Inventor · disambiguated record
James Lee
Also filed as: LEE JAMES · LEE JAMES F · LEE JAMES FOREST
24 granted patents·5 pending applications·350 citations·filing 1984–2024
96Inventor score
Files withLAM RES CORP13LEE JAMES F5NOVELLUS SYSTEMS INC3SPEEDFAM IPEC CORP2FALLON SAFETY SYSTEMS INC1
Top patents by PatentIndex Score
29 records- 0195US11946142B2Spatially tunable deposition to compensate within wafer differential bowLAM RES CORP·Filed 2020·Granted Apr 2, 2024·4 cites·20 claims
- 0295US11619925B2Remote-plasma clean (RPC) directional-flow deviceLAM RES CORP·Filed 2021·Granted Apr 4, 2023·2 cites·26 claims
- 0393US8801950B2Reduction of a process volume of a processing chamber using a nested dynamic inert volumeLEE JAMES F·Filed 2012·Granted Aug 12, 2014·16 cites·19 claims
- 0492US6447379B1Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method thereforSPEEDFAM IPEC CORP·Filed 2000·Granted Sep 10, 2002·52 cites·10 claims
- 0591US10147597B1Turbulent flow spiral multi-zone precursor vaporizerLAM RES CORP·Filed 2017·Granted Dec 4, 2018·18 cites·20 claims
- 0691US8608035B2Purge ring with split baffles for photonic thermal processing systemsLEE JAMES·Filed 2011·Granted Dec 17, 2013·9 cites·16 claims
- 0791US8283644B2Measuring in-situ UV intensity in UV cure toolSMARGIASSI EUGENE·Filed 2011·Granted Oct 9, 2012·21 cites·18 claims
- 0890US8398816B1Method and apparatuses for reducing porogen accumulation from a UV-cure chamberGYTRI LISA·Filed 2008·Granted Mar 19, 2013·25 cites·11 claims
- 0989US9073100B2Method and apparatuses for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2013·Granted Jul 7, 2015·8 cites·23 claims
- 1088US9028765B2Exhaust flow spreading baffle-riser to optimize remote plasma window cleanLAM RES CORP·Filed 2013·Granted May 12, 2015·9 cites·20 claims
- 1188US4526158APortable barbecue systemLEE JAMES F·Filed 1984·Granted Jul 2, 1985·60 cites·20 claims
- 1282US8883406B2Method for using a purge ring with split baffles in photonic thermal processing systemsLAM RES CORP·Filed 2013·Granted Nov 11, 2014·6 cites·15 claims
- 1381US10020197B2Method for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2015·Granted Jul 10, 2018·2 cites·20 claims
- 1480US10161034B2Rapid chamber clean using concurrent in-situ and remote plasma sourcesLAM RES CORP·Filed 2017·Granted Dec 25, 2018·1 cites·19 claims
- 1578US4621608APortable barbecue systemLEE JAMES F·Filed 1985·Granted Nov 11, 1986·46 cites·19 claims
- 1677US12013682B2Remote-plasma clean (RPC) directional-flow deviceLAM RES CORP·Filed 2023·Granted Jun 18, 2024·0 cites·14 claims
- 1775US6746318B2Workpiece carrier with adjustable pressure zones and barriersSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 8, 2004·24 cites·9 claims
- 1873US12338531B2Spatially tunable deposition to compensate within wafer differential bowLAM RES CORP·Filed 2024·Granted Jun 24, 2025·0 cites·20 claims
- 1967US6886555B2Fireplace grateFiled 2001·Granted May 3, 2005·13 cites·22 claims
- 2065US2025305128A1Multi-zone gas distribution for asymmetric wafer bow compensationLAM RES CORP·Filed 2023·Application pending·0 cites
- 2164US2025305129A1Multi-path helical mixer for asymmetric wafer bow compensationLAM RES CORP·Filed 2023·Application pending·0 cites
- 2261US11177131B2Method and apparatuses for reducing porogen accumulation from a UV-cure chamberNOVELLUS SYSTEMS INC·Filed 2018·Granted Nov 16, 2021·0 cites·20 claims
- 2357US6968839B2Multi-tray fireplace tray systemLEE JAMES F·Filed 2003·Granted Nov 29, 2005·7 cites·20 claims
- 2451US2022199379A1High temperature heating of a substrate in a processing chamberLAM RES CORP·Filed 2020·Application pending·0 cites
- 2547US6318024B1Overhead door failure prevention system and method of using sameFALLON SAFETY SYSTEMS INC·Filed 1999·Granted Nov 20, 2001·23 cites·9 claims
- 2644US2022136107A1Showerhead with configurable gas outletsLAM RES CORP·Filed 2020·Application pending·0 cites
- 2739US2004173206A1Multi-purpose two-tier fireplace grateFiled 2003·Application pending·0 cites
- 2836US10240236B2Clean resistant windows for ultraviolet thermal processingLAM RES CORP·Filed 2015·Granted Mar 26, 2019·0 cites·20 claims
- 2933US4955315ALarge vehicle entrance door safety system and methodLEE JAMES F·Filed 1989·Granted Sep 11, 1990·4 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →