Inventor · disambiguated record
Hyman Lam
Also filed as: LAM HYMAN · LAM HYMAN W H
15 granted patents·4 pending applications·1,248 citations·filing 2009–2020
93Inventor score
Top patents by PatentIndex Score
19 records- 0198USRE47440EApparatus and method for providing uniform flow of gasAPPLIED MATERIALS INC·Filed 2017·Granted Jun 18, 2019·360 cites·31 claims
- 0298US9252024B2Deposition chambers with UV treatment and methods of useAPPLIED MATERIALS INC·Filed 2013·Granted Feb 2, 2016·469 cites·16 claims
- 0396US8291857B2Apparatuses and methods for atomic layer depositionLAM HYMAN·Filed 2009·Granted Oct 23, 2012·375 cites·16 claims
- 0495US8293015B2Apparatuses and methods for atomic layer depositionLAM HYMAN W H·Filed 2011·Granted Oct 23, 2012·21 cites·4 claims
- 0588US9004006B2Process chamber lid design with built-in plasma source for short lifetime speciesKAO CHIEN-TEH·Filed 2011·Granted Apr 14, 2015·5 cites·18 claims
- 0687US8747556B2Apparatuses and methods for atomic layer depositionLAM HYMAN W H·Filed 2012·Granted Jun 10, 2014·3 cites·15 claims
- 0786US9982343B2Apparatus for providing plasma to a process chamberAPPLIED MATERIALS INC·Filed 2012·Granted May 29, 2018·3 cites·19 claims
- 0885US11749543B2Chamber matching and calibrationAPPLIED MATERIALS INC·Filed 2020·Granted Sep 5, 2023·2 cites·18 claims
- 0980US9017776B2Apparatuses and methods for atomic layer depositionAPPLIED MATERIALS INC·Filed 2012·Granted Apr 28, 2015·1 cites·6 claims
- 1079US9109754B2Apparatus and method for providing uniform flow of gasAPPLIED MATERIALS INC·Filed 2012·Granted Aug 18, 2015·4 cites·26 claims
- 1172US9447497B2Processing chamber gas delivery system with hot-swappable ampouleWU DIEN-YEH·Filed 2014·Granted Sep 20, 2016·5 cites·11 claims
- 1270US10453657B2Apparatus for depositing metal films with plasma treatmentAPPLIED MATERIALS INC·Filed 2017·Granted Oct 22, 2019·0 cites·16 claims
- 1366USRE48994EApparatus and method for providing uniform flow of gasAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·0 cites·33 claims
- 1465US11133155B2Apparatus for depositing metal films with plasma treatmentAPPLIED MATERIALS INC·Filed 2019·Granted Sep 28, 2021·0 cites·12 claims
- 1559US10640870B2Gas feedthrough assemblyAPPLIED MATERIALS INC·Filed 2017·Granted May 5, 2020·0 cites·20 claims
- 1655US2014174362A1Apparatus And Methods For Symmetrical Gas Distribution With High Purge EfficiencyKAO CHIEN-TEH·Filed 2013·Application pending·0 cites
- 1743US2014165911A1Apparatus for providing plasma to a process chamberAPPLIED MATERIALS INC·Filed 2012·Application pending·0 cites
- 1843US2014137961A1Modular chemical delivery systemAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 1936US2016326648A1Apparatus for selectively sealing a gas feedthroughAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →