Inventor · disambiguated record
Joseph Yudovsky
Also filed as: YUDOVSKY JOSEPH
103 granted patents·67 pending applications·5,927 citations·filing 1997–2024
99Inventor score
Top patents by PatentIndex Score
170 records- 0198USRE47440EApparatus and method for providing uniform flow of gasAPPLIED MATERIALS INC·Filed 2017·Granted Jun 18, 2019·360 cites·31 claims
- 0298US8633115B2Methods for atomic layer etchingCHANG MEI·Filed 2011·Granted Jan 21, 2014·522 cites·11 claims
- 0398US7798096B2Plasma, UV and ion/neutral assisted ALD or CVD in a batch toolAPPLIED MATERIALS INC·Filed 2006·Granted Sep 21, 2010·487 cites·32 claims
- 0498US6868859B2Rotary gas valve for pulsing a gasAPPLIED MATERIALS INC·Filed 2003·Granted Mar 22, 2005·107 cites·29 claims
- 0598US6821563B2Gas distribution system for cyclical layer depositionAPPLIED MATERIALS INC·Filed 2003·Granted Nov 23, 2004·316 cites·30 claims
- 0698US6589352B1Self aligning non contact shadow ring process kitAPPLIED MATERIALS INC·Filed 1999·Granted Jul 8, 2003·566 cites·26 claims
- 0798US6544340B2Heater with detachable ceramic top plateAPPLIED MATERIALS INC·Filed 2000·Granted Apr 8, 2003·261 cites·42 claims
- 0898US6271148B1Method for improved remote microwave plasma source for use with substrate processing systemAPPLIED MATERIALS INC·Filed 1999·Granted Aug 7, 2001·647 cites·26 claims
- 0998US6146463AApparatus and method for aligning a substrate on a support memberAPPLIED MATERIALS INC·Filed 1998·Granted Nov 14, 2000·412 cites·8 claims
- 1097US10262888B2Apparatus and methods for wafer rotation in carousel susceptorAPPLIED MATERIALS INC·Filed 2017·Granted Apr 16, 2019·18 cites·18 claims
- 1197US9175394B2Atomic layer deposition chamber with multi injectYUDOVSKY JOSEPH·Filed 2011·Granted Nov 3, 2015·462 cites·18 claims
- 1296US11174552B2Rotary reactor for uniform particle coating with thin filmsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 16, 2021·12 cites·21 claims
- 1396US10586720B2Wafer processing systems including multi-position batch load lock apparatus with temperature control capabilityAPPLIED MATERIALS INC·Filed 2019·Granted Mar 10, 2020·12 cites·19 claims
- 1496US10256125B2Wafer processing systems including multi-position batch load lock apparatus with temperature control capabilityAPPLIED MATERIALS INC·Filed 2016·Granted Apr 9, 2019·14 cites·20 claims
- 1596US6375748B1Method and apparatus for preventing edge depositionAPPLIED MATERIALS INC·Filed 1999·Granted Apr 23, 2002·293 cites·24 claims
- 1695US11180851B2Rotary reactor for uniform particle coating with thin filmsAPPLIED MATERIALS INC·Filed 2019·Granted Nov 23, 2021·9 cites·14 claims
- 1795US9378994B2Multi-position batch load lock apparatus and systems and methods including sameAPPLIED MATERIALS INC·Filed 2014·Granted Jun 28, 2016·19 cites·14 claims
- 1895US6350320B1Heater for processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Feb 26, 2002·293 cites·28 claims
- 1994US6994319B2Membrane gas valve for pulsing a gasAPPLIED MATERIALS INC·Filed 2003·Granted Feb 7, 2006·48 cites·20 claims
- 2094US6818094B2Reciprocating gas valve for pulsing a gasAPPLIED MATERIALS INC·Filed 2003·Granted Nov 16, 2004·64 cites·22 claims
- 2194US6464795B1Substrate support member for a processing chamberAPPLIED MATERIALS INC·Filed 2000·Granted Oct 15, 2002·98 cites·28 claims
- 2292US10192770B2Spring-loaded pins for susceptor assembly and processing methods using sameAPPLIED MATERIALS INC·Filed 2014·Granted Jan 29, 2019·10 cites·16 claims
- 2392US8342119B2Self aligning non contact shadow ring process kitAPPLIED MATERIALS INC·Filed 2007·Granted Jan 1, 2013·11 cites·2 claims
- 2492US6328808B1Apparatus and method for aligning and controlling edge deposition on a substrateAPPLIED MATERIALS INC·Filed 2000·Granted Dec 11, 2001·44 cites·16 claims
- 2591US11222809B2Patterned vacuum chuck for double-sided processingAPPLIED MATERIALS INC·Filed 2020·Granted Jan 11, 2022·2 cites·20 claims
- 2691US8955547B2Apparatus and method for providing uniform flow of gasAPPLIED MATERIALS INC·Filed 2013·Granted Feb 17, 2015·15 cites·20 claims
- 2791US6730175B2Ceramic substrate supportAPPLIED MATERIALS INC·Filed 2002·Granted May 4, 2004·76 cites·30 claims
- 2890US7754518B2Millisecond annealing (DSA) edge protectionAPPLIED MATERIALS INC·Filed 2008·Granted Jul 13, 2010·15 cites·14 claims
- 2990US6223447B1Fastening device for a purge ringAPPLIED MATERIALS INC·Filed 2000·Granted May 1, 2001·50 cites·20 claims
- 3090US6168668B1Shadow ring and guide for supporting the shadow ring in a chamberAPPLIED MATERIALS INC·Filed 1998·Granted Jan 2, 2001·86 cites·27 claims
- 3189US12230530B2Apparatus and methods for semiconductor processingAPPLIED MATERIALS INC·Filed 2024·Granted Feb 18, 2025·0 cites·24 claims
- 3289US10861736B2Apparatus and methods for wafer rotation in carousel susceptorAPPLIED MATERIALS INC·Filed 2019·Granted Dec 8, 2020·4 cites·16 claims
- 3389US7779527B2Methods and apparatus for installing a scrubber brush on a mandrelAPPLIED MATERIALS INC·Filed 2008·Granted Aug 24, 2010·13 cites·20 claims
- 3488US9922860B2Apparatus and methods for wafer chucking on a susceptor for ALDAPPLIED MATERIALS INC·Filed 2014·Granted Mar 20, 2018·5 cites·15 claims
- 3588US7833351B2Batch processing platform for ALD and CVDAPPLIED MATERIALS INC·Filed 2006·Granted Nov 16, 2010·12 cites·2 claims
- 3687US10954596B2Temporal atomic layer deposition process chamberAPPLIED MATERIALS INC·Filed 2017·Granted Mar 23, 2021·4 cites·19 claims
- 3787US9765434B2Apparatus for susceptor temperature verification and methods of useAPPLIED MATERIALS INC·Filed 2015·Granted Sep 19, 2017·2 cites·10 claims
- 3887US7429717B2Multizone heater for furnaceAPPLIED MATERIALS INC·Filed 2006·Granted Sep 30, 2008·11 cites·19 claims
- 3986US11094577B2Apparatus and methods for wafer chucking on a susceptor for ALDAPPLIED MATERIALS INC·Filed 2018·Granted Aug 17, 2021·2 cites·11 claims
- 4086US10351956B2Integrated two-axis lift-rotation motor center pedestal in multi-wafer carousel ALDAPPLIED MATERIALS INC·Filed 2015·Granted Jul 16, 2019·3 cites·17 claims
- 4186US7748542B2Batch deposition tool and compressed boatAPPLIED MATERIALS INC·Filed 2005·Granted Jul 6, 2010·11 cites·15 claims
- 4286US6521292B1Substrate support including purge ring having inner edge aligned to wafer edgeAPPLIED MATERIALS INC·Filed 2000·Granted Feb 18, 2003·46 cites·19 claims
- 4385US9261193B2Sealing apparatus for a process chamberAPPLIED MATERIALS INC·Filed 2013·Granted Feb 16, 2016·5 cites·18 claims
- 4484US11984343B2Apparatus and methods for semiconductor processingAPPLIED MATERIALS INC·Filed 2023·Granted May 14, 2024·0 cites·26 claims
- 4584US9721757B2Elongated capacitively coupled plasma source for high temperature low pressure environmentsAPPLIED MATERIALS INC·Filed 2016·Granted Aug 1, 2017·3 cites·18 claims
- 4684US9111876B2Methods for atomic layer etchingAPPLIED MATERIALS INC·Filed 2013·Granted Aug 18, 2015·4 cites·19 claims
- 4783US10685864B2Contour pocket and hybrid susceptor for wafer uniformityAPPLIED MATERIALS INC·Filed 2017·Granted Jun 16, 2020·2 cites·12 claims
- 4883US5985033AApparatus and method for delivering a gasAPPLIED MATERIALS INC·Filed 1997·Granted Nov 16, 1999·57 cites·25 claims
- 4982US10197385B2Intelligent hardstop for gap detection and control mechanismAPPLIED MATERIALS INC·Filed 2017·Granted Feb 5, 2019·3 cites·17 claims
- 5082US7923280B2Millisecond annealing (DSA) edge protectionAPPLIED MATERIALS INC·Filed 2010·Granted Apr 12, 2011·5 cites·9 claims
Showing the top 50 of 170 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →