Inventor · disambiguated record
John Michael Kerns
Also filed as: KERNS JOHN MICHAEL
6 granted patents·12 pending applications·31 citations·filing 2011–2025
79Inventor score
Top patents by PatentIndex Score
18 records- 0194US9873940B2Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2014·Granted Jan 23, 2018·16 cites·9 claims
- 0284US9123651B2Dense oxide coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2013·Granted Sep 1, 2015·6 cites·12 claims
- 0381US9546432B2Dense oxide coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2015·Granted Jan 17, 2017·3 cites·10 claims
- 0481US9337002B2Corrosion resistant aluminum coating on plasma chamber componentsLAM RES CORP·Filed 2013·Granted May 10, 2016·6 cites·21 claims
- 0570US2025208022A1Method and apparatus for measuring particlesLAM RES CORP·Filed 2025·Application pending·0 cites
- 0665US12270748B2Method and apparatus for measuring particlesLAM RES CORP·Filed 2019·Granted Apr 8, 2025·0 cites·13 claims
- 0764US2018127868A1Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatusLAM RES CORP·Filed 2017·Application pending·0 cites
- 0862US12249490B2Single crystal metal oxide plasma chamber componentLAM RES CORP·Filed 2020·Granted Mar 11, 2025·0 cites·11 claims
- 0952US2023088848A1Yttrium aluminum coating for plasma processing chamber componentsLAM RES CORP·Filed 2021·Application pending·0 cites
- 1052US2025246413A1Coated part for plasma processing chamberLAM RES CORP·Filed 2022·Application pending·0 cites
- 1150US2014113453A1Tungsten carbide coated metal component of a plasma reactor chamber and method of coatingLAM RES CORP·Filed 2012·Application pending·0 cites
- 1249US2023020387A1Low temperature sintered coatings for plasma chambersLAM RES CORP·Filed 2020·Application pending·0 cites
- 1347US2017040147A1Systems Comprising Silicon Coated Gas Supply Conduits and Methods for Applying CoatingsLAM RES CORP·Filed 2016·Application pending·0 cites
- 1447US2023411124A1Ceramic component with channelsLAM RES CORP·Filed 2021·Application pending·0 cites
- 1546US2013105083A1Systems Comprising Silicon Coated Gas Supply Conduits And Methods For Applying CoatingsSHIH HONG·Filed 2011·Application pending·0 cites
- 1642US2015187615A1Component of a plasma processing apparatus including an electrically conductive and nonmagnetic cold sprayed coatingLAM RES CORP·Filed 2014·Application pending·0 cites
- 1733US2014315392A1Cold spray barrier coated component of a plasma processing chamber and method of manufacture thereofLAM RES CORP·Filed 2013·Application pending·0 cites
- 1831US2016379806A1Use of plasma-resistant atomic layer deposition coatings to extend the lifetime of polymer components in etch chambersLAM RES CORP·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when John Michael Kerns files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →