Inventor · disambiguated record
Hrishikesh Patel
Also filed as: PATEL HRISHIKESH
9 granted patents·2 pending applications·9 citations·filing 2010–2023
80Inventor score
Files withASML NETHERLANDS BV7PATEL HRISHIKESH2LAFARRE RAYMOND WILHELMUS LOUIS1SCHEPERS MAIKEL ADRIANUS CORNELIS1
Top patents by PatentIndex Score
11 records- 0182US12117726B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2023·Granted Oct 15, 2024·0 cites·20 claims
- 0279US11231646B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2018·Granted Jan 25, 2022·1 cites·20 claims
- 0376US8472003B2Fluid handling structure, lithographic apparatus and device manufacturing methodPATEL HRISHIKESH·Filed 2010·Granted Jun 25, 2013·5 cites·24 claims
- 0475US11754918B2Pellicle and pellicle assemblyASML NETHERLANDS BV·Filed 2021·Granted Sep 12, 2023·0 cites·24 claims
- 0569US8680493B2Radiation conduit for radiation sourceSCHEPERS MAIKEL ADRIANUS CORNELIS·Filed 2012·Granted Mar 25, 2014·3 cites·13 claims
- 0661USRE49297ELithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Nov 15, 2022·0 cites·23 claims
- 0754US10191377B2Lithographic apparatus and a device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jan 29, 2019·0 cites·21 claims
- 0850US2020124976A1Radiation Source Module and Lithographic ApparatusASML NETHERLANDS BV·Filed 2018·Application pending·0 cites
- 0947US9618858B2Lithographic apparatus and a device manufacturing method involving thermal conditioning of a tablePATEL HRISHIKESH·Filed 2011·Granted Apr 11, 2017·0 cites·21 claims
- 1035US2011232878A1Heat pipe, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 1134US8941815B2Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing methodLAFARRE RAYMOND WILHELMUS LOUIS·Filed 2010·Granted Jan 27, 2015·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →