Inventor · disambiguated record
Joseph C. Olson
Also filed as: OLSON JOSEPH · OLSON JOSEPH C
130 granted patents·22 pending applications·819 citations·filing 1998–2024
99Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT65APPLIED MATERIALS INC52VARIAN SEMICONDUCTOR EQUIPMENT ASS INC17CHANG SHENGWU3GODET LUDOVIC3
Top patents by PatentIndex Score
152 records- 0197US11247298B2Method of forming a plurality of gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Feb 15, 2022·9 cites·20 claims
- 0297US9377692B2Electric/magnetic field guided acid diffusionAPPLIED MATERIALS INC·Filed 2014·Granted Jun 28, 2016·18 cites·12 claims
- 0396US11226441B2Methods of producing slanted gratings with variable etch depthsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 18, 2022·4 cites·18 claims
- 0496US10823888B1Methods of producing slanted gratings with variable etch depthsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 3, 2020·15 cites·15 claims
- 0596US10302826B1Controlling etch angles by substrate rotation in angled etch toolsAPPLIED MATERIALS INC·Filed 2018·Granted May 28, 2019·15 cites·20 claims
- 0696US8133804B1Method and system for modifying patterned photoresist using multi-step ion implantationGODET LUDOVIC·Filed 2010·Granted Mar 13, 2012·35 cites·20 claims
- 0796US6437350B1Methods and apparatus for adjusting beam parallelism in ion implantersVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Aug 20, 2002·67 cites·26 claims
- 0895US12106936B2Scanned angled etching apparatus and techniques providing separate co-linear radicals and ionsAPPLIED MATERIALS INC·Filed 2023·Granted Oct 1, 2024·2 cites·20 claims
- 0994US6777686B2Control system for indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2001·Granted Aug 17, 2004·61 cites·10 claims
- 1093US10935799B2Optical component having depth modulated angled gratings and method of formationAPPLIED MATERIALS INC·Filed 2018·Granted Mar 2, 2021·10 cites·15 claims
- 1193US8188445B2Ion sourceGODET LUDOVIC·Filed 2010·Granted May 29, 2012·15 cites·19 claims
- 1293US6791094B1Method and apparatus for determining beam parallelism and directionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Sep 14, 2004·63 cites·25 claims
- 1392US10192727B2Electrodynamic mass analysisVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jan 29, 2019·8 cites·19 claims
- 1491US10775158B2System and method for detecting etch depth of angled surface relief gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 15, 2020·7 cites·16 claims
- 1590US11587778B2Electrodynamic mass analysis with RF biased ion sourceAPPLIED MATERIALS INC·Filed 2020·Granted Feb 21, 2023·2 cites·16 claims
- 1690US8853653B1Apparatus and techniques for controlling ion implantation uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Oct 7, 2014·6 cites·16 claims
- 1790US7459704B2Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atomsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 2, 2008·17 cites·36 claims
- 1890US7253423B2Technique for uniformity tuning in an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Aug 7, 2007·14 cites·25 claims
- 1990US7138768B2Indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2002·Granted Nov 21, 2006·49 cites·29 claims
- 2090US7102139B2Source arc chamber for ion implanter having repeller electrode mounted to external insulatorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Sep 5, 2006·14 cites·12 claims
- 2189US11119405B2Techniques for forming angled structuresAPPLIED MATERIALS INC·Filed 2018·Granted Sep 14, 2021·5 cites·15 claims
- 2289US11069511B2System and methods using an inline surface engineering sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jul 20, 2021·4 cites·6 claims
- 2389US10607847B1Gate all around device and method of formation using angled ionsAPPLIED MATERIALS INC·Filed 2018·Granted Mar 31, 2020·4 cites·15 claims
- 2489US8590485B2Small form factor plasma source for high density wide ribbon ion beam generationBILOIU COSTEL·Filed 2010·Granted Nov 26, 2013·11 cites·20 claims
- 2589US7394073B2Methods and apparatus for ion beam angle measurement in two dimensionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jul 1, 2008·25 cites·16 claims
- 2688US11662524B2Forming variable depth structures with laser ablationAPPLIED MATERIALS INC·Filed 2020·Granted May 30, 2023·2 cites·12 claims
- 2788US11512385B2Method of forming gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 29, 2022·3 cites·20 claims
- 2888US11402649B2System and method for optimally forming gratings of diffracted optical elementsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Aug 2, 2022·2 cites·16 claims
- 2988US8354655B2Method and system for controlling critical dimension and roughness in resist featuresVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2011·Granted Jan 15, 2013·7 cites·15 claims
- 3088US7355188B2Technique for uniformity tuning in an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Apr 8, 2008·13 cites·13 claims
- 3187US11016228B2System and method for forming diffracted optical element having varied gratingsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted May 25, 2021·2 cites·20 claims
- 3287US6573518B1Bi mode ion implantation with non-parallel ion beamsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2000·Granted Jun 3, 2003·23 cites·28 claims
- 3386US11715621B2Scanned angled etching apparatus and techniques providing separate co-linear radicals and ionsAPPLIED MATERIALS INC·Filed 2019·Granted Aug 1, 2023·3 cites·20 claims
- 3486US11456152B2Modulation of rolling K vectors of angled gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Sep 27, 2022·2 cites·20 claims
- 3585US11335531B2Shadow mask apparatus and methods for variable etch depthsAPPLIED MATERIALS INC·Filed 2020·Granted May 17, 2022·2 cites·12 claims
- 3685US10598832B2System and method for forming diffracted optical element having varied gratingsVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Mar 24, 2020·4 cites·13 claims
- 3785US7655932B2Techniques for providing ion source feed materialsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 2, 2010·10 cites·27 claims
- 3884US12106935B2Modulation of rolling k vectors of angled gratingsAPPLIED MATERIALS INC·Filed 2023·Granted Oct 1, 2024·0 cites·21 claims
- 3984US11670482B2Modulation of rolling k vectors of angled gratingsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 6, 2023·1 cites·4 claims
- 4084US8937004B2Apparatus and method for controllably implanting workpiecesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jan 20, 2015·5 cites·13 claims
- 4183US7663125B2Ion beam current uniformity monitor, ion implanter and related methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Feb 16, 2010·8 cites·18 claims
- 4283US7250617B2Ion beam neutral detectionVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 31, 2007·7 cites·24 claims
- 4382US11380578B2Formation of angled gratingsAPPLIED MATERIALS INC·Filed 2019·Granted Jul 5, 2022·2 cites·20 claims
- 4482US7868305B2Technique for ion beam angle spread controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jan 11, 2011·8 cites·19 claims
- 4581US12099241B2Forming variable depth structures with laser ablationAPPLIED MATERIALS INC·Filed 2023·Granted Sep 24, 2024·0 cites·12 claims
- 4681US11367589B2Modulation of ion beam angleAPPLIED MATERIALS INC·Filed 2019·Granted Jun 21, 2022·1 cites·18 claims
- 4781US10763072B1Apparatus, system and techniques for mass analyzed ion beamAPPLIED MATERIALS INC·Filed 2019·Granted Sep 1, 2020·2 cites·19 claims
- 4881US7397047B2Technique for tuning an ion implanter systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 8, 2008·6 cites·25 claims
- 4980US11456205B2Methods for variable etch depthsAPPLIED MATERIALS INC·Filed 2020·Granted Sep 27, 2022·1 cites·20 claims
- 5080US8884244B1Dual mode ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Nov 11, 2014·4 cites·13 claims
Showing the top 50 of 152 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →