Inventor · disambiguated record
Joseph A. Di Regolo
Also filed as: DI REGOLO JOSEPH A
6 granted patents·19 citations·filing 2012–2023
74Inventor score
Top patents by PatentIndex Score
6 records- 0194US10481111B2Calibration of a small angle X-ray scatterometry based metrology systemKLA TENCOR CORP·Filed 2017·Granted Nov 19, 2019·11 cites·22 claims
- 0290US10359377B2Beam shaping slit for small spot size transmission small angle X-ray scatterometryKLA TENCOR CORP·Filed 2017·Granted Jul 23, 2019·5 cites·20 claims
- 0383US11073487B2Methods and systems for characterization of an x-ray beam with high spatial resolutionKLA TENCOR CORP·Filed 2018·Granted Jul 27, 2021·3 cites·35 claims
- 0454US11513085B2Measurement and control of wafer tilt for x-ray based metrologyKLA CORP·Filed 2020·Granted Nov 29, 2022·0 cites·24 claims
- 0553US12217997B2Cleanroom compatible robotic end effector exchange systemKLA CORP·Filed 2023·Granted Feb 4, 2025·0 cites·9 claims
- 0640US9690213B2Linear Stage for reflective electron beam lithographyUMMETHALA UPENDRA·Filed 2012·Granted Jun 27, 2017·0 cites·63 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →