Inventor · disambiguated record
Jan Evert Van Der Werf
Also filed as: VAN DER WERF JAN E · VAN DER WERF JAN EVERT · WERF JAN EVERT VAN DER
36 granted patents·3 pending applications·1,733 citations·filing 1975–2006
98Inventor score
Top patents by PatentIndex Score
39 records- 0199US6046792ADifferential interferometer system and lithographic step-and-scan apparatus provided with such a systemPHILIPS CORP·Filed 1997·Granted Apr 4, 2000·849 cites·14 claims
- 0296US5674650AMethod of repetitively imaging a mask pattern on a substrate, and apparatus for performing the methodPHILIPS CORP·Filed 1995·Granted Oct 7, 1997·170 cites·26 claims
- 0396US5191200AImaging apparatus having a focus-error and/or tilt detection devicePHILIPS CORP·Filed 1991·Granted Mar 2, 1993·200 cites·52 claims
- 0490US7277185B2Method of measuring overlayASML NETHERLANDS BV·Filed 2005·Granted Oct 2, 2007·12 cites·7 claims
- 0590US6937344B2Method of measuring overlayASML NETHERLANDS BV·Filed 2001·Granted Aug 30, 2005·36 cites·14 claims
- 0688US6937334B2Method of measuring alignment of a substrate with respect to a reference alignment markASML NETHERLANDS BV·Filed 2001·Granted Aug 30, 2005·29 cites·10 claims
- 0785US5910847AMethod of determining the radiation dose in a lithographic apparatusPHILIPS CORP·Filed 1997·Granted Jun 8, 1999·59 cites·14 claims
- 0878US6122058AInterferometer system with two wavelengths, and lithographic apparatus provided with such a systemASM LITHOGRAPHY BV·Filed 1998·Granted Sep 19, 2000·55 cites·24 claims
- 0978US5485272ARadiation-source unit for generating a beam having two directions of polarisation and two frequenciesPHILIPS CORP·Filed 1994·Granted Jan 16, 1996·51 cites·20 claims
- 1077US7459690B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Dec 2, 2008·3 cites·29 claims
- 1177US7095499B2Method of measuring alignment of a substrate with respect to a reference alignment markASML NETHERLANDS BV·Filed 2005·Granted Aug 22, 2006·4 cites·11 claims
- 1277US5026166AApparatus for pre-aligning substrate preparatory to fine alignmentPHILIPS CORP·Filed 1984·Granted Jun 25, 1991·27 cites·9 claims
- 1375US6747282B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2002·Granted Jun 8, 2004·12 cites·24 claims
- 1475US4749278AArrangement for aligning a mask and a substrate relative to each otherPHILIPS CORP·Filed 1986·Granted Jun 7, 1988·25 cites·1 claims
- 1573US7283236B2Alignment system and lithographic apparatus equipped with such an alignment systemASML NETHERLANDS BV·Filed 2004·Granted Oct 16, 2007·13 cites·16 claims
- 1673US6879374B2Device manufacturing method, device manufactured thereby and a mask for use in the methodASML NETHERLANDS BV·Filed 2002·Granted Apr 12, 2005·13 cites·42 claims
- 1773US5917604AAlignment device and lithographic apparatus provided with such a devicePHILIPS CORP·Filed 1997·Granted Jun 29, 1999·46 cites·22 claims
- 1872US7012673B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 14, 2006·9 cites·21 claims
- 1971US6721389B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2001·Granted Apr 13, 2004·8 cites·17 claims
- 2068US5673101AMethod of repetitively imaging a mask pattern on a substrate, and apparatus for performing the methodPHILIPS CORP·Filed 1995·Granted Sep 30, 1997·29 cites·14 claims
- 2165US4004171AGas-and/or vapor discharge lampPHILIPS CORP·Filed 1976·Granted Jan 18, 1977·10 cites·4 claims
- 2264US7075620B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jul 11, 2006·5 cites·18 claims
- 2362US4866262AOptical imaging arrangement comprising an opto-electronic focussing-error detection systemPHILIPS CORP·Filed 1988·Granted Sep 12, 1989·17 cites·7 claims
- 2460US7453577B2Apparatus and method for inspecting a patterned part of a sampleASML NETHERLANDS BV·Filed 2004·Granted Nov 18, 2008·3 cites·30 claims
- 2560US6963391B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Nov 8, 2005·7 cites·19 claims
- 2660US4253019AApparatus for reading an optical record carrier having a radiation-reflecting information structurePHILIPS CORP·Filed 1978·Granted Feb 24, 1981·9 cites·9 claims
- 2759US7105837B2Lithographic apparatus, device manufacturing method and radiation systemASML NETHERLANDS BV·Filed 2004·Granted Sep 12, 2006·4 cites·36 claims
- 2857US7499149B2Holographic mask for lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Mar 3, 2009·4 cites·9 claims
- 2955US6888151B2Lithographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted May 3, 2005·3 cites·55 claims
- 3054US7492443B2Device manufacturing method, device manufactured thereby and a mask for use in the methodASML NETHERLANDS BV·Filed 2004·Granted Feb 17, 2009·3 cites·15 claims
- 3152US7309869B2Lithographic apparatus, device manufacturing method and radiation systemASML NETHERLANDS BV·Filed 2005·Granted Dec 18, 2007·0 cites·39 claims
- 3250US7630060B2Device manufacturing method, lithographic apparatus and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Dec 8, 2009·1 cites·17 claims
- 3347US4001633ADevice provided with a gas and/or vapor discharge tubePHILIPS CORP·Filed 1975·Granted Jan 4, 1977·9 cites·9 claims
- 3446US7505116B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Mar 17, 2009·0 cites·13 claims
- 3545US7307712B2Method of detecting mask defects, a computer program and reference substrateASML NETHERLANDS BV·Filed 2003·Granted Dec 11, 2007·2 cites·16 claims
- 3644US2007103753A1Alignment of Holographic Images on DetectorKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Application pending·0 cites
- 3741US2007115782A1Optical pick-up unitKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Application pending·0 cites
- 3841US2009041077A1Optical read-outKONINKL PHILIPS ELECTRONICS NV·Filed 2004·Application pending·0 cites
- 3939US4051407AArrangement including a gas and/or vapor discharge lampPHILIPS CORP·Filed 1976·Granted Sep 27, 1977·6 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →