Inventor · disambiguated record
Hedong Yang
Also filed as: YANG HEDONG
13 granted patents·2 pending applications·450 citations·filing 1994–2022
92Inventor score
Top patents by PatentIndex Score
15 records- 0193US10395362B2Contour based defect detectionKLA TENCOR CORP·Filed 2018·Granted Aug 27, 2019·24 cites·27 claims
- 0289US8502146B2Methods and apparatus for classification of defects using surface height attributesCHEN CHIEN-HUEI·Filed 2011·Granted Aug 6, 2013·13 cites·20 claims
- 0388US10607119B2Unified neural network for defect detection and classificationKLA TENCOR CORP·Filed 2017·Granted Mar 31, 2020·8 cites·26 claims
- 0485US7423269B1Automated feature analysis with off-axis tiltingKLA TENCOR TECH CORP·Filed 2006·Granted Sep 9, 2008·12 cites·13 claims
- 0585US5509083AMethod and apparatus for confirming the identity of an individual presenting an identification cardABTAHI NOORAL S·Filed 1994·Granted Apr 16, 1996·290 cites·20 claims
- 0684US9483819B2Contour-based array inspection of patterned defectsKLA TENCOR CORP·Filed 2013·Granted Nov 1, 2016·6 cites·18 claims
- 0779US8669523B2Contour-based defect detection using an inspection apparatusCHEN CHIEN-HUEI·Filed 2012·Granted Mar 11, 2014·5 cites·10 claims
- 0876US5606434AAchromatic optical system including diffractive optical elementUNIV NORTH CAROLINA·Filed 1994·Granted Feb 25, 1997·39 cites·5 claims
- 0971US7173243B1Non-feature-dependent focusingKLA TENCOR TECH CORP·Filed 2004·Granted Feb 6, 2007·9 cites·6 claims
- 1071US5774239AAchromatic optical system including diffractive optical element, and method of forming sameUNIV NORTH CAROLINA·Filed 1996·Granted Jun 30, 1998·37 cites·7 claims
- 1167US6995369B1Scanning electron beam apparatus and methods of processing data from sameKLA TENCOR TECH CORP·Filed 2004·Granted Feb 7, 2006·7 cites·18 claims
- 1259US12372486B2Noise diagnostics for an electron beam inspection system with swathingKLA CORP·Filed 2022·Granted Jul 29, 2025·0 cites·20 claims
- 1351US2023003615A1System and method of fiber location mapping in a multi-beam systemKLA CORP·Filed 2022·Application pending·0 cites
- 1440US10790114B2Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltagesKLA TENCOR CORP·Filed 2017·Granted Sep 29, 2020·0 cites·20 claims
- 1538US2012223227A1Apparatus and methods for real-time three-dimensional sem imaging and viewing of semiconductor wafersCHEN CHIEN-HUEI·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →