Granted Nov 11, 2025·0 cites·20 claims
- 3368US9431238B2Reactive curing process for semiconductor substratesASM IP HOLDING BV·Filed 2015·Granted Aug 30, 2016·1 cites·31 claims
- 3466US2024360554A1Solid source chemical vaporizerASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3564US12195852B2Substrate processing apparatus with an injectorASM IP HOLDING BV·Filed 2021·Granted Jan 14, 2025·0 cites·13 claims
- 3664US2024254629A1Semiconductor processing device with edge purgingASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3763US6551404B2Apparatus for treating a waferASM INT·Filed 2000·Granted Apr 22, 2003·9 cites·24 claims
- 3861US2025174475A1Support sleeve for supporting a process vessel and associated semiconductor processing furnacesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 3961US2024420971A1Verticle furnace for processing a plurality of substrates and method of processingASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4060US2024175130A1High-throughput silicon carbide reactorASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4159US2023002889A1Chemical vapor depospition furnace for depositing filmsASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4258US2025069911A1Apparatus constructed and arranged to process a plurality of substratesASM IP HOLDING BV·Filed 2024·Application pending·0 cites
- 4356US11971217B2Batch furnace assembly and method of operating a batch furnace assemblyASM IP HOLDING BV·Filed 2022·Granted Apr 30, 2024·0 cites·13 claims
- 4456US2023088313A1System and apparatus for gas distributionASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4556US2024145262A1Gas injector assemblyASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4654US2024068097A1Substrate processing apparatusASM IP HOLDING BV·Filed 2023·Application pending·0 cites
- 4752US2023207377A1Semiconductor processing device with wafer edge purgingASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 4851US11926894B2Reactant vaporizer and related systems and methodsASM IP HOLDING BV·Filed 2017·Granted Mar 12, 2024·0 cites·18 claims
- 4949US2025293059A1Vessel for containing precursorASM IP HOLDING BV·Filed 2025·Application pending·0 cites
- 5049US2010116207A1Reaction chamberASM INC·Filed 2009·Application pending·0 cites
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →