Inventor · disambiguated record
Hiroshi Sone
Also filed as: SONE HIROSHI
20 granted patents·10 pending applications·272 citations·filing 1993–2025
93Inventor score
Files withTOKYO ELECTRON LTD20ASAHI OPTICAL CO LTD5CANON ANELVA CORP2HIGASHISAKA RYUJI1IKEDA TADASHI1
Top patents by PatentIndex Score
30 records- 0185US10309005B2Deposition device and deposition methodTOKYO ELECTRON LTD·Filed 2014·Granted Jun 4, 2019·3 cites·19 claims
- 0282US11193200B2PVD processing method and PVD processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Dec 7, 2021·1 cites·8 claims
- 0378US10381258B2Apparatus of processing workpiece in depressurized spaceTOKYO ELECTRON LTD·Filed 2016·Granted Aug 13, 2019·3 cites·13 claims
- 0477US7770714B2Transfer apparatusCANON ANELVA CORP·Filed 2008·Granted Aug 10, 2010·6 cites·16 claims
- 0572US5445157AThermographic endoscopeASAHI OPTICAL CO LTD·Filed 1993·Granted Aug 29, 1995·170 cites·11 claims
- 0671US8920107B2Substrate support apparatus and vacuum processing apparatusIKEDA TADASHI·Filed 2011·Granted Dec 30, 2014·5 cites·6 claims
- 0768US8202034B2Vacuum processing apparatus and substrate transfer methodSONE HIROSHI·Filed 2010·Granted Jun 19, 2012·4 cites·6 claims
- 0868US5926965ATilt sensor and top cover plate thereofASAHI OPTICAL CO LTD·Filed 1997·Granted Jul 27, 1999·45 cites·20 claims
- 0967US11282733B2Stage mechanism, processing apparatus, and method of operating the stage mechanismTOKYO ELECTRON LTD·Filed 2019·Granted Mar 22, 2022·1 cites·11 claims
- 1065US2025125132A1Substrate Processing ApparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1163US10254693B2Fixing unit of plate-shaped member, PVD processing apparatus and fixing method of plate-shaped memberTOKYO ELECTRON LTD·Filed 2015·Granted Apr 9, 2019·1 cites·11 claims
- 1260US2025174441A1Substrate Processing ApparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 1360US2023249306A1Method and apparatus for processing substrateTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1456US12394656B2Mounting table and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Aug 19, 2025·0 cites·8 claims
- 1556US11149342B2Sputtering apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Oct 19, 2021·0 cites·16 claims
- 1656US2024209509A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1755US9200362B2Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker deviceHIGASHISAKA RYUJI·Filed 2011·Granted Dec 1, 2015·1 cites·7 claims
- 1854US2021262080A1Sputter deviceTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1954US2009308317A1Carrier with deposition shieldCANON ANELVA CORP·Filed 2009·Application pending·0 cites
- 2053US12315707B2Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted May 27, 2025·0 cites·15 claims
- 2153US10748750B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Granted Aug 18, 2020·0 cites·6 claims
- 2253US2025122625A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 2353US2019390326A1Substrate stage and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 2452US11551918B2Film forming apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 10, 2023·0 cites·17 claims
- 2547US2025232963A1Substrate Processing ApparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2642US11414747B2Sputtering deviceTOKYO ELECTRON LTD·Filed 2019·Granted Aug 16, 2022·0 cites·12 claims
- 2739US6247239B1Clinometric sensorASAHI OPTICAL CO LTD·Filed 1998·Granted Jun 19, 2001·11 cites·11 claims
- 2839US6032375AInclination sensorASAHI OPTICAL CO LTD·Filed 1997·Granted Mar 7, 2000·11 cites·18 claims
- 2937US2022098717A1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 3035US5937528ATilt sensor, mask and coat holderASAHI OPTICAL CO LTD·Filed 1997·Granted Aug 17, 1999·10 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →