Inventor · disambiguated record
Jon Opsal
Also filed as: OPSAL JON
126 granted patents·3 pending applications·8,502 citations·filing 1983–2011
99Inventor score
Top patents by PatentIndex Score
129 records- 0199US6972852B2Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2004·Granted Dec 6, 2005·183 cites·24 claims
- 0299US6813034B2Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2002·Granted Nov 2, 2004·233 cites·15 claims
- 0399US6704661B1Real time analysis of periodic structures on semiconductorsTHERMA WAVE INC·Filed 2001·Granted Mar 9, 2004·215 cites·28 claims
- 0499US6429943B1Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2001·Granted Aug 6, 2002·463 cites·84 claims
- 0599US6297880B1Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 2000·Granted Oct 2, 2001·172 cites·13 claims
- 0699US6278519B1Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 1998·Granted Aug 21, 2001·210 cites·49 claims
- 0799US5181080AMethod and apparatus for evaluating the thickness of thin filmsTHERMA WAVE INC·Filed 1991·Granted Jan 19, 1993·291 cites·34 claims
- 0898US7933026B2High resolution monitoring of CD variationsKLA TENCOR CORP·Filed 2009·Granted Apr 26, 2011·178 cites·7 claims
- 0998US7478019B2Multiple tool and structure analysisKLA TENCOR CORP·Filed 2005·Granted Jan 13, 2009·225 cites·30 claims
- 1098US7061627B2Optical scatterometry of asymmetric lines and structuresTHERMA WAVE INC·Filed 2003·Granted Jun 13, 2006·153 cites·8 claims
- 1198US6678046B2Detector configurations for optical metrologyTHERMA WAVE INC·Filed 2002·Granted Jan 13, 2004·102 cites·19 claims
- 1298US5900939AThin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1998·Granted May 4, 1999·174 cites·13 claims
- 1398US5877859ABroadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 1996·Granted Mar 2, 1999·202 cites·66 claims
- 1498US5798837AThin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1997·Granted Aug 25, 1998·233 cites·27 claims
- 1598US5159412AOptical measurement device with enhanced sensitivityTHERMA WAVE INC·Filed 1991·Granted Oct 27, 1992·190 cites·13 claims
- 1698US5042951AHigh resolution ellipsometric apparatusTHERMA WAVE INC·Filed 1989·Granted Aug 27, 1991·483 cites·24 claims
- 1798US4999014AMethod and apparatus for measuring thickness of thin filmsTHERMA WAVE INC·Filed 1989·Granted Mar 12, 1991·539 cites·44 claims
- 1898US4854710AMethod and apparatus for evaluating surface and subsurface features in a semiconductorTHERMA WAVE INC·Filed 1987·Granted Aug 8, 1989·188 cites·34 claims
- 1998US4522510AThin film thickness measurement with thermal wavesTHERMA WAVE INC·Filed 1983·Granted Jun 11, 1985·199 cites·20 claims
- 2097US7038850B2CD metrology analysis using green's functionTHERMA WAVE INC·Filed 2005·Granted May 2, 2006·67 cites·49 claims
- 2197US6778911B2Real time analysis of periodic structures on semiconductorsTHERMA WAVE INC·Filed 2003·Granted Aug 17, 2004·82 cites·19 claims
- 2297US5978074AApparatus for evaluating metalized layers on semiconductorsTHERMA WAVE INC·Filed 1997·Granted Nov 2, 1999·201 cites·56 claims
- 2397US5074669AMethod and apparatus for evaluating ion implant dosage levels in semiconductorsTHERMA WAVE INC·Filed 1989·Granted Dec 24, 1991·177 cites·10 claims
- 2497US4750822AMethod and apparatus for optically detecting surface states in materialsTHERMA WAVE INC·Filed 1986·Granted Jun 14, 1988·179 cites·28 claims
- 2596US6842259B2Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2004·Granted Jan 11, 2005·71 cites·14 claims
- 2696US6836328B2Detector configurations for optical metrologyTHERMA WAVE INC·Filed 2003·Granted Dec 28, 2004·52 cites·9 claims
- 2796US6643354B2Calibration and alignment of X-ray reflectometric systemsTHERMA WAVE INC·Filed 2002·Granted Nov 4, 2003·78 cites·26 claims
- 2896US6453006B1Calibration and alignment of X-ray reflectometric systemsTHERMA WAVE INC·Filed 2000·Granted Sep 17, 2002·93 cites·19 claims
- 2996US5596411AIntegrated spectroscopic ellipsometerTHERMA WAVE INC·Filed 1996·Granted Jan 21, 1997·205 cites·22 claims
- 3096US4679946AEvaluating both thickness and compositional variables in a thin film sampleTHERMA WAVE INC·Filed 1984·Granted Jul 14, 1987·115 cites·17 claims
- 3196US4579463ADetecting thermal waves to evaluate thermal parametersTHERMA WAVE PARTNERS·Filed 1984·Granted Apr 1, 1986·187 cites·7 claims
- 3295US6995842B2Detector configurations for optical metrologyTHERMA WAVE INC·Filed 2004·Granted Feb 7, 2006·51 cites·10 claims
- 3395US6654131B2Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2002·Granted Nov 25, 2003·50 cites·19 claims
- 3495US6411385B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2001·Granted Jun 25, 2002·54 cites·12 claims
- 3595US6320657B1Broadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 2000·Granted Nov 20, 2001·56 cites·9 claims
- 3694US7667841B2Detector configurations for optical metrologyKLA TENCOR CORP·Filed 2008·Granted Feb 23, 2010·19 cites·13 claims
- 3794US7031848B2Real time analysis of periodic structures on semiconductorsTHERMA WAVE INC·Filed 2005·Granted Apr 18, 2006·18 cites·18 claims
- 3894US6515746B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2002·Granted Feb 4, 2003·42 cites·22 claims
- 3994US6417921B2Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 2001·Granted Jul 9, 2002·49 cites·14 claims
- 4094US6408048B2Apparatus for analyzing samples using combined thermal wave and X-ray reflectance measurementsTHERMA WAVE INC·Filed 2001·Granted Jun 18, 2002·49 cites·18 claims
- 4194US6320666B1Apparatus for evaluating metalized layers on semiconductorsTHERMA WAVE INC·Filed 2000·Granted Nov 20, 2001·48 cites·14 claims
- 4294US5042952AMethod and apparatus for evaluating surface and subsurface and subsurface features in a semiconductorTHERMA WAVE INC·Filed 1990·Granted Aug 27, 1991·113 cites·5 claims
- 4394US4634290AMethod and apparatus for detecting thermal wavesTHERMA WAVE INC·Filed 1985·Granted Jan 6, 1987·109 cites·8 claims
- 4494US4632561AEvaluation of surface and subsurface characteristics of a sampleTHERMA WAVE INC·Filed 1985·Granted Dec 30, 1986·109 cites·12 claims
- 4593US6452685B2Apparatus for evaluating metalized layers on semiconductorsTHERMA WAVE INC·Filed 2001·Granted Sep 17, 2002·39 cites·14 claims
- 4693US5973787ABroadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 1998·Granted Oct 26, 1999·91 cites·26 claims
- 4792US7567351B2High resolution monitoring of CD variationsKLA TENCOR CORP·Filed 2007·Granted Jul 28, 2009·22 cites·22 claims
- 4892US6987832B2Calibration and alignment of X-ray reflectometric systemsKLA TENCOR TECH CORP·Filed 2004·Granted Jan 17, 2006·39 cites·17 claims
- 4992US6867866B1CD metrology analysis using green's functionTHERMA WAVE INC·Filed 2002·Granted Mar 15, 2005·54 cites·35 claims
- 5092US6754305B1Measurement of thin films and barrier layers on patterned wafers with X-ray reflectometryTHERMA WAVE INC·Filed 2000·Granted Jun 22, 2004·58 cites·28 claims
Showing the top 50 of 129 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →